1/28/2013	12:02:45 AM	Helium valve closed
1/28/2013	12:02:45 AM	H2 valve closed
1/28/2013	12:02:45 AM	BCl3 valve closed
1/28/2013	12:02:45 AM	PH3 valve closed
1/28/2013	12:02:45 AM	SiCl4 pre valve closed
1/28/2013	12:02:45 AM	SiCl4 post valve closed
1/28/2013	12:02:45 AM	Main Vac valve closed
1/28/2013	12:02:45 AM	Bypass valve closed
1/28/2013	12:02:45 AM	Bubbler valve closed
1/28/2013	12:02:45 AM	Helium MFC set to  0.000000
1/28/2013	12:02:45 AM	H2 MFC set to  0.000000
1/28/2013	12:02:45 AM	BCl3 MFC set to  0.000000
1/28/2013	12:02:45 AM	PH3 MFC set to  0.000000
1/28/2013	12:02:45 AM	SiCl4 MFC set to  0.000000
1/28/2013	12:02:45 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	12:02:45 AM	Tube furnace set to 0
1/28/2013	12:02:46 AM	Run finished at 12:02 AM
1/28/2013	12:07:41 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/28/2013	12:07:42 AM	Recipe started at 12:07 AM
1/28/2013	12:07:42 AM	Helium valve closed
1/28/2013	12:07:42 AM	H2 valve closed
1/28/2013	12:07:42 AM	BCl3 valve closed
1/28/2013	12:07:42 AM	PH3 valve closed
1/28/2013	12:07:42 AM	SiCl4 pre valve closed
1/28/2013	12:07:42 AM	SiCl4 post valve closed
1/28/2013	12:07:42 AM	Main Vac valve closed
1/28/2013	12:07:42 AM	Bypass valve closed
1/28/2013	12:07:42 AM	Bubbler valve closed
1/28/2013	12:07:42 AM	Helium MFC set to  0.000000
1/28/2013	12:07:42 AM	H2 MFC set to  0.000000
1/28/2013	12:07:42 AM	BCl3 MFC set to  0.000000
1/28/2013	12:07:42 AM	PH3 MFC set to  0.000000
1/28/2013	12:07:42 AM	SiCl4 MFC set to  0.000000
1/28/2013	12:07:42 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	12:07:42 AM	Tube furnace set to 0
1/28/2013	12:07:45 AM	H2 valve closed
1/28/2013	12:07:45 AM	BCl3 valve closed
1/28/2013	12:07:45 AM	PH3 valve closed
1/28/2013	12:07:45 AM	SiCl4 pre valve closed
1/28/2013	12:07:45 AM	SiCl4 post valve closed
1/28/2013	12:07:45 AM	Main Vac valve closed
1/28/2013	12:07:45 AM	Bypass valve closed
1/28/2013	12:07:45 AM	Bubbler valve closed
1/28/2013	12:07:45 AM	Helium valve opened
1/28/2013	12:07:45 AM	Helium MFC set to  500.000000
1/28/2013	12:07:45 AM	H2 MFC set to  0.000000
1/28/2013	12:07:45 AM	BCl3 MFC set to  0.000000
1/28/2013	12:07:45 AM	PH3 MFC set to  0.000000
1/28/2013	12:07:45 AM	SiCl4 MFC set to  0.000000
1/28/2013	12:07:45 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	12:07:45 AM	Tube furnace set to 0
1/28/2013	12:07:46 AM	Helium valve closed
1/28/2013	12:07:46 AM	H2 valve closed
1/28/2013	12:07:46 AM	BCl3 valve closed
1/28/2013	12:07:46 AM	PH3 valve closed
1/28/2013	12:07:46 AM	SiCl4 pre valve closed
1/28/2013	12:07:46 AM	SiCl4 post valve closed
1/28/2013	12:07:46 AM	Main Vac valve closed
1/28/2013	12:07:46 AM	Bypass valve closed
1/28/2013	12:07:46 AM	Bubbler valve closed
1/28/2013	12:07:46 AM	Helium MFC set to  0.000000
1/28/2013	12:07:46 AM	H2 MFC set to  0.000000
1/28/2013	12:07:46 AM	BCl3 MFC set to  0.000000
1/28/2013	12:07:46 AM	PH3 MFC set to  0.000000
1/28/2013	12:07:46 AM	SiCl4 MFC set to  0.000000
1/28/2013	12:07:46 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	12:07:46 AM	Tube furnace set to 0
1/28/2013	12:07:47 AM	Run finished at 12:07 AM
1/28/2013	12:07:47 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/28/2013	12:10:26 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/28/2013	12:10:26 AM	Recipe started at 12:10 AM
1/28/2013	12:10:26 AM	Helium valve closed
1/28/2013	12:10:26 AM	H2 valve closed
1/28/2013	12:10:26 AM	BCl3 valve closed
1/28/2013	12:10:26 AM	PH3 valve closed
1/28/2013	12:10:26 AM	SiCl4 pre valve closed
1/28/2013	12:10:26 AM	SiCl4 post valve closed
1/28/2013	12:10:26 AM	Main Vac valve closed
1/28/2013	12:10:26 AM	Bubbler valve closed
1/28/2013	12:10:26 AM	Bypass valve opened
1/28/2013	12:10:26 AM	Helium MFC set to  0.000000
1/28/2013	12:10:26 AM	H2 MFC set to  0.000000
1/28/2013	12:10:26 AM	BCl3 MFC set to  0.000000
1/28/2013	12:10:26 AM	PH3 MFC set to  0.000000
1/28/2013	12:10:27 AM	SiCl4 MFC set to  0.000000
1/28/2013	12:10:27 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	12:10:27 AM	Tube furnace set to 0
1/28/2013	12:11:30 AM	Helium valve closed
1/28/2013	12:11:30 AM	H2 valve closed
1/28/2013	12:11:30 AM	BCl3 valve closed
1/28/2013	12:11:30 AM	PH3 valve closed
1/28/2013	12:11:30 AM	SiCl4 pre valve closed
1/28/2013	12:11:30 AM	SiCl4 post valve closed
1/28/2013	12:11:30 AM	Main Vac valve closed
1/28/2013	12:11:30 AM	Bubbler valve closed
1/28/2013	12:11:30 AM	Bypass valve opened
1/28/2013	12:11:30 AM	Helium MFC set to  0.000000
1/28/2013	12:11:30 AM	H2 MFC set to  0.000000
1/28/2013	12:11:30 AM	BCl3 MFC set to  0.000000
1/28/2013	12:11:30 AM	PH3 MFC set to  0.000000
1/28/2013	12:11:30 AM	SiCl4 MFC set to  0.000000
1/28/2013	12:11:30 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	12:11:30 AM	Tube furnace set to 0
1/28/2013	12:12:30 AM	Helium valve closed
1/28/2013	12:12:30 AM	H2 valve closed
1/28/2013	12:12:30 AM	BCl3 valve closed
1/28/2013	12:12:30 AM	PH3 valve closed
1/28/2013	12:12:30 AM	SiCl4 pre valve closed
1/28/2013	12:12:30 AM	SiCl4 post valve closed
1/28/2013	12:12:30 AM	Bypass valve closed
1/28/2013	12:12:30 AM	Bubbler valve closed
1/28/2013	12:12:30 AM	Main Vac valve opened
1/28/2013	12:12:30 AM	Helium MFC set to  0.000000
1/28/2013	12:12:30 AM	H2 MFC set to  0.000000
1/28/2013	12:12:30 AM	BCl3 MFC set to  0.000000
1/28/2013	12:12:30 AM	PH3 MFC set to  0.000000
1/28/2013	12:12:30 AM	SiCl4 MFC set to  0.000000
1/28/2013	12:12:30 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	12:12:31 AM	Tube furnace set to 0
1/28/2013	12:12:32 AM	Run finished at 12:12 AM
1/28/2013	12:12:32 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/28/2013	12:12:59 AM	Recipe started at 12:12 AM
1/28/2013	12:12:59 AM	Helium valve closed
1/28/2013	12:12:59 AM	H2 valve closed
1/28/2013	12:12:59 AM	BCl3 valve closed
1/28/2013	12:12:59 AM	PH3 valve closed
1/28/2013	12:12:59 AM	SiCl4 pre valve closed
1/28/2013	12:12:59 AM	SiCl4 post valve closed
1/28/2013	12:12:59 AM	Bypass valve closed
1/28/2013	12:12:59 AM	Bubbler valve closed
1/28/2013	12:12:59 AM	Main Vac valve opened
1/28/2013	12:12:59 AM	Helium MFC set to  0.000000
1/28/2013	12:12:59 AM	H2 MFC set to  0.000000
1/28/2013	12:12:59 AM	BCl3 MFC set to  0.000000
1/28/2013	12:12:59 AM	PH3 MFC set to  0.000000
1/28/2013	12:12:59 AM	SiCl4 MFC set to  0.000000
1/28/2013	12:12:59 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	12:12:59 AM	Tube furnace set to 150
1/28/2013	12:13:14 AM	Run aborted at 12:13 AM
1/28/2013	12:13:14 AM	Helium valve closed
1/28/2013	12:13:14 AM	H2 valve closed
1/28/2013	12:13:14 AM	BCl3 valve closed
1/28/2013	12:13:14 AM	PH3 valve closed
1/28/2013	12:13:14 AM	SiCl4 pre valve closed
1/28/2013	12:13:14 AM	SiCl4 post valve closed
1/28/2013	12:13:14 AM	Bypass valve closed
1/28/2013	12:13:14 AM	Main Vac valve closed
1/28/2013	12:13:14 AM	Bubbler valve closed
1/28/2013	12:13:14 AM	Helium MFC set to  0.000000
1/28/2013	12:13:14 AM	H2 MFC set to  0.000000
1/28/2013	12:13:14 AM	BCl3 MFC set to  0.000000
1/28/2013	12:13:14 AM	PH3 MFC set to  0.000000
1/28/2013	12:13:14 AM	SiCl4 MFC set to  0.000000
1/28/2013	12:13:14 AM	Tube furnace set to 0
1/28/2013	12:13:15 AM	Main Vac valve opened
1/28/2013	12:14:24 AM	Recipe started at 12:14 AM
1/28/2013	12:14:24 AM	Helium valve closed
1/28/2013	12:14:24 AM	BCl3 valve closed
1/28/2013	12:14:24 AM	PH3 valve closed
1/28/2013	12:14:24 AM	SiCl4 pre valve closed
1/28/2013	12:14:24 AM	SiCl4 post valve closed
1/28/2013	12:14:24 AM	Bypass valve closed
1/28/2013	12:14:24 AM	Bubbler valve closed
1/28/2013	12:14:24 AM	H2 valve opened
1/28/2013	12:14:24 AM	Main Vac valve opened
1/28/2013	12:14:24 AM	Helium MFC set to  0.000000
1/28/2013	12:14:24 AM	H2 MFC set to  0.000000
1/28/2013	12:14:24 AM	BCl3 MFC set to  0.000000
1/28/2013	12:14:24 AM	PH3 MFC set to  0.000000
1/28/2013	12:14:24 AM	SiCl4 MFC set to  0.000000
1/28/2013	12:14:24 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	12:14:24 AM	Tube furnace set to 150
1/28/2013	12:14:54 AM	H2 valve closed
1/28/2013	12:14:54 AM	BCl3 valve closed
1/28/2013	12:14:54 AM	PH3 valve closed
1/28/2013	12:14:54 AM	SiCl4 pre valve closed
1/28/2013	12:14:54 AM	SiCl4 post valve closed
1/28/2013	12:14:54 AM	Bypass valve closed
1/28/2013	12:14:54 AM	Bubbler valve closed
1/28/2013	12:14:54 AM	Helium valve opened
1/28/2013	12:14:54 AM	Main Vac valve opened
1/28/2013	12:14:54 AM	Helium MFC set to  20.000000
1/28/2013	12:14:54 AM	H2 MFC set to  0.000000
1/28/2013	12:14:54 AM	BCl3 MFC set to  0.000000
1/28/2013	12:14:54 AM	PH3 MFC set to  0.000000
1/28/2013	12:14:54 AM	SiCl4 MFC set to  0.000000
1/28/2013	12:14:54 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	12:14:54 AM	Tube furnace set to 150
1/28/2013	12:15:24 AM	Helium valve closed
1/28/2013	12:15:24 AM	H2 valve closed
1/28/2013	12:15:24 AM	BCl3 valve closed
1/28/2013	12:15:24 AM	PH3 valve closed
1/28/2013	12:15:24 AM	SiCl4 pre valve closed
1/28/2013	12:15:24 AM	SiCl4 post valve closed
1/28/2013	12:15:24 AM	Bypass valve closed
1/28/2013	12:15:24 AM	Bubbler valve closed
1/28/2013	12:15:24 AM	Main Vac valve opened
1/28/2013	12:15:24 AM	Helium MFC set to  0.000000
1/28/2013	12:15:24 AM	H2 MFC set to  0.000000
1/28/2013	12:15:24 AM	BCl3 MFC set to  0.000000
1/28/2013	12:15:24 AM	PH3 MFC set to  0.000000
1/28/2013	12:15:24 AM	SiCl4 MFC set to  0.000000
1/28/2013	12:15:24 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	12:15:25 AM	Tube furnace set to 150
1/28/2013	12:15:55 AM	H2 valve closed
1/28/2013	12:15:55 AM	BCl3 valve closed
1/28/2013	12:15:55 AM	PH3 valve closed
1/28/2013	12:15:55 AM	SiCl4 pre valve closed
1/28/2013	12:15:55 AM	SiCl4 post valve closed
1/28/2013	12:15:55 AM	Bypass valve closed
1/28/2013	12:15:55 AM	Bubbler valve closed
1/28/2013	12:15:55 AM	Helium valve opened
1/28/2013	12:15:55 AM	Main Vac valve opened
1/28/2013	12:15:55 AM	Helium MFC set to  20.000000
1/28/2013	12:15:55 AM	H2 MFC set to  0.000000
1/28/2013	12:15:55 AM	BCl3 MFC set to  0.000000
1/28/2013	12:15:55 AM	PH3 MFC set to  0.000000
1/28/2013	12:15:55 AM	SiCl4 MFC set to  0.000000
1/28/2013	12:15:55 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	12:15:55 AM	Tube furnace set to 150
1/28/2013	12:16:25 AM	Helium valve closed
1/28/2013	12:16:25 AM	H2 valve closed
1/28/2013	12:16:25 AM	BCl3 valve closed
1/28/2013	12:16:25 AM	PH3 valve closed
1/28/2013	12:16:25 AM	SiCl4 pre valve closed
1/28/2013	12:16:25 AM	SiCl4 post valve closed
1/28/2013	12:16:25 AM	Bypass valve closed
1/28/2013	12:16:25 AM	Bubbler valve closed
1/28/2013	12:16:25 AM	Main Vac valve opened
1/28/2013	12:16:25 AM	Helium MFC set to  0.000000
1/28/2013	12:16:25 AM	H2 MFC set to  0.000000
1/28/2013	12:16:25 AM	BCl3 MFC set to  0.000000
1/28/2013	12:16:25 AM	PH3 MFC set to  0.000000
1/28/2013	12:16:25 AM	SiCl4 MFC set to  0.000000
1/28/2013	12:16:25 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	12:16:25 AM	Tube furnace set to 150
1/28/2013	12:16:55 AM	H2 valve closed
1/28/2013	12:16:55 AM	BCl3 valve closed
1/28/2013	12:16:55 AM	PH3 valve closed
1/28/2013	12:16:55 AM	SiCl4 pre valve closed
1/28/2013	12:16:55 AM	SiCl4 post valve closed
1/28/2013	12:16:55 AM	Bypass valve closed
1/28/2013	12:16:55 AM	Bubbler valve closed
1/28/2013	12:16:55 AM	Helium valve opened
1/28/2013	12:16:55 AM	Main Vac valve opened
1/28/2013	12:16:55 AM	Helium MFC set to  20.000000
1/28/2013	12:16:55 AM	H2 MFC set to  0.000000
1/28/2013	12:16:55 AM	BCl3 MFC set to  0.000000
1/28/2013	12:16:55 AM	PH3 MFC set to  0.000000
1/28/2013	12:16:55 AM	SiCl4 MFC set to  0.000000
1/28/2013	12:16:55 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	12:16:55 AM	Tube furnace set to 150
1/28/2013	12:18:55 AM	Helium valve closed
1/28/2013	12:18:55 AM	H2 valve closed
1/28/2013	12:18:55 AM	BCl3 valve closed
1/28/2013	12:18:55 AM	PH3 valve closed
1/28/2013	12:18:55 AM	SiCl4 pre valve closed
1/28/2013	12:18:55 AM	SiCl4 post valve closed
1/28/2013	12:18:55 AM	Bypass valve closed
1/28/2013	12:18:55 AM	Bubbler valve closed
1/28/2013	12:18:55 AM	Main Vac valve opened
1/28/2013	12:18:55 AM	Helium MFC set to  0.000000
1/28/2013	12:18:55 AM	H2 MFC set to  0.000000
1/28/2013	12:18:55 AM	BCl3 MFC set to  0.000000
1/28/2013	12:18:55 AM	PH3 MFC set to  0.000000
1/28/2013	12:18:55 AM	SiCl4 MFC set to  0.000000
1/28/2013	12:18:55 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	12:18:56 AM	Tube furnace set to 150
1/28/2013	12:19:26 AM	H2 valve closed
1/28/2013	12:19:26 AM	BCl3 valve closed
1/28/2013	12:19:26 AM	PH3 valve closed
1/28/2013	12:19:26 AM	SiCl4 pre valve closed
1/28/2013	12:19:26 AM	SiCl4 post valve closed
1/28/2013	12:19:26 AM	Bypass valve closed
1/28/2013	12:19:26 AM	Bubbler valve closed
1/28/2013	12:19:26 AM	Helium valve opened
1/28/2013	12:19:26 AM	Main Vac valve opened
1/28/2013	12:19:26 AM	Helium MFC set to  20.000000
1/28/2013	12:19:26 AM	H2 MFC set to  0.000000
1/28/2013	12:19:26 AM	BCl3 MFC set to  0.000000
1/28/2013	12:19:26 AM	PH3 MFC set to  0.000000
1/28/2013	12:19:26 AM	SiCl4 MFC set to  0.000000
1/28/2013	12:19:26 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	12:19:26 AM	Tube furnace set to 150
1/28/2013	12:19:56 AM	Helium valve closed
1/28/2013	12:19:56 AM	H2 valve closed
1/28/2013	12:19:56 AM	BCl3 valve closed
1/28/2013	12:19:56 AM	PH3 valve closed
1/28/2013	12:19:56 AM	SiCl4 pre valve closed
1/28/2013	12:19:56 AM	SiCl4 post valve closed
1/28/2013	12:19:56 AM	Bypass valve closed
1/28/2013	12:19:56 AM	Bubbler valve closed
1/28/2013	12:19:56 AM	Main Vac valve opened
1/28/2013	12:19:56 AM	Helium MFC set to  0.000000
1/28/2013	12:19:56 AM	H2 MFC set to  0.000000
1/28/2013	12:19:56 AM	BCl3 MFC set to  0.000000
1/28/2013	12:19:56 AM	PH3 MFC set to  0.000000
1/28/2013	12:19:56 AM	SiCl4 MFC set to  0.000000
1/28/2013	12:19:56 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	12:19:56 AM	Tube furnace set to 150
1/28/2013	12:20:26 AM	H2 valve closed
1/28/2013	12:20:26 AM	BCl3 valve closed
1/28/2013	12:20:26 AM	PH3 valve closed
1/28/2013	12:20:26 AM	SiCl4 pre valve closed
1/28/2013	12:20:26 AM	SiCl4 post valve closed
1/28/2013	12:20:26 AM	Bypass valve closed
1/28/2013	12:20:26 AM	Bubbler valve closed
1/28/2013	12:20:26 AM	Helium valve opened
1/28/2013	12:20:26 AM	Main Vac valve opened
1/28/2013	12:20:26 AM	Helium MFC set to  20.000000
1/28/2013	12:20:26 AM	H2 MFC set to  0.000000
1/28/2013	12:20:26 AM	BCl3 MFC set to  0.000000
1/28/2013	12:20:26 AM	PH3 MFC set to  0.000000
1/28/2013	12:20:26 AM	SiCl4 MFC set to  0.000000
1/28/2013	12:20:26 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	12:20:26 AM	Tube furnace set to 150
1/28/2013	12:20:56 AM	Helium valve closed
1/28/2013	12:20:56 AM	H2 valve closed
1/28/2013	12:20:56 AM	BCl3 valve closed
1/28/2013	12:20:56 AM	PH3 valve closed
1/28/2013	12:20:56 AM	SiCl4 pre valve closed
1/28/2013	12:20:56 AM	SiCl4 post valve closed
1/28/2013	12:20:56 AM	Bypass valve closed
1/28/2013	12:20:56 AM	Bubbler valve closed
1/28/2013	12:20:56 AM	Main Vac valve opened
1/28/2013	12:20:56 AM	Helium MFC set to  0.000000
1/28/2013	12:20:56 AM	H2 MFC set to  0.000000
1/28/2013	12:20:56 AM	BCl3 MFC set to  0.000000
1/28/2013	12:20:56 AM	PH3 MFC set to  0.000000
1/28/2013	12:20:56 AM	SiCl4 MFC set to  0.000000
1/28/2013	12:20:56 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	12:20:57 AM	Tube furnace set to 150
1/28/2013	12:21:27 AM	H2 valve closed
1/28/2013	12:21:27 AM	BCl3 valve closed
1/28/2013	12:21:27 AM	PH3 valve closed
1/28/2013	12:21:27 AM	SiCl4 pre valve closed
1/28/2013	12:21:27 AM	SiCl4 post valve closed
1/28/2013	12:21:27 AM	Bypass valve closed
1/28/2013	12:21:27 AM	Bubbler valve closed
1/28/2013	12:21:27 AM	Helium valve opened
1/28/2013	12:21:27 AM	Main Vac valve opened
1/28/2013	12:21:27 AM	Helium MFC set to  20.000000
1/28/2013	12:21:27 AM	H2 MFC set to  0.000000
1/28/2013	12:21:27 AM	BCl3 MFC set to  0.000000
1/28/2013	12:21:27 AM	PH3 MFC set to  0.000000
1/28/2013	12:21:27 AM	SiCl4 MFC set to  0.000000
1/28/2013	12:21:27 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	12:21:27 AM	Tube furnace set to 150
1/28/2013	12:23:27 AM	Helium valve closed
1/28/2013	12:23:27 AM	H2 valve closed
1/28/2013	12:23:27 AM	BCl3 valve closed
1/28/2013	12:23:27 AM	PH3 valve closed
1/28/2013	12:23:27 AM	SiCl4 pre valve closed
1/28/2013	12:23:27 AM	SiCl4 post valve closed
1/28/2013	12:23:27 AM	Bypass valve closed
1/28/2013	12:23:27 AM	Bubbler valve closed
1/28/2013	12:23:27 AM	Main Vac valve opened
1/28/2013	12:23:27 AM	Helium MFC set to  0.000000
1/28/2013	12:23:27 AM	H2 MFC set to  0.000000
1/28/2013	12:23:27 AM	BCl3 MFC set to  0.000000
1/28/2013	12:23:27 AM	PH3 MFC set to  0.000000
1/28/2013	12:23:27 AM	SiCl4 MFC set to  0.000000
1/28/2013	12:23:27 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	12:23:27 AM	Tube furnace set to 150
1/28/2013	12:23:57 AM	H2 valve closed
1/28/2013	12:23:57 AM	BCl3 valve closed
1/28/2013	12:23:57 AM	PH3 valve closed
1/28/2013	12:23:57 AM	SiCl4 pre valve closed
1/28/2013	12:23:57 AM	SiCl4 post valve closed
1/28/2013	12:23:57 AM	Bypass valve closed
1/28/2013	12:23:57 AM	Bubbler valve closed
1/28/2013	12:23:57 AM	Helium valve opened
1/28/2013	12:23:57 AM	Main Vac valve opened
1/28/2013	12:23:57 AM	Helium MFC set to  20.000000
1/28/2013	12:23:57 AM	H2 MFC set to  0.000000
1/28/2013	12:23:57 AM	BCl3 MFC set to  0.000000
1/28/2013	12:23:57 AM	PH3 MFC set to  0.000000
1/28/2013	12:23:57 AM	SiCl4 MFC set to  0.000000
1/28/2013	12:23:57 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	12:23:57 AM	Tube furnace set to 150
1/28/2013	12:24:27 AM	Helium valve closed
1/28/2013	12:24:27 AM	H2 valve closed
1/28/2013	12:24:27 AM	BCl3 valve closed
1/28/2013	12:24:27 AM	PH3 valve closed
1/28/2013	12:24:27 AM	SiCl4 pre valve closed
1/28/2013	12:24:27 AM	SiCl4 post valve closed
1/28/2013	12:24:27 AM	Bypass valve closed
1/28/2013	12:24:27 AM	Bubbler valve closed
1/28/2013	12:24:27 AM	Main Vac valve opened
1/28/2013	12:24:27 AM	Helium MFC set to  0.000000
1/28/2013	12:24:27 AM	H2 MFC set to  0.000000
1/28/2013	12:24:27 AM	BCl3 MFC set to  0.000000
1/28/2013	12:24:27 AM	PH3 MFC set to  0.000000
1/28/2013	12:24:27 AM	SiCl4 MFC set to  0.000000
1/28/2013	12:24:27 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	12:24:28 AM	Tube furnace set to 150
1/28/2013	12:24:58 AM	H2 valve closed
1/28/2013	12:24:58 AM	BCl3 valve closed
1/28/2013	12:24:58 AM	PH3 valve closed
1/28/2013	12:24:58 AM	SiCl4 pre valve closed
1/28/2013	12:24:58 AM	SiCl4 post valve closed
1/28/2013	12:24:58 AM	Bypass valve closed
1/28/2013	12:24:58 AM	Bubbler valve closed
1/28/2013	12:24:58 AM	Helium valve opened
1/28/2013	12:24:58 AM	Main Vac valve opened
1/28/2013	12:24:58 AM	Helium MFC set to  20.000000
1/28/2013	12:24:58 AM	H2 MFC set to  0.000000
1/28/2013	12:24:58 AM	BCl3 MFC set to  0.000000
1/28/2013	12:24:58 AM	PH3 MFC set to  0.000000
1/28/2013	12:24:58 AM	SiCl4 MFC set to  0.000000
1/28/2013	12:24:58 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	12:24:58 AM	Tube furnace set to 150
1/28/2013	12:26:58 AM	Helium valve closed
1/28/2013	12:26:58 AM	H2 valve closed
1/28/2013	12:26:58 AM	BCl3 valve closed
1/28/2013	12:26:58 AM	PH3 valve closed
1/28/2013	12:26:58 AM	SiCl4 pre valve closed
1/28/2013	12:26:58 AM	SiCl4 post valve closed
1/28/2013	12:26:58 AM	Bypass valve closed
1/28/2013	12:26:58 AM	Bubbler valve closed
1/28/2013	12:26:58 AM	Main Vac valve opened
1/28/2013	12:26:58 AM	Helium MFC set to  0.000000
1/28/2013	12:26:58 AM	H2 MFC set to  0.000000
1/28/2013	12:26:58 AM	BCl3 MFC set to  0.000000
1/28/2013	12:26:58 AM	PH3 MFC set to  0.000000
1/28/2013	12:26:58 AM	SiCl4 MFC set to  0.000000
1/28/2013	12:26:58 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	12:26:58 AM	Tube furnace set to 150
1/28/2013	12:27:28 AM	H2 valve closed
1/28/2013	12:27:28 AM	BCl3 valve closed
1/28/2013	12:27:28 AM	PH3 valve closed
1/28/2013	12:27:28 AM	SiCl4 pre valve closed
1/28/2013	12:27:28 AM	SiCl4 post valve closed
1/28/2013	12:27:28 AM	Bypass valve closed
1/28/2013	12:27:28 AM	Bubbler valve closed
1/28/2013	12:27:28 AM	Helium valve opened
1/28/2013	12:27:28 AM	Main Vac valve opened
1/28/2013	12:27:28 AM	Helium MFC set to  20.000000
1/28/2013	12:27:28 AM	H2 MFC set to  0.000000
1/28/2013	12:27:28 AM	BCl3 MFC set to  0.000000
1/28/2013	12:27:28 AM	PH3 MFC set to  0.000000
1/28/2013	12:27:28 AM	SiCl4 MFC set to  0.000000
1/28/2013	12:27:28 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	12:27:28 AM	Tube furnace set to 150
1/28/2013	12:27:58 AM	Helium valve closed
1/28/2013	12:27:58 AM	H2 valve closed
1/28/2013	12:27:58 AM	BCl3 valve closed
1/28/2013	12:27:58 AM	PH3 valve closed
1/28/2013	12:27:58 AM	SiCl4 pre valve closed
1/28/2013	12:27:58 AM	SiCl4 post valve closed
1/28/2013	12:27:58 AM	Bypass valve closed
1/28/2013	12:27:58 AM	Bubbler valve closed
1/28/2013	12:27:58 AM	Main Vac valve opened
1/28/2013	12:27:58 AM	Helium MFC set to  0.000000
1/28/2013	12:27:58 AM	H2 MFC set to  0.000000
1/28/2013	12:27:58 AM	BCl3 MFC set to  0.000000
1/28/2013	12:27:58 AM	PH3 MFC set to  0.000000
1/28/2013	12:27:58 AM	SiCl4 MFC set to  0.000000
1/28/2013	12:27:58 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	12:27:59 AM	Tube furnace set to 150
1/28/2013	12:28:29 AM	H2 valve closed
1/28/2013	12:28:29 AM	BCl3 valve closed
1/28/2013	12:28:29 AM	PH3 valve closed
1/28/2013	12:28:29 AM	SiCl4 pre valve closed
1/28/2013	12:28:29 AM	SiCl4 post valve closed
1/28/2013	12:28:29 AM	Bypass valve closed
1/28/2013	12:28:29 AM	Bubbler valve closed
1/28/2013	12:28:29 AM	Helium valve opened
1/28/2013	12:28:29 AM	Main Vac valve opened
1/28/2013	12:28:29 AM	Helium MFC set to  20.000000
1/28/2013	12:28:29 AM	H2 MFC set to  0.000000
1/28/2013	12:28:29 AM	BCl3 MFC set to  0.000000
1/28/2013	12:28:29 AM	PH3 MFC set to  0.000000
1/28/2013	12:28:29 AM	SiCl4 MFC set to  0.000000
1/28/2013	12:28:29 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	12:28:29 AM	Tube furnace set to 150
1/28/2013	12:30:29 AM	Helium valve closed
1/28/2013	12:30:29 AM	H2 valve closed
1/28/2013	12:30:29 AM	BCl3 valve closed
1/28/2013	12:30:29 AM	PH3 valve closed
1/28/2013	12:30:29 AM	SiCl4 pre valve closed
1/28/2013	12:30:29 AM	SiCl4 post valve closed
1/28/2013	12:30:29 AM	Bypass valve closed
1/28/2013	12:30:29 AM	Bubbler valve closed
1/28/2013	12:30:29 AM	Main Vac valve opened
1/28/2013	12:30:29 AM	Helium MFC set to  0.000000
1/28/2013	12:30:29 AM	H2 MFC set to  0.000000
1/28/2013	12:30:29 AM	BCl3 MFC set to  0.000000
1/28/2013	12:30:29 AM	PH3 MFC set to  0.000000
1/28/2013	12:30:29 AM	SiCl4 MFC set to  0.000000
1/28/2013	12:30:29 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	12:30:29 AM	Tube furnace set to 150
1/28/2013	12:30:30 AM	Run finished at 12:30 AM
1/28/2013	10:41:13 AM	Main Vac valve closed
1/28/2013	10:41:17 AM	Main Vac valve opened
1/28/2013	10:42:50 AM	Recipe started at 10:42 AM
1/28/2013	10:42:50 AM	Helium valve closed
1/28/2013	10:42:50 AM	H2 valve closed
1/28/2013	10:42:50 AM	BCl3 valve closed
1/28/2013	10:42:50 AM	PH3 valve closed
1/28/2013	10:42:50 AM	SiCl4 pre valve closed
1/28/2013	10:42:50 AM	SiCl4 post valve closed
1/28/2013	10:42:50 AM	Main Vac valve closed
1/28/2013	10:42:50 AM	Bypass valve closed
1/28/2013	10:42:50 AM	Bubbler valve closed
1/28/2013	10:42:50 AM	Helium MFC set to  0.000000
1/28/2013	10:42:50 AM	H2 MFC set to  0.000000
1/28/2013	10:42:50 AM	BCl3 MFC set to  0.000000
1/28/2013	10:42:50 AM	PH3 MFC set to  0.000000
1/28/2013	10:42:50 AM	SiCl4 MFC set to  0.000000
1/28/2013	10:42:50 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	10:42:50 AM	Tube furnace set to 0
1/28/2013	10:42:53 AM	Helium valve closed
1/28/2013	10:42:53 AM	BCl3 valve closed
1/28/2013	10:42:53 AM	PH3 valve closed
1/28/2013	10:42:53 AM	SiCl4 pre valve closed
1/28/2013	10:42:53 AM	SiCl4 post valve closed
1/28/2013	10:42:53 AM	Main Vac valve closed
1/28/2013	10:42:53 AM	Bypass valve closed
1/28/2013	10:42:53 AM	Bubbler valve closed
1/28/2013	10:42:53 AM	H2 valve opened
1/28/2013	10:42:53 AM	Helium MFC set to  0.000000
1/28/2013	10:42:53 AM	H2 MFC set to  500.000000
1/28/2013	10:42:53 AM	BCl3 MFC set to  0.000000
1/28/2013	10:42:53 AM	PH3 MFC set to  0.000000
1/28/2013	10:42:53 AM	SiCl4 MFC set to  0.000000
1/28/2013	10:42:53 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	10:42:53 AM	Tube furnace set to 0
1/28/2013	10:44:05 AM	Helium valve closed
1/28/2013	10:44:05 AM	BCl3 valve closed
1/28/2013	10:44:05 AM	PH3 valve closed
1/28/2013	10:44:05 AM	SiCl4 pre valve closed
1/28/2013	10:44:05 AM	SiCl4 post valve closed
1/28/2013	10:44:05 AM	Main Vac valve closed
1/28/2013	10:44:05 AM	Bypass valve closed
1/28/2013	10:44:05 AM	H2 valve opened
1/28/2013	10:44:05 AM	Bubbler valve opened
1/28/2013	10:44:05 AM	Helium MFC set to  0.000000
1/28/2013	10:44:05 AM	H2 MFC set to  500.000000
1/28/2013	10:44:05 AM	BCl3 MFC set to  0.000000
1/28/2013	10:44:05 AM	PH3 MFC set to  0.000000
1/28/2013	10:44:05 AM	SiCl4 MFC set to  0.000000
1/28/2013	10:44:05 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	10:44:06 AM	Tube furnace set to 0
1/28/2013	10:44:07 AM	Helium valve closed
1/28/2013	10:44:07 AM	BCl3 valve closed
1/28/2013	10:44:07 AM	PH3 valve closed
1/28/2013	10:44:07 AM	SiCl4 pre valve closed
1/28/2013	10:44:07 AM	SiCl4 post valve closed
1/28/2013	10:44:07 AM	Main Vac valve closed
1/28/2013	10:44:07 AM	Bypass valve closed
1/28/2013	10:44:07 AM	H2 valve opened
1/28/2013	10:44:07 AM	Bubbler valve opened
1/28/2013	10:44:07 AM	Helium MFC set to  0.000000
1/28/2013	10:44:07 AM	H2 MFC set to  500.000000
1/28/2013	10:44:07 AM	BCl3 MFC set to  0.000000
1/28/2013	10:44:07 AM	PH3 MFC set to  0.000000
1/28/2013	10:44:07 AM	SiCl4 MFC set to  0.000000
1/28/2013	10:44:07 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	10:44:07 AM	Tube furnace set to 1000
1/28/2013	11:04:07 AM	Helium valve closed
1/28/2013	11:04:07 AM	BCl3 valve closed
1/28/2013	11:04:07 AM	PH3 valve closed
1/28/2013	11:04:07 AM	Main Vac valve closed
1/28/2013	11:04:07 AM	Bypass valve closed
1/28/2013	11:04:07 AM	H2 valve opened
1/28/2013	11:04:07 AM	SiCl4 pre valve opened
1/28/2013	11:04:07 AM	SiCl4 post valve opened
1/28/2013	11:04:07 AM	Bubbler valve opened
1/28/2013	11:04:07 AM	Helium MFC set to  0.000000
1/28/2013	11:04:07 AM	H2 MFC set to  500.000000
1/28/2013	11:04:07 AM	BCl3 MFC set to  0.000000
1/28/2013	11:04:07 AM	PH3 MFC set to  0.000000
1/28/2013	11:04:07 AM	SiCl4 MFC set to  50.000000
1/28/2013	11:04:07 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	11:04:07 AM	Tube furnace set to 1000
1/28/2013	11:16:07 AM	Helium valve closed
1/28/2013	11:16:07 AM	BCl3 valve closed
1/28/2013	11:16:07 AM	PH3 valve closed
1/28/2013	11:16:07 AM	SiCl4 pre valve closed
1/28/2013	11:16:07 AM	SiCl4 post valve closed
1/28/2013	11:16:07 AM	Main Vac valve closed
1/28/2013	11:16:07 AM	Bypass valve closed
1/28/2013	11:16:07 AM	H2 valve opened
1/28/2013	11:16:07 AM	Bubbler valve opened
1/28/2013	11:16:07 AM	Helium MFC set to  0.000000
1/28/2013	11:16:07 AM	H2 MFC set to  500.000000
1/28/2013	11:16:07 AM	BCl3 MFC set to  0.000000
1/28/2013	11:16:07 AM	PH3 MFC set to  0.000000
1/28/2013	11:16:07 AM	SiCl4 MFC set to  0.000000
1/28/2013	11:16:07 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	11:16:07 AM	Tube furnace set to 750
1/28/2013	11:21:07 AM	H2 valve closed
1/28/2013	11:21:07 AM	BCl3 valve closed
1/28/2013	11:21:07 AM	PH3 valve closed
1/28/2013	11:21:07 AM	SiCl4 pre valve closed
1/28/2013	11:21:07 AM	SiCl4 post valve closed
1/28/2013	11:21:07 AM	Main Vac valve closed
1/28/2013	11:21:07 AM	Bypass valve closed
1/28/2013	11:21:07 AM	Helium valve opened
1/28/2013	11:21:07 AM	Bubbler valve opened
1/28/2013	11:21:07 AM	Helium MFC set to  500.000000
1/28/2013	11:21:07 AM	H2 MFC set to  0.000000
1/28/2013	11:21:07 AM	BCl3 MFC set to  0.000000
1/28/2013	11:21:07 AM	PH3 MFC set to  0.000000
1/28/2013	11:21:07 AM	SiCl4 MFC set to  0.000000
1/28/2013	11:21:07 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	11:21:07 AM	Tube furnace set to 0
1/28/2013	11:27:52 AM	Run aborted at 11:27 AM
1/28/2013	11:27:52 AM	Helium valve closed
1/28/2013	11:27:52 AM	H2 valve closed
1/28/2013	11:27:52 AM	BCl3 valve closed
1/28/2013	11:27:52 AM	PH3 valve closed
1/28/2013	11:27:52 AM	SiCl4 pre valve closed
1/28/2013	11:27:52 AM	SiCl4 post valve closed
1/28/2013	11:27:52 AM	Bypass valve closed
1/28/2013	11:27:52 AM	Main Vac valve closed
1/28/2013	11:27:52 AM	Bubbler valve closed
1/28/2013	11:27:52 AM	Helium MFC set to  0.000000
1/28/2013	11:27:52 AM	H2 MFC set to  0.000000
1/28/2013	11:27:52 AM	BCl3 MFC set to  0.000000
1/28/2013	11:27:52 AM	PH3 MFC set to  0.000000
1/28/2013	11:27:52 AM	SiCl4 MFC set to  0.000000
1/28/2013	11:27:52 AM	Tube furnace set to 0
1/28/2013	11:27:54 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/28/2013	11:27:54 AM	Recipe started at 11:27 AM
1/28/2013	11:27:54 AM	Helium valve closed
1/28/2013	11:27:54 AM	H2 valve closed
1/28/2013	11:27:54 AM	BCl3 valve closed
1/28/2013	11:27:54 AM	PH3 valve closed
1/28/2013	11:27:54 AM	SiCl4 pre valve closed
1/28/2013	11:27:54 AM	SiCl4 post valve closed
1/28/2013	11:27:54 AM	Main Vac valve closed
1/28/2013	11:27:54 AM	Bypass valve closed
1/28/2013	11:27:54 AM	Bubbler valve closed
1/28/2013	11:27:54 AM	Helium MFC set to  0.000000
1/28/2013	11:27:54 AM	H2 MFC set to  0.000000
1/28/2013	11:27:54 AM	BCl3 MFC set to  0.000000
1/28/2013	11:27:54 AM	PH3 MFC set to  0.000000
1/28/2013	11:27:54 AM	SiCl4 MFC set to  0.000000
1/28/2013	11:27:54 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	11:27:55 AM	Tube furnace set to 0
1/28/2013	11:27:58 AM	H2 valve closed
1/28/2013	11:27:58 AM	BCl3 valve closed
1/28/2013	11:27:58 AM	PH3 valve closed
1/28/2013	11:27:58 AM	SiCl4 pre valve closed
1/28/2013	11:27:58 AM	SiCl4 post valve closed
1/28/2013	11:27:58 AM	Main Vac valve closed
1/28/2013	11:27:58 AM	Bypass valve closed
1/28/2013	11:27:58 AM	Bubbler valve closed
1/28/2013	11:27:58 AM	Helium valve opened
1/28/2013	11:27:58 AM	Helium MFC set to  500.000000
1/28/2013	11:27:58 AM	H2 MFC set to  0.000000
1/28/2013	11:27:58 AM	BCl3 MFC set to  0.000000
1/28/2013	11:27:58 AM	PH3 MFC set to  0.000000
1/28/2013	11:27:58 AM	SiCl4 MFC set to  0.000000
1/28/2013	11:27:58 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	11:27:58 AM	Tube furnace set to 0
1/28/2013	11:27:58 AM	Helium valve closed
1/28/2013	11:27:58 AM	H2 valve closed
1/28/2013	11:27:58 AM	BCl3 valve closed
1/28/2013	11:27:58 AM	PH3 valve closed
1/28/2013	11:27:58 AM	SiCl4 pre valve closed
1/28/2013	11:27:58 AM	SiCl4 post valve closed
1/28/2013	11:27:58 AM	Main Vac valve closed
1/28/2013	11:27:58 AM	Bypass valve closed
1/28/2013	11:27:58 AM	Bubbler valve closed
1/28/2013	11:27:58 AM	Helium MFC set to  0.000000
1/28/2013	11:27:58 AM	H2 MFC set to  0.000000
1/28/2013	11:27:58 AM	BCl3 MFC set to  0.000000
1/28/2013	11:27:58 AM	PH3 MFC set to  0.000000
1/28/2013	11:27:58 AM	SiCl4 MFC set to  0.000000
1/28/2013	11:27:58 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	11:27:58 AM	Tube furnace set to 0
1/28/2013	11:27:59 AM	Run finished at 11:27 AM
1/28/2013	11:27:59 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/28/2013	11:29:21 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/28/2013	11:29:21 AM	Recipe started at 11:29 AM
1/28/2013	11:29:21 AM	Helium valve closed
1/28/2013	11:29:21 AM	H2 valve closed
1/28/2013	11:29:21 AM	BCl3 valve closed
1/28/2013	11:29:22 AM	PH3 valve closed
1/28/2013	11:29:22 AM	SiCl4 pre valve closed
1/28/2013	11:29:22 AM	SiCl4 post valve closed
1/28/2013	11:29:22 AM	Main Vac valve closed
1/28/2013	11:29:22 AM	Bypass valve closed
1/28/2013	11:29:22 AM	Bubbler valve closed
1/28/2013	11:29:22 AM	Helium MFC set to  0.000000
1/28/2013	11:29:22 AM	H2 MFC set to  0.000000
1/28/2013	11:29:22 AM	BCl3 MFC set to  0.000000
1/28/2013	11:29:22 AM	PH3 MFC set to  0.000000
1/28/2013	11:29:22 AM	SiCl4 MFC set to  0.000000
1/28/2013	11:29:22 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	11:29:22 AM	Tube furnace set to 0
1/28/2013	11:29:25 AM	H2 valve closed
1/28/2013	11:29:25 AM	BCl3 valve closed
1/28/2013	11:29:25 AM	PH3 valve closed
1/28/2013	11:29:25 AM	SiCl4 pre valve closed
1/28/2013	11:29:25 AM	SiCl4 post valve closed
1/28/2013	11:29:25 AM	Main Vac valve closed
1/28/2013	11:29:25 AM	Bypass valve closed
1/28/2013	11:29:25 AM	Bubbler valve closed
1/28/2013	11:29:25 AM	Helium valve opened
1/28/2013	11:29:25 AM	Helium MFC set to  500.000000
1/28/2013	11:29:25 AM	H2 MFC set to  0.000000
1/28/2013	11:29:25 AM	BCl3 MFC set to  0.000000
1/28/2013	11:29:25 AM	PH3 MFC set to  0.000000
1/28/2013	11:29:25 AM	SiCl4 MFC set to  0.000000
1/28/2013	11:29:25 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	11:29:25 AM	Tube furnace set to 0
1/28/2013	11:29:25 AM	Helium valve closed
1/28/2013	11:29:25 AM	H2 valve closed
1/28/2013	11:29:25 AM	BCl3 valve closed
1/28/2013	11:29:25 AM	PH3 valve closed
1/28/2013	11:29:25 AM	SiCl4 pre valve closed
1/28/2013	11:29:25 AM	SiCl4 post valve closed
1/28/2013	11:29:25 AM	Main Vac valve closed
1/28/2013	11:29:25 AM	Bypass valve closed
1/28/2013	11:29:25 AM	Bubbler valve closed
1/28/2013	11:29:25 AM	Helium MFC set to  0.000000
1/28/2013	11:29:25 AM	H2 MFC set to  0.000000
1/28/2013	11:29:25 AM	BCl3 MFC set to  0.000000
1/28/2013	11:29:25 AM	PH3 MFC set to  0.000000
1/28/2013	11:29:25 AM	SiCl4 MFC set to  0.000000
1/28/2013	11:29:25 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	11:29:25 AM	Tube furnace set to 0
1/28/2013	11:29:26 AM	Run finished at 11:29 AM
1/28/2013	11:29:26 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/28/2013	11:32:27 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/28/2013	11:32:28 AM	Recipe started at 11:32 AM
1/28/2013	11:32:28 AM	Helium valve closed
1/28/2013	11:32:28 AM	H2 valve closed
1/28/2013	11:32:28 AM	BCl3 valve closed
1/28/2013	11:32:28 AM	PH3 valve closed
1/28/2013	11:32:28 AM	SiCl4 pre valve closed
1/28/2013	11:32:28 AM	SiCl4 post valve closed
1/28/2013	11:32:28 AM	Main Vac valve closed
1/28/2013	11:32:28 AM	Bubbler valve closed
1/28/2013	11:32:28 AM	Bypass valve opened
1/28/2013	11:32:28 AM	Helium MFC set to  0.000000
1/28/2013	11:32:28 AM	H2 MFC set to  0.000000
1/28/2013	11:32:28 AM	BCl3 MFC set to  0.000000
1/28/2013	11:32:28 AM	PH3 MFC set to  0.000000
1/28/2013	11:32:28 AM	SiCl4 MFC set to  0.000000
1/28/2013	11:32:28 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	11:32:28 AM	Tube furnace set to 0
1/28/2013	11:33:32 AM	Helium valve closed
1/28/2013	11:33:32 AM	H2 valve closed
1/28/2013	11:33:32 AM	BCl3 valve closed
1/28/2013	11:33:32 AM	PH3 valve closed
1/28/2013	11:33:32 AM	SiCl4 pre valve closed
1/28/2013	11:33:32 AM	SiCl4 post valve closed
1/28/2013	11:33:32 AM	Main Vac valve closed
1/28/2013	11:33:32 AM	Bubbler valve closed
1/28/2013	11:33:32 AM	Bypass valve opened
1/28/2013	11:33:32 AM	Helium MFC set to  0.000000
1/28/2013	11:33:32 AM	H2 MFC set to  0.000000
1/28/2013	11:33:32 AM	BCl3 MFC set to  0.000000
1/28/2013	11:33:32 AM	PH3 MFC set to  0.000000
1/28/2013	11:33:32 AM	SiCl4 MFC set to  0.000000
1/28/2013	11:33:32 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	11:33:32 AM	Tube furnace set to 0
1/28/2013	11:34:32 AM	Helium valve closed
1/28/2013	11:34:32 AM	H2 valve closed
1/28/2013	11:34:32 AM	BCl3 valve closed
1/28/2013	11:34:32 AM	PH3 valve closed
1/28/2013	11:34:32 AM	SiCl4 pre valve closed
1/28/2013	11:34:32 AM	SiCl4 post valve closed
1/28/2013	11:34:32 AM	Bypass valve closed
1/28/2013	11:34:32 AM	Bubbler valve closed
1/28/2013	11:34:32 AM	Main Vac valve opened
1/28/2013	11:34:32 AM	Helium MFC set to  0.000000
1/28/2013	11:34:32 AM	H2 MFC set to  0.000000
1/28/2013	11:34:32 AM	BCl3 MFC set to  0.000000
1/28/2013	11:34:32 AM	PH3 MFC set to  0.000000
1/28/2013	11:34:32 AM	SiCl4 MFC set to  0.000000
1/28/2013	11:34:32 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	11:34:32 AM	Tube furnace set to 0
1/28/2013	11:34:33 AM	Run finished at 11:34 AM
1/28/2013	11:34:33 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/28/2013	11:35:02 AM	Recipe started at 11:34 AM
1/28/2013	11:35:02 AM	Helium valve closed
1/28/2013	11:35:02 AM	BCl3 valve closed
1/28/2013	11:35:02 AM	PH3 valve closed
1/28/2013	11:35:02 AM	SiCl4 pre valve closed
1/28/2013	11:35:02 AM	SiCl4 post valve closed
1/28/2013	11:35:02 AM	Bypass valve closed
1/28/2013	11:35:02 AM	Bubbler valve closed
1/28/2013	11:35:02 AM	H2 valve opened
1/28/2013	11:35:02 AM	Main Vac valve opened
1/28/2013	11:35:02 AM	Helium MFC set to  0.000000
1/28/2013	11:35:02 AM	H2 MFC set to  0.000000
1/28/2013	11:35:02 AM	BCl3 MFC set to  0.000000
1/28/2013	11:35:02 AM	PH3 MFC set to  0.000000
1/28/2013	11:35:02 AM	SiCl4 MFC set to  0.000000
1/28/2013	11:35:02 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	11:35:02 AM	Tube furnace set to 150
1/28/2013	11:35:32 AM	H2 valve closed
1/28/2013	11:35:32 AM	BCl3 valve closed
1/28/2013	11:35:32 AM	PH3 valve closed
1/28/2013	11:35:32 AM	SiCl4 pre valve closed
1/28/2013	11:35:32 AM	SiCl4 post valve closed
1/28/2013	11:35:32 AM	Bypass valve closed
1/28/2013	11:35:32 AM	Bubbler valve closed
1/28/2013	11:35:32 AM	Helium valve opened
1/28/2013	11:35:32 AM	Main Vac valve opened
1/28/2013	11:35:32 AM	Helium MFC set to  20.000000
1/28/2013	11:35:32 AM	H2 MFC set to  0.000000
1/28/2013	11:35:32 AM	BCl3 MFC set to  0.000000
1/28/2013	11:35:32 AM	PH3 MFC set to  0.000000
1/28/2013	11:35:32 AM	SiCl4 MFC set to  0.000000
1/28/2013	11:35:32 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	11:35:32 AM	Tube furnace set to 150
1/28/2013	11:36:02 AM	Helium valve closed
1/28/2013	11:36:02 AM	H2 valve closed
1/28/2013	11:36:02 AM	BCl3 valve closed
1/28/2013	11:36:02 AM	PH3 valve closed
1/28/2013	11:36:02 AM	SiCl4 pre valve closed
1/28/2013	11:36:02 AM	SiCl4 post valve closed
1/28/2013	11:36:02 AM	Bypass valve closed
1/28/2013	11:36:02 AM	Bubbler valve closed
1/28/2013	11:36:02 AM	Main Vac valve opened
1/28/2013	11:36:02 AM	Helium MFC set to  0.000000
1/28/2013	11:36:02 AM	H2 MFC set to  0.000000
1/28/2013	11:36:02 AM	BCl3 MFC set to  0.000000
1/28/2013	11:36:02 AM	PH3 MFC set to  0.000000
1/28/2013	11:36:02 AM	SiCl4 MFC set to  0.000000
1/28/2013	11:36:02 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	11:36:03 AM	Tube furnace set to 150
1/28/2013	11:36:33 AM	H2 valve closed
1/28/2013	11:36:33 AM	BCl3 valve closed
1/28/2013	11:36:33 AM	PH3 valve closed
1/28/2013	11:36:33 AM	SiCl4 pre valve closed
1/28/2013	11:36:33 AM	SiCl4 post valve closed
1/28/2013	11:36:33 AM	Bypass valve closed
1/28/2013	11:36:33 AM	Bubbler valve closed
1/28/2013	11:36:33 AM	Helium valve opened
1/28/2013	11:36:33 AM	Main Vac valve opened
1/28/2013	11:36:33 AM	Helium MFC set to  20.000000
1/28/2013	11:36:33 AM	H2 MFC set to  0.000000
1/28/2013	11:36:33 AM	BCl3 MFC set to  0.000000
1/28/2013	11:36:33 AM	PH3 MFC set to  0.000000
1/28/2013	11:36:33 AM	SiCl4 MFC set to  0.000000
1/28/2013	11:36:33 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	11:36:33 AM	Tube furnace set to 150
1/28/2013	11:37:03 AM	Helium valve closed
1/28/2013	11:37:03 AM	H2 valve closed
1/28/2013	11:37:03 AM	BCl3 valve closed
1/28/2013	11:37:03 AM	PH3 valve closed
1/28/2013	11:37:03 AM	SiCl4 pre valve closed
1/28/2013	11:37:03 AM	SiCl4 post valve closed
1/28/2013	11:37:03 AM	Bypass valve closed
1/28/2013	11:37:03 AM	Bubbler valve closed
1/28/2013	11:37:03 AM	Main Vac valve opened
1/28/2013	11:37:03 AM	Helium MFC set to  0.000000
1/28/2013	11:37:03 AM	H2 MFC set to  0.000000
1/28/2013	11:37:03 AM	BCl3 MFC set to  0.000000
1/28/2013	11:37:03 AM	PH3 MFC set to  0.000000
1/28/2013	11:37:03 AM	SiCl4 MFC set to  0.000000
1/28/2013	11:37:03 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	11:37:03 AM	Tube furnace set to 150
1/28/2013	11:37:33 AM	H2 valve closed
1/28/2013	11:37:33 AM	BCl3 valve closed
1/28/2013	11:37:33 AM	PH3 valve closed
1/28/2013	11:37:33 AM	SiCl4 pre valve closed
1/28/2013	11:37:33 AM	SiCl4 post valve closed
1/28/2013	11:37:33 AM	Bypass valve closed
1/28/2013	11:37:33 AM	Bubbler valve closed
1/28/2013	11:37:33 AM	Helium valve opened
1/28/2013	11:37:33 AM	Main Vac valve opened
1/28/2013	11:37:33 AM	Helium MFC set to  20.000000
1/28/2013	11:37:33 AM	H2 MFC set to  0.000000
1/28/2013	11:37:33 AM	BCl3 MFC set to  0.000000
1/28/2013	11:37:33 AM	PH3 MFC set to  0.000000
1/28/2013	11:37:33 AM	SiCl4 MFC set to  0.000000
1/28/2013	11:37:33 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	11:37:33 AM	Tube furnace set to 150
1/28/2013	11:39:33 AM	Helium valve closed
1/28/2013	11:39:33 AM	H2 valve closed
1/28/2013	11:39:33 AM	BCl3 valve closed
1/28/2013	11:39:33 AM	PH3 valve closed
1/28/2013	11:39:33 AM	SiCl4 pre valve closed
1/28/2013	11:39:33 AM	SiCl4 post valve closed
1/28/2013	11:39:33 AM	Bypass valve closed
1/28/2013	11:39:33 AM	Bubbler valve closed
1/28/2013	11:39:33 AM	Main Vac valve opened
1/28/2013	11:39:33 AM	Helium MFC set to  0.000000
1/28/2013	11:39:33 AM	H2 MFC set to  0.000000
1/28/2013	11:39:33 AM	BCl3 MFC set to  0.000000
1/28/2013	11:39:33 AM	PH3 MFC set to  0.000000
1/28/2013	11:39:33 AM	SiCl4 MFC set to  0.000000
1/28/2013	11:39:33 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	11:39:34 AM	Tube furnace set to 150
1/28/2013	11:40:04 AM	H2 valve closed
1/28/2013	11:40:04 AM	BCl3 valve closed
1/28/2013	11:40:04 AM	PH3 valve closed
1/28/2013	11:40:04 AM	SiCl4 pre valve closed
1/28/2013	11:40:04 AM	SiCl4 post valve closed
1/28/2013	11:40:04 AM	Bypass valve closed
1/28/2013	11:40:04 AM	Bubbler valve closed
1/28/2013	11:40:04 AM	Helium valve opened
1/28/2013	11:40:04 AM	Main Vac valve opened
1/28/2013	11:40:04 AM	Helium MFC set to  20.000000
1/28/2013	11:40:04 AM	H2 MFC set to  0.000000
1/28/2013	11:40:04 AM	BCl3 MFC set to  0.000000
1/28/2013	11:40:04 AM	PH3 MFC set to  0.000000
1/28/2013	11:40:04 AM	SiCl4 MFC set to  0.000000
1/28/2013	11:40:04 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	11:40:04 AM	Tube furnace set to 150
1/28/2013	11:40:34 AM	Helium valve closed
1/28/2013	11:40:34 AM	H2 valve closed
1/28/2013	11:40:34 AM	BCl3 valve closed
1/28/2013	11:40:34 AM	PH3 valve closed
1/28/2013	11:40:34 AM	SiCl4 pre valve closed
1/28/2013	11:40:34 AM	SiCl4 post valve closed
1/28/2013	11:40:34 AM	Bypass valve closed
1/28/2013	11:40:34 AM	Bubbler valve closed
1/28/2013	11:40:34 AM	Main Vac valve opened
1/28/2013	11:40:34 AM	Helium MFC set to  0.000000
1/28/2013	11:40:34 AM	H2 MFC set to  0.000000
1/28/2013	11:40:34 AM	BCl3 MFC set to  0.000000
1/28/2013	11:40:34 AM	PH3 MFC set to  0.000000
1/28/2013	11:40:34 AM	SiCl4 MFC set to  0.000000
1/28/2013	11:40:34 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	11:40:34 AM	Tube furnace set to 150
1/28/2013	11:41:04 AM	H2 valve closed
1/28/2013	11:41:04 AM	BCl3 valve closed
1/28/2013	11:41:04 AM	PH3 valve closed
1/28/2013	11:41:04 AM	SiCl4 pre valve closed
1/28/2013	11:41:04 AM	SiCl4 post valve closed
1/28/2013	11:41:04 AM	Bypass valve closed
1/28/2013	11:41:04 AM	Bubbler valve closed
1/28/2013	11:41:04 AM	Helium valve opened
1/28/2013	11:41:04 AM	Main Vac valve opened
1/28/2013	11:41:04 AM	Helium MFC set to  20.000000
1/28/2013	11:41:04 AM	H2 MFC set to  0.000000
1/28/2013	11:41:04 AM	BCl3 MFC set to  0.000000
1/28/2013	11:41:04 AM	PH3 MFC set to  0.000000
1/28/2013	11:41:04 AM	SiCl4 MFC set to  0.000000
1/28/2013	11:41:04 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	11:41:04 AM	Tube furnace set to 150
1/28/2013	11:41:34 AM	Helium valve closed
1/28/2013	11:41:34 AM	H2 valve closed
1/28/2013	11:41:34 AM	BCl3 valve closed
1/28/2013	11:41:34 AM	PH3 valve closed
1/28/2013	11:41:34 AM	SiCl4 pre valve closed
1/28/2013	11:41:34 AM	SiCl4 post valve closed
1/28/2013	11:41:34 AM	Bypass valve closed
1/28/2013	11:41:34 AM	Bubbler valve closed
1/28/2013	11:41:34 AM	Main Vac valve opened
1/28/2013	11:41:34 AM	Helium MFC set to  0.000000
1/28/2013	11:41:34 AM	H2 MFC set to  0.000000
1/28/2013	11:41:34 AM	BCl3 MFC set to  0.000000
1/28/2013	11:41:34 AM	PH3 MFC set to  0.000000
1/28/2013	11:41:34 AM	SiCl4 MFC set to  0.000000
1/28/2013	11:41:34 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	11:41:35 AM	Tube furnace set to 150
1/28/2013	11:42:05 AM	H2 valve closed
1/28/2013	11:42:05 AM	BCl3 valve closed
1/28/2013	11:42:05 AM	PH3 valve closed
1/28/2013	11:42:05 AM	SiCl4 pre valve closed
1/28/2013	11:42:05 AM	SiCl4 post valve closed
1/28/2013	11:42:05 AM	Bypass valve closed
1/28/2013	11:42:05 AM	Bubbler valve closed
1/28/2013	11:42:05 AM	Helium valve opened
1/28/2013	11:42:05 AM	Main Vac valve opened
1/28/2013	11:42:05 AM	Helium MFC set to  20.000000
1/28/2013	11:42:05 AM	H2 MFC set to  0.000000
1/28/2013	11:42:05 AM	BCl3 MFC set to  0.000000
1/28/2013	11:42:05 AM	PH3 MFC set to  0.000000
1/28/2013	11:42:05 AM	SiCl4 MFC set to  0.000000
1/28/2013	11:42:05 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	11:42:05 AM	Tube furnace set to 150
1/28/2013	11:44:05 AM	Helium valve closed
1/28/2013	11:44:05 AM	H2 valve closed
1/28/2013	11:44:05 AM	BCl3 valve closed
1/28/2013	11:44:05 AM	PH3 valve closed
1/28/2013	11:44:05 AM	SiCl4 pre valve closed
1/28/2013	11:44:05 AM	SiCl4 post valve closed
1/28/2013	11:44:05 AM	Bypass valve closed
1/28/2013	11:44:05 AM	Bubbler valve closed
1/28/2013	11:44:05 AM	Main Vac valve opened
1/28/2013	11:44:05 AM	Helium MFC set to  0.000000
1/28/2013	11:44:05 AM	H2 MFC set to  0.000000
1/28/2013	11:44:05 AM	BCl3 MFC set to  0.000000
1/28/2013	11:44:05 AM	PH3 MFC set to  0.000000
1/28/2013	11:44:05 AM	SiCl4 MFC set to  0.000000
1/28/2013	11:44:05 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	11:44:05 AM	Tube furnace set to 150
1/28/2013	11:44:35 AM	H2 valve closed
1/28/2013	11:44:35 AM	BCl3 valve closed
1/28/2013	11:44:35 AM	PH3 valve closed
1/28/2013	11:44:35 AM	SiCl4 pre valve closed
1/28/2013	11:44:35 AM	SiCl4 post valve closed
1/28/2013	11:44:35 AM	Bypass valve closed
1/28/2013	11:44:35 AM	Bubbler valve closed
1/28/2013	11:44:35 AM	Helium valve opened
1/28/2013	11:44:35 AM	Main Vac valve opened
1/28/2013	11:44:35 AM	Helium MFC set to  20.000000
1/28/2013	11:44:35 AM	H2 MFC set to  0.000000
1/28/2013	11:44:35 AM	BCl3 MFC set to  0.000000
1/28/2013	11:44:35 AM	PH3 MFC set to  0.000000
1/28/2013	11:44:35 AM	SiCl4 MFC set to  0.000000
1/28/2013	11:44:35 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	11:44:35 AM	Tube furnace set to 150
1/28/2013	11:45:05 AM	Helium valve closed
1/28/2013	11:45:05 AM	H2 valve closed
1/28/2013	11:45:05 AM	BCl3 valve closed
1/28/2013	11:45:05 AM	PH3 valve closed
1/28/2013	11:45:05 AM	SiCl4 pre valve closed
1/28/2013	11:45:05 AM	SiCl4 post valve closed
1/28/2013	11:45:05 AM	Bypass valve closed
1/28/2013	11:45:05 AM	Bubbler valve closed
1/28/2013	11:45:05 AM	Main Vac valve opened
1/28/2013	11:45:05 AM	Helium MFC set to  0.000000
1/28/2013	11:45:05 AM	H2 MFC set to  0.000000
1/28/2013	11:45:05 AM	BCl3 MFC set to  0.000000
1/28/2013	11:45:05 AM	PH3 MFC set to  0.000000
1/28/2013	11:45:05 AM	SiCl4 MFC set to  0.000000
1/28/2013	11:45:05 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	11:45:06 AM	Tube furnace set to 150
1/28/2013	11:45:36 AM	H2 valve closed
1/28/2013	11:45:36 AM	BCl3 valve closed
1/28/2013	11:45:36 AM	PH3 valve closed
1/28/2013	11:45:36 AM	SiCl4 pre valve closed
1/28/2013	11:45:36 AM	SiCl4 post valve closed
1/28/2013	11:45:36 AM	Bypass valve closed
1/28/2013	11:45:36 AM	Bubbler valve closed
1/28/2013	11:45:36 AM	Helium valve opened
1/28/2013	11:45:36 AM	Main Vac valve opened
1/28/2013	11:45:36 AM	Helium MFC set to  20.000000
1/28/2013	11:45:36 AM	H2 MFC set to  0.000000
1/28/2013	11:45:36 AM	BCl3 MFC set to  0.000000
1/28/2013	11:45:36 AM	PH3 MFC set to  0.000000
1/28/2013	11:45:36 AM	SiCl4 MFC set to  0.000000
1/28/2013	11:45:36 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	11:45:36 AM	Tube furnace set to 150
1/28/2013	11:47:36 AM	Helium valve closed
1/28/2013	11:47:36 AM	H2 valve closed
1/28/2013	11:47:36 AM	BCl3 valve closed
1/28/2013	11:47:36 AM	PH3 valve closed
1/28/2013	11:47:36 AM	SiCl4 pre valve closed
1/28/2013	11:47:36 AM	SiCl4 post valve closed
1/28/2013	11:47:36 AM	Bypass valve closed
1/28/2013	11:47:36 AM	Bubbler valve closed
1/28/2013	11:47:36 AM	Main Vac valve opened
1/28/2013	11:47:36 AM	Helium MFC set to  0.000000
1/28/2013	11:47:36 AM	H2 MFC set to  0.000000
1/28/2013	11:47:36 AM	BCl3 MFC set to  0.000000
1/28/2013	11:47:36 AM	PH3 MFC set to  0.000000
1/28/2013	11:47:36 AM	SiCl4 MFC set to  0.000000
1/28/2013	11:47:36 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	11:47:36 AM	Tube furnace set to 150
1/28/2013	11:48:06 AM	H2 valve closed
1/28/2013	11:48:06 AM	BCl3 valve closed
1/28/2013	11:48:06 AM	PH3 valve closed
1/28/2013	11:48:06 AM	SiCl4 pre valve closed
1/28/2013	11:48:06 AM	SiCl4 post valve closed
1/28/2013	11:48:06 AM	Bypass valve closed
1/28/2013	11:48:06 AM	Bubbler valve closed
1/28/2013	11:48:06 AM	Helium valve opened
1/28/2013	11:48:06 AM	Main Vac valve opened
1/28/2013	11:48:06 AM	Helium MFC set to  20.000000
1/28/2013	11:48:06 AM	H2 MFC set to  0.000000
1/28/2013	11:48:06 AM	BCl3 MFC set to  0.000000
1/28/2013	11:48:06 AM	PH3 MFC set to  0.000000
1/28/2013	11:48:06 AM	SiCl4 MFC set to  0.000000
1/28/2013	11:48:06 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	11:48:06 AM	Tube furnace set to 150
1/28/2013	11:48:36 AM	Helium valve closed
1/28/2013	11:48:36 AM	H2 valve closed
1/28/2013	11:48:36 AM	BCl3 valve closed
1/28/2013	11:48:36 AM	PH3 valve closed
1/28/2013	11:48:36 AM	SiCl4 pre valve closed
1/28/2013	11:48:36 AM	SiCl4 post valve closed
1/28/2013	11:48:36 AM	Bypass valve closed
1/28/2013	11:48:36 AM	Bubbler valve closed
1/28/2013	11:48:36 AM	Main Vac valve opened
1/28/2013	11:48:36 AM	Helium MFC set to  0.000000
1/28/2013	11:48:36 AM	H2 MFC set to  0.000000
1/28/2013	11:48:36 AM	BCl3 MFC set to  0.000000
1/28/2013	11:48:36 AM	PH3 MFC set to  0.000000
1/28/2013	11:48:36 AM	SiCl4 MFC set to  0.000000
1/28/2013	11:48:36 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	11:48:37 AM	Tube furnace set to 150
1/28/2013	11:49:07 AM	H2 valve closed
1/28/2013	11:49:07 AM	BCl3 valve closed
1/28/2013	11:49:07 AM	PH3 valve closed
1/28/2013	11:49:07 AM	SiCl4 pre valve closed
1/28/2013	11:49:07 AM	SiCl4 post valve closed
1/28/2013	11:49:07 AM	Bypass valve closed
1/28/2013	11:49:07 AM	Bubbler valve closed
1/28/2013	11:49:07 AM	Helium valve opened
1/28/2013	11:49:07 AM	Main Vac valve opened
1/28/2013	11:49:07 AM	Helium MFC set to  20.000000
1/28/2013	11:49:07 AM	H2 MFC set to  0.000000
1/28/2013	11:49:07 AM	BCl3 MFC set to  0.000000
1/28/2013	11:49:07 AM	PH3 MFC set to  0.000000
1/28/2013	11:49:07 AM	SiCl4 MFC set to  0.000000
1/28/2013	11:49:07 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	11:49:07 AM	Tube furnace set to 150
1/28/2013	11:51:07 AM	Helium valve closed
1/28/2013	11:51:07 AM	H2 valve closed
1/28/2013	11:51:07 AM	BCl3 valve closed
1/28/2013	11:51:07 AM	PH3 valve closed
1/28/2013	11:51:07 AM	SiCl4 pre valve closed
1/28/2013	11:51:07 AM	SiCl4 post valve closed
1/28/2013	11:51:07 AM	Bypass valve closed
1/28/2013	11:51:07 AM	Bubbler valve closed
1/28/2013	11:51:07 AM	Main Vac valve opened
1/28/2013	11:51:07 AM	Helium MFC set to  0.000000
1/28/2013	11:51:07 AM	H2 MFC set to  0.000000
1/28/2013	11:51:07 AM	BCl3 MFC set to  0.000000
1/28/2013	11:51:07 AM	PH3 MFC set to  0.000000
1/28/2013	11:51:07 AM	SiCl4 MFC set to  0.000000
1/28/2013	11:51:07 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	11:51:07 AM	Tube furnace set to 150
1/28/2013	11:51:08 AM	Run finished at 11:51 AM
1/28/2013	11:55:56 AM	Recipe started at 11:55 AM
1/28/2013	11:55:56 AM	Helium valve closed
1/28/2013	11:55:56 AM	BCl3 valve closed
1/28/2013	11:55:56 AM	PH3 valve closed
1/28/2013	11:55:56 AM	SiCl4 pre valve closed
1/28/2013	11:55:56 AM	SiCl4 post valve closed
1/28/2013	11:55:56 AM	Bypass valve closed
1/28/2013	11:55:56 AM	Bubbler valve closed
1/28/2013	11:55:56 AM	H2 valve opened
1/28/2013	11:55:56 AM	Main Vac valve opened
1/28/2013	11:55:56 AM	Helium MFC set to  0.000000
1/28/2013	11:55:56 AM	H2 MFC set to  0.000000
1/28/2013	11:55:56 AM	BCl3 MFC set to  0.000000
1/28/2013	11:55:56 AM	PH3 MFC set to  0.000000
1/28/2013	11:55:56 AM	SiCl4 MFC set to  0.000000
1/28/2013	11:55:56 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	11:55:57 AM	Tube furnace set to 150
1/28/2013	11:56:27 AM	H2 valve closed
1/28/2013	11:56:27 AM	BCl3 valve closed
1/28/2013	11:56:27 AM	PH3 valve closed
1/28/2013	11:56:27 AM	SiCl4 pre valve closed
1/28/2013	11:56:27 AM	SiCl4 post valve closed
1/28/2013	11:56:27 AM	Bypass valve closed
1/28/2013	11:56:27 AM	Bubbler valve closed
1/28/2013	11:56:27 AM	Helium valve opened
1/28/2013	11:56:27 AM	Main Vac valve opened
1/28/2013	11:56:27 AM	Helium MFC set to  20.000000
1/28/2013	11:56:27 AM	H2 MFC set to  0.000000
1/28/2013	11:56:27 AM	BCl3 MFC set to  0.000000
1/28/2013	11:56:27 AM	PH3 MFC set to  0.000000
1/28/2013	11:56:27 AM	SiCl4 MFC set to  0.000000
1/28/2013	11:56:27 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	11:56:27 AM	Tube furnace set to 150
1/28/2013	11:56:57 AM	Helium valve closed
1/28/2013	11:56:57 AM	H2 valve closed
1/28/2013	11:56:57 AM	BCl3 valve closed
1/28/2013	11:56:57 AM	PH3 valve closed
1/28/2013	11:56:57 AM	SiCl4 pre valve closed
1/28/2013	11:56:57 AM	SiCl4 post valve closed
1/28/2013	11:56:57 AM	Bypass valve closed
1/28/2013	11:56:57 AM	Bubbler valve closed
1/28/2013	11:56:57 AM	Main Vac valve opened
1/28/2013	11:56:57 AM	Helium MFC set to  0.000000
1/28/2013	11:56:57 AM	H2 MFC set to  0.000000
1/28/2013	11:56:57 AM	BCl3 MFC set to  0.000000
1/28/2013	11:56:57 AM	PH3 MFC set to  0.000000
1/28/2013	11:56:57 AM	SiCl4 MFC set to  0.000000
1/28/2013	11:56:57 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	11:56:57 AM	Tube furnace set to 150
1/28/2013	11:57:27 AM	H2 valve closed
1/28/2013	11:57:27 AM	BCl3 valve closed
1/28/2013	11:57:27 AM	PH3 valve closed
1/28/2013	11:57:27 AM	SiCl4 pre valve closed
1/28/2013	11:57:27 AM	SiCl4 post valve closed
1/28/2013	11:57:27 AM	Bypass valve closed
1/28/2013	11:57:27 AM	Bubbler valve closed
1/28/2013	11:57:27 AM	Helium valve opened
1/28/2013	11:57:27 AM	Main Vac valve opened
1/28/2013	11:57:27 AM	Helium MFC set to  20.000000
1/28/2013	11:57:27 AM	H2 MFC set to  0.000000
1/28/2013	11:57:27 AM	BCl3 MFC set to  0.000000
1/28/2013	11:57:27 AM	PH3 MFC set to  0.000000
1/28/2013	11:57:27 AM	SiCl4 MFC set to  0.000000
1/28/2013	11:57:27 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	11:57:27 AM	Tube furnace set to 150
1/28/2013	11:57:57 AM	Helium valve closed
1/28/2013	11:57:57 AM	H2 valve closed
1/28/2013	11:57:57 AM	BCl3 valve closed
1/28/2013	11:57:57 AM	PH3 valve closed
1/28/2013	11:57:57 AM	SiCl4 pre valve closed
1/28/2013	11:57:57 AM	SiCl4 post valve closed
1/28/2013	11:57:57 AM	Bypass valve closed
1/28/2013	11:57:57 AM	Bubbler valve closed
1/28/2013	11:57:57 AM	Main Vac valve opened
1/28/2013	11:57:57 AM	Helium MFC set to  0.000000
1/28/2013	11:57:57 AM	H2 MFC set to  0.000000
1/28/2013	11:57:57 AM	BCl3 MFC set to  0.000000
1/28/2013	11:57:57 AM	PH3 MFC set to  0.000000
1/28/2013	11:57:57 AM	SiCl4 MFC set to  0.000000
1/28/2013	11:57:57 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	11:57:58 AM	Tube furnace set to 150
1/28/2013	11:58:28 AM	H2 valve closed
1/28/2013	11:58:28 AM	BCl3 valve closed
1/28/2013	11:58:28 AM	PH3 valve closed
1/28/2013	11:58:28 AM	SiCl4 pre valve closed
1/28/2013	11:58:28 AM	SiCl4 post valve closed
1/28/2013	11:58:28 AM	Bypass valve closed
1/28/2013	11:58:28 AM	Bubbler valve closed
1/28/2013	11:58:28 AM	Helium valve opened
1/28/2013	11:58:28 AM	Main Vac valve opened
1/28/2013	11:58:28 AM	Helium MFC set to  20.000000
1/28/2013	11:58:28 AM	H2 MFC set to  0.000000
1/28/2013	11:58:28 AM	BCl3 MFC set to  0.000000
1/28/2013	11:58:28 AM	PH3 MFC set to  0.000000
1/28/2013	11:58:28 AM	SiCl4 MFC set to  0.000000
1/28/2013	11:58:28 AM	Bypass solenoid MFC set to  0.000000
1/28/2013	11:58:28 AM	Tube furnace set to 150
1/28/2013	12:00:28 PM	Helium valve closed
1/28/2013	12:00:28 PM	H2 valve closed
1/28/2013	12:00:28 PM	BCl3 valve closed
1/28/2013	12:00:28 PM	PH3 valve closed
1/28/2013	12:00:28 PM	SiCl4 pre valve closed
1/28/2013	12:00:28 PM	SiCl4 post valve closed
1/28/2013	12:00:28 PM	Bypass valve closed
1/28/2013	12:00:28 PM	Bubbler valve closed
1/28/2013	12:00:28 PM	Main Vac valve opened
1/28/2013	12:00:28 PM	Helium MFC set to  0.000000
1/28/2013	12:00:28 PM	H2 MFC set to  0.000000
1/28/2013	12:00:28 PM	BCl3 MFC set to  0.000000
1/28/2013	12:00:28 PM	PH3 MFC set to  0.000000
1/28/2013	12:00:28 PM	SiCl4 MFC set to  0.000000
1/28/2013	12:00:28 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	12:00:28 PM	Tube furnace set to 150
1/28/2013	12:00:58 PM	H2 valve closed
1/28/2013	12:00:58 PM	BCl3 valve closed
1/28/2013	12:00:58 PM	PH3 valve closed
1/28/2013	12:00:58 PM	SiCl4 pre valve closed
1/28/2013	12:00:58 PM	SiCl4 post valve closed
1/28/2013	12:00:58 PM	Bypass valve closed
1/28/2013	12:00:58 PM	Bubbler valve closed
1/28/2013	12:00:58 PM	Helium valve opened
1/28/2013	12:00:58 PM	Main Vac valve opened
1/28/2013	12:00:58 PM	Helium MFC set to  20.000000
1/28/2013	12:00:58 PM	H2 MFC set to  0.000000
1/28/2013	12:00:58 PM	BCl3 MFC set to  0.000000
1/28/2013	12:00:58 PM	PH3 MFC set to  0.000000
1/28/2013	12:00:58 PM	SiCl4 MFC set to  0.000000
1/28/2013	12:00:58 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	12:00:58 PM	Tube furnace set to 150
1/28/2013	12:01:28 PM	Helium valve closed
1/28/2013	12:01:28 PM	H2 valve closed
1/28/2013	12:01:28 PM	BCl3 valve closed
1/28/2013	12:01:28 PM	PH3 valve closed
1/28/2013	12:01:28 PM	SiCl4 pre valve closed
1/28/2013	12:01:28 PM	SiCl4 post valve closed
1/28/2013	12:01:28 PM	Bypass valve closed
1/28/2013	12:01:28 PM	Bubbler valve closed
1/28/2013	12:01:28 PM	Main Vac valve opened
1/28/2013	12:01:28 PM	Helium MFC set to  0.000000
1/28/2013	12:01:28 PM	H2 MFC set to  0.000000
1/28/2013	12:01:28 PM	BCl3 MFC set to  0.000000
1/28/2013	12:01:28 PM	PH3 MFC set to  0.000000
1/28/2013	12:01:28 PM	SiCl4 MFC set to  0.000000
1/28/2013	12:01:28 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	12:01:28 PM	Tube furnace set to 150
1/28/2013	12:01:59 PM	H2 valve closed
1/28/2013	12:01:59 PM	BCl3 valve closed
1/28/2013	12:01:59 PM	PH3 valve closed
1/28/2013	12:01:59 PM	SiCl4 pre valve closed
1/28/2013	12:01:59 PM	SiCl4 post valve closed
1/28/2013	12:01:59 PM	Bypass valve closed
1/28/2013	12:01:59 PM	Bubbler valve closed
1/28/2013	12:01:59 PM	Helium valve opened
1/28/2013	12:01:59 PM	Main Vac valve opened
1/28/2013	12:01:59 PM	Helium MFC set to  20.000000
1/28/2013	12:01:59 PM	H2 MFC set to  0.000000
1/28/2013	12:01:59 PM	BCl3 MFC set to  0.000000
1/28/2013	12:01:59 PM	PH3 MFC set to  0.000000
1/28/2013	12:01:59 PM	SiCl4 MFC set to  0.000000
1/28/2013	12:01:59 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	12:01:59 PM	Tube furnace set to 150
1/28/2013	12:02:29 PM	Helium valve closed
1/28/2013	12:02:29 PM	H2 valve closed
1/28/2013	12:02:29 PM	BCl3 valve closed
1/28/2013	12:02:29 PM	PH3 valve closed
1/28/2013	12:02:29 PM	SiCl4 pre valve closed
1/28/2013	12:02:29 PM	SiCl4 post valve closed
1/28/2013	12:02:29 PM	Bypass valve closed
1/28/2013	12:02:29 PM	Bubbler valve closed
1/28/2013	12:02:29 PM	Main Vac valve opened
1/28/2013	12:02:29 PM	Helium MFC set to  0.000000
1/28/2013	12:02:29 PM	H2 MFC set to  0.000000
1/28/2013	12:02:29 PM	BCl3 MFC set to  0.000000
1/28/2013	12:02:29 PM	PH3 MFC set to  0.000000
1/28/2013	12:02:29 PM	SiCl4 MFC set to  0.000000
1/28/2013	12:02:29 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	12:02:29 PM	Tube furnace set to 150
1/28/2013	12:02:59 PM	H2 valve closed
1/28/2013	12:02:59 PM	BCl3 valve closed
1/28/2013	12:02:59 PM	PH3 valve closed
1/28/2013	12:02:59 PM	SiCl4 pre valve closed
1/28/2013	12:02:59 PM	SiCl4 post valve closed
1/28/2013	12:02:59 PM	Bypass valve closed
1/28/2013	12:02:59 PM	Bubbler valve closed
1/28/2013	12:02:59 PM	Helium valve opened
1/28/2013	12:02:59 PM	Main Vac valve opened
1/28/2013	12:02:59 PM	Helium MFC set to  20.000000
1/28/2013	12:02:59 PM	H2 MFC set to  0.000000
1/28/2013	12:02:59 PM	BCl3 MFC set to  0.000000
1/28/2013	12:02:59 PM	PH3 MFC set to  0.000000
1/28/2013	12:02:59 PM	SiCl4 MFC set to  0.000000
1/28/2013	12:02:59 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	12:02:59 PM	Tube furnace set to 150
1/28/2013	12:04:59 PM	Helium valve closed
1/28/2013	12:04:59 PM	H2 valve closed
1/28/2013	12:04:59 PM	BCl3 valve closed
1/28/2013	12:04:59 PM	PH3 valve closed
1/28/2013	12:04:59 PM	SiCl4 pre valve closed
1/28/2013	12:04:59 PM	SiCl4 post valve closed
1/28/2013	12:04:59 PM	Bypass valve closed
1/28/2013	12:04:59 PM	Bubbler valve closed
1/28/2013	12:04:59 PM	Main Vac valve opened
1/28/2013	12:04:59 PM	Helium MFC set to  0.000000
1/28/2013	12:04:59 PM	H2 MFC set to  0.000000
1/28/2013	12:04:59 PM	BCl3 MFC set to  0.000000
1/28/2013	12:04:59 PM	PH3 MFC set to  0.000000
1/28/2013	12:04:59 PM	SiCl4 MFC set to  0.000000
1/28/2013	12:04:59 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	12:04:59 PM	Tube furnace set to 150
1/28/2013	12:05:29 PM	H2 valve closed
1/28/2013	12:05:29 PM	BCl3 valve closed
1/28/2013	12:05:30 PM	PH3 valve closed
1/28/2013	12:05:30 PM	SiCl4 pre valve closed
1/28/2013	12:05:30 PM	SiCl4 post valve closed
1/28/2013	12:05:30 PM	Bypass valve closed
1/28/2013	12:05:30 PM	Bubbler valve closed
1/28/2013	12:05:30 PM	Helium valve opened
1/28/2013	12:05:30 PM	Main Vac valve opened
1/28/2013	12:05:30 PM	Helium MFC set to  20.000000
1/28/2013	12:05:30 PM	H2 MFC set to  0.000000
1/28/2013	12:05:30 PM	BCl3 MFC set to  0.000000
1/28/2013	12:05:30 PM	PH3 MFC set to  0.000000
1/28/2013	12:05:30 PM	SiCl4 MFC set to  0.000000
1/28/2013	12:05:30 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	12:05:30 PM	Tube furnace set to 150
1/28/2013	12:06:00 PM	Helium valve closed
1/28/2013	12:06:00 PM	H2 valve closed
1/28/2013	12:06:00 PM	BCl3 valve closed
1/28/2013	12:06:00 PM	PH3 valve closed
1/28/2013	12:06:00 PM	SiCl4 pre valve closed
1/28/2013	12:06:00 PM	SiCl4 post valve closed
1/28/2013	12:06:00 PM	Bypass valve closed
1/28/2013	12:06:00 PM	Bubbler valve closed
1/28/2013	12:06:00 PM	Main Vac valve opened
1/28/2013	12:06:00 PM	Helium MFC set to  0.000000
1/28/2013	12:06:00 PM	H2 MFC set to  0.000000
1/28/2013	12:06:00 PM	BCl3 MFC set to  0.000000
1/28/2013	12:06:00 PM	PH3 MFC set to  0.000000
1/28/2013	12:06:00 PM	SiCl4 MFC set to  0.000000
1/28/2013	12:06:00 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	12:06:00 PM	Tube furnace set to 150
1/28/2013	12:06:30 PM	H2 valve closed
1/28/2013	12:06:30 PM	BCl3 valve closed
1/28/2013	12:06:30 PM	PH3 valve closed
1/28/2013	12:06:30 PM	SiCl4 pre valve closed
1/28/2013	12:06:30 PM	SiCl4 post valve closed
1/28/2013	12:06:30 PM	Bypass valve closed
1/28/2013	12:06:30 PM	Bubbler valve closed
1/28/2013	12:06:30 PM	Helium valve opened
1/28/2013	12:06:30 PM	Main Vac valve opened
1/28/2013	12:06:30 PM	Helium MFC set to  20.000000
1/28/2013	12:06:30 PM	H2 MFC set to  0.000000
1/28/2013	12:06:30 PM	BCl3 MFC set to  0.000000
1/28/2013	12:06:30 PM	PH3 MFC set to  0.000000
1/28/2013	12:06:30 PM	SiCl4 MFC set to  0.000000
1/28/2013	12:06:30 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	12:06:30 PM	Tube furnace set to 150
1/28/2013	12:08:30 PM	Helium valve closed
1/28/2013	12:08:30 PM	H2 valve closed
1/28/2013	12:08:30 PM	BCl3 valve closed
1/28/2013	12:08:30 PM	PH3 valve closed
1/28/2013	12:08:30 PM	SiCl4 pre valve closed
1/28/2013	12:08:30 PM	SiCl4 post valve closed
1/28/2013	12:08:30 PM	Bypass valve closed
1/28/2013	12:08:30 PM	Bubbler valve closed
1/28/2013	12:08:30 PM	Main Vac valve opened
1/28/2013	12:08:30 PM	Helium MFC set to  0.000000
1/28/2013	12:08:30 PM	H2 MFC set to  0.000000
1/28/2013	12:08:30 PM	BCl3 MFC set to  0.000000
1/28/2013	12:08:30 PM	PH3 MFC set to  0.000000
1/28/2013	12:08:30 PM	SiCl4 MFC set to  0.000000
1/28/2013	12:08:30 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	12:08:30 PM	Tube furnace set to 150
1/28/2013	12:08:51 PM	Run aborted at 12:08 PM
1/28/2013	12:08:51 PM	Helium valve closed
1/28/2013	12:08:51 PM	H2 valve closed
1/28/2013	12:08:51 PM	BCl3 valve closed
1/28/2013	12:08:51 PM	PH3 valve closed
1/28/2013	12:08:51 PM	SiCl4 pre valve closed
1/28/2013	12:08:51 PM	SiCl4 post valve closed
1/28/2013	12:08:51 PM	Bypass valve closed
1/28/2013	12:08:52 PM	Main Vac valve closed
1/28/2013	12:08:52 PM	Bubbler valve closed
1/28/2013	12:08:52 PM	Helium MFC set to  0.000000
1/28/2013	12:08:52 PM	H2 MFC set to  0.000000
1/28/2013	12:08:52 PM	BCl3 MFC set to  0.000000
1/28/2013	12:08:52 PM	PH3 MFC set to  0.000000
1/28/2013	12:08:52 PM	SiCl4 MFC set to  0.000000
1/28/2013	12:08:52 PM	Tube furnace set to 0
1/28/2013	12:08:57 PM	Main Vac valve opened
1/28/2013	12:11:46 PM	Recipe started at 12:11 PM
1/28/2013	12:11:46 PM	Helium valve closed
1/28/2013	12:11:46 PM	H2 valve closed
1/28/2013	12:11:46 PM	BCl3 valve closed
1/28/2013	12:11:46 PM	PH3 valve closed
1/28/2013	12:11:46 PM	SiCl4 pre valve closed
1/28/2013	12:11:46 PM	SiCl4 post valve closed
1/28/2013	12:11:46 PM	Main Vac valve closed
1/28/2013	12:11:46 PM	Bypass valve closed
1/28/2013	12:11:46 PM	Bubbler valve closed
1/28/2013	12:11:46 PM	Helium MFC set to  0.000000
1/28/2013	12:11:46 PM	H2 MFC set to  0.000000
1/28/2013	12:11:46 PM	BCl3 MFC set to  0.000000
1/28/2013	12:11:46 PM	PH3 MFC set to  0.000000
1/28/2013	12:11:46 PM	SiCl4 MFC set to  0.000000
1/28/2013	12:11:46 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	12:11:46 PM	Tube furnace set to 0
1/28/2013	12:11:49 PM	Helium valve closed
1/28/2013	12:11:49 PM	BCl3 valve closed
1/28/2013	12:11:49 PM	PH3 valve closed
1/28/2013	12:11:49 PM	SiCl4 pre valve closed
1/28/2013	12:11:49 PM	SiCl4 post valve closed
1/28/2013	12:11:49 PM	Main Vac valve closed
1/28/2013	12:11:49 PM	Bypass valve closed
1/28/2013	12:11:49 PM	Bubbler valve closed
1/28/2013	12:11:49 PM	H2 valve opened
1/28/2013	12:11:49 PM	Helium MFC set to  0.000000
1/28/2013	12:11:49 PM	H2 MFC set to  500.000000
1/28/2013	12:11:49 PM	BCl3 MFC set to  0.000000
1/28/2013	12:11:49 PM	PH3 MFC set to  0.000000
1/28/2013	12:11:49 PM	SiCl4 MFC set to  0.000000
1/28/2013	12:11:49 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	12:11:49 PM	Tube furnace set to 0
1/28/2013	12:12:59 PM	Helium valve closed
1/28/2013	12:12:59 PM	BCl3 valve closed
1/28/2013	12:12:59 PM	PH3 valve closed
1/28/2013	12:12:59 PM	SiCl4 pre valve closed
1/28/2013	12:12:59 PM	SiCl4 post valve closed
1/28/2013	12:12:59 PM	Main Vac valve closed
1/28/2013	12:12:59 PM	Bypass valve closed
1/28/2013	12:12:59 PM	H2 valve opened
1/28/2013	12:12:59 PM	Bubbler valve opened
1/28/2013	12:12:59 PM	Helium MFC set to  0.000000
1/28/2013	12:12:59 PM	H2 MFC set to  500.000000
1/28/2013	12:12:59 PM	BCl3 MFC set to  0.000000
1/28/2013	12:12:59 PM	PH3 MFC set to  0.000000
1/28/2013	12:12:59 PM	SiCl4 MFC set to  0.000000
1/28/2013	12:12:59 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	12:12:59 PM	Tube furnace set to 0
1/28/2013	12:13:00 PM	Helium valve closed
1/28/2013	12:13:00 PM	BCl3 valve closed
1/28/2013	12:13:00 PM	PH3 valve closed
1/28/2013	12:13:00 PM	SiCl4 pre valve closed
1/28/2013	12:13:00 PM	SiCl4 post valve closed
1/28/2013	12:13:00 PM	Main Vac valve closed
1/28/2013	12:13:00 PM	Bypass valve closed
1/28/2013	12:13:00 PM	H2 valve opened
1/28/2013	12:13:00 PM	Bubbler valve opened
1/28/2013	12:13:00 PM	Helium MFC set to  0.000000
1/28/2013	12:13:00 PM	H2 MFC set to  500.000000
1/28/2013	12:13:00 PM	BCl3 MFC set to  0.000000
1/28/2013	12:13:00 PM	PH3 MFC set to  0.000000
1/28/2013	12:13:00 PM	SiCl4 MFC set to  0.000000
1/28/2013	12:13:00 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	12:13:01 PM	Tube furnace set to 1000
1/28/2013	12:33:01 PM	Helium valve closed
1/28/2013	12:33:01 PM	BCl3 valve closed
1/28/2013	12:33:01 PM	PH3 valve closed
1/28/2013	12:33:01 PM	Main Vac valve closed
1/28/2013	12:33:01 PM	Bypass valve closed
1/28/2013	12:33:01 PM	H2 valve opened
1/28/2013	12:33:01 PM	SiCl4 pre valve opened
1/28/2013	12:33:01 PM	SiCl4 post valve opened
1/28/2013	12:33:01 PM	Bubbler valve opened
1/28/2013	12:33:01 PM	Helium MFC set to  0.000000
1/28/2013	12:33:01 PM	H2 MFC set to  500.000000
1/28/2013	12:33:01 PM	BCl3 MFC set to  0.000000
1/28/2013	12:33:01 PM	PH3 MFC set to  0.000000
1/28/2013	12:33:01 PM	SiCl4 MFC set to  50.000000
1/28/2013	12:33:01 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	12:33:01 PM	Tube furnace set to 1000
1/28/2013	12:45:01 PM	Helium valve closed
1/28/2013	12:45:01 PM	BCl3 valve closed
1/28/2013	12:45:01 PM	PH3 valve closed
1/28/2013	12:45:01 PM	SiCl4 pre valve closed
1/28/2013	12:45:01 PM	SiCl4 post valve closed
1/28/2013	12:45:01 PM	Main Vac valve closed
1/28/2013	12:45:01 PM	Bypass valve closed
1/28/2013	12:45:01 PM	H2 valve opened
1/28/2013	12:45:01 PM	Bubbler valve opened
1/28/2013	12:45:01 PM	Helium MFC set to  0.000000
1/28/2013	12:45:01 PM	H2 MFC set to  500.000000
1/28/2013	12:45:01 PM	BCl3 MFC set to  0.000000
1/28/2013	12:45:01 PM	PH3 MFC set to  0.000000
1/28/2013	12:45:01 PM	SiCl4 MFC set to  0.000000
1/28/2013	12:45:01 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	12:45:01 PM	Tube furnace set to 750
1/28/2013	12:50:01 PM	H2 valve closed
1/28/2013	12:50:01 PM	BCl3 valve closed
1/28/2013	12:50:01 PM	PH3 valve closed
1/28/2013	12:50:01 PM	SiCl4 pre valve closed
1/28/2013	12:50:01 PM	SiCl4 post valve closed
1/28/2013	12:50:01 PM	Main Vac valve closed
1/28/2013	12:50:01 PM	Bypass valve closed
1/28/2013	12:50:01 PM	Helium valve opened
1/28/2013	12:50:01 PM	Bubbler valve opened
1/28/2013	12:50:01 PM	Helium MFC set to  500.000000
1/28/2013	12:50:01 PM	H2 MFC set to  0.000000
1/28/2013	12:50:01 PM	BCl3 MFC set to  0.000000
1/28/2013	12:50:01 PM	PH3 MFC set to  0.000000
1/28/2013	12:50:01 PM	SiCl4 MFC set to  0.000000
1/28/2013	12:50:01 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	12:50:01 PM	Tube furnace set to 0
1/28/2013	1:10:01 PM	Helium valve closed
1/28/2013	1:10:01 PM	H2 valve closed
1/28/2013	1:10:01 PM	BCl3 valve closed
1/28/2013	1:10:01 PM	PH3 valve closed
1/28/2013	1:10:01 PM	SiCl4 pre valve closed
1/28/2013	1:10:01 PM	SiCl4 post valve closed
1/28/2013	1:10:01 PM	Main Vac valve closed
1/28/2013	1:10:01 PM	Bypass valve closed
1/28/2013	1:10:01 PM	Bubbler valve closed
1/28/2013	1:10:01 PM	Helium MFC set to  0.000000
1/28/2013	1:10:01 PM	H2 MFC set to  0.000000
1/28/2013	1:10:01 PM	BCl3 MFC set to  0.000000
1/28/2013	1:10:01 PM	PH3 MFC set to  0.000000
1/28/2013	1:10:01 PM	SiCl4 MFC set to  0.000000
1/28/2013	1:10:01 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	1:10:02 PM	Tube furnace set to 0
1/28/2013	1:10:03 PM	Run finished at 1:10 PM
1/28/2013	1:13:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/28/2013	1:13:52 PM	Recipe started at 1:13 PM
1/28/2013	1:13:52 PM	Helium valve closed
1/28/2013	1:13:52 PM	H2 valve closed
1/28/2013	1:13:52 PM	BCl3 valve closed
1/28/2013	1:13:52 PM	PH3 valve closed
1/28/2013	1:13:52 PM	SiCl4 pre valve closed
1/28/2013	1:13:52 PM	SiCl4 post valve closed
1/28/2013	1:13:52 PM	Main Vac valve closed
1/28/2013	1:13:52 PM	Bypass valve closed
1/28/2013	1:13:52 PM	Bubbler valve closed
1/28/2013	1:13:52 PM	Helium MFC set to  0.000000
1/28/2013	1:13:52 PM	H2 MFC set to  0.000000
1/28/2013	1:13:52 PM	BCl3 MFC set to  0.000000
1/28/2013	1:13:53 PM	PH3 MFC set to  0.000000
1/28/2013	1:13:53 PM	SiCl4 MFC set to  0.000000
1/28/2013	1:13:53 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	1:13:53 PM	Tube furnace set to 0
1/28/2013	1:13:56 PM	H2 valve closed
1/28/2013	1:13:56 PM	BCl3 valve closed
1/28/2013	1:13:56 PM	PH3 valve closed
1/28/2013	1:13:56 PM	SiCl4 pre valve closed
1/28/2013	1:13:56 PM	SiCl4 post valve closed
1/28/2013	1:13:56 PM	Main Vac valve closed
1/28/2013	1:13:56 PM	Bypass valve closed
1/28/2013	1:13:56 PM	Bubbler valve closed
1/28/2013	1:13:56 PM	Helium valve opened
1/28/2013	1:13:56 PM	Helium MFC set to  500.000000
1/28/2013	1:13:56 PM	H2 MFC set to  0.000000
1/28/2013	1:13:56 PM	BCl3 MFC set to  0.000000
1/28/2013	1:13:56 PM	PH3 MFC set to  0.000000
1/28/2013	1:13:56 PM	SiCl4 MFC set to  0.000000
1/28/2013	1:13:56 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	1:13:56 PM	Tube furnace set to 0
1/28/2013	1:13:56 PM	Helium valve closed
1/28/2013	1:13:56 PM	H2 valve closed
1/28/2013	1:13:56 PM	BCl3 valve closed
1/28/2013	1:13:56 PM	PH3 valve closed
1/28/2013	1:13:56 PM	SiCl4 pre valve closed
1/28/2013	1:13:56 PM	SiCl4 post valve closed
1/28/2013	1:13:56 PM	Main Vac valve closed
1/28/2013	1:13:56 PM	Bypass valve closed
1/28/2013	1:13:56 PM	Bubbler valve closed
1/28/2013	1:13:56 PM	Helium MFC set to  0.000000
1/28/2013	1:13:56 PM	H2 MFC set to  0.000000
1/28/2013	1:13:56 PM	BCl3 MFC set to  0.000000
1/28/2013	1:13:56 PM	PH3 MFC set to  0.000000
1/28/2013	1:13:56 PM	SiCl4 MFC set to  0.000000
1/28/2013	1:13:56 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	1:13:56 PM	Tube furnace set to 0
1/28/2013	1:13:57 PM	Run finished at 1:13 PM
1/28/2013	1:13:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/28/2013	1:16:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/28/2013	1:16:05 PM	Recipe started at 1:16 PM
1/28/2013	1:16:05 PM	Helium valve closed
1/28/2013	1:16:05 PM	H2 valve closed
1/28/2013	1:16:05 PM	BCl3 valve closed
1/28/2013	1:16:05 PM	PH3 valve closed
1/28/2013	1:16:05 PM	SiCl4 pre valve closed
1/28/2013	1:16:05 PM	SiCl4 post valve closed
1/28/2013	1:16:05 PM	Main Vac valve closed
1/28/2013	1:16:05 PM	Bubbler valve closed
1/28/2013	1:16:05 PM	Bypass valve opened
1/28/2013	1:16:05 PM	Helium MFC set to  0.000000
1/28/2013	1:16:05 PM	H2 MFC set to  0.000000
1/28/2013	1:16:05 PM	BCl3 MFC set to  0.000000
1/28/2013	1:16:05 PM	PH3 MFC set to  0.000000
1/28/2013	1:16:05 PM	SiCl4 MFC set to  0.000000
1/28/2013	1:16:05 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	1:16:05 PM	Tube furnace set to 0
1/28/2013	1:17:07 PM	Helium valve closed
1/28/2013	1:17:07 PM	H2 valve closed
1/28/2013	1:17:07 PM	BCl3 valve closed
1/28/2013	1:17:07 PM	PH3 valve closed
1/28/2013	1:17:07 PM	SiCl4 pre valve closed
1/28/2013	1:17:07 PM	SiCl4 post valve closed
1/28/2013	1:17:07 PM	Main Vac valve closed
1/28/2013	1:17:07 PM	Bubbler valve closed
1/28/2013	1:17:07 PM	Bypass valve opened
1/28/2013	1:17:07 PM	Helium MFC set to  0.000000
1/28/2013	1:17:07 PM	H2 MFC set to  0.000000
1/28/2013	1:17:07 PM	BCl3 MFC set to  0.000000
1/28/2013	1:17:07 PM	PH3 MFC set to  0.000000
1/28/2013	1:17:07 PM	SiCl4 MFC set to  0.000000
1/28/2013	1:17:07 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	1:17:07 PM	Tube furnace set to 0
1/28/2013	1:18:07 PM	Helium valve closed
1/28/2013	1:18:07 PM	H2 valve closed
1/28/2013	1:18:07 PM	BCl3 valve closed
1/28/2013	1:18:07 PM	PH3 valve closed
1/28/2013	1:18:07 PM	SiCl4 pre valve closed
1/28/2013	1:18:07 PM	SiCl4 post valve closed
1/28/2013	1:18:07 PM	Bypass valve closed
1/28/2013	1:18:07 PM	Bubbler valve closed
1/28/2013	1:18:07 PM	Main Vac valve opened
1/28/2013	1:18:07 PM	Helium MFC set to  0.000000
1/28/2013	1:18:07 PM	H2 MFC set to  0.000000
1/28/2013	1:18:07 PM	BCl3 MFC set to  0.000000
1/28/2013	1:18:07 PM	PH3 MFC set to  0.000000
1/28/2013	1:18:07 PM	SiCl4 MFC set to  0.000000
1/28/2013	1:18:07 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	1:18:07 PM	Tube furnace set to 0
1/28/2013	1:18:08 PM	Run finished at 1:18 PM
1/28/2013	1:18:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/28/2013	1:23:32 PM	Recipe started at 1:23 PM
1/28/2013	1:23:32 PM	Helium valve closed
1/28/2013	1:23:32 PM	BCl3 valve closed
1/28/2013	1:23:32 PM	PH3 valve closed
1/28/2013	1:23:32 PM	SiCl4 pre valve closed
1/28/2013	1:23:32 PM	SiCl4 post valve closed
1/28/2013	1:23:32 PM	Bypass valve closed
1/28/2013	1:23:32 PM	Bubbler valve closed
1/28/2013	1:23:32 PM	H2 valve opened
1/28/2013	1:23:32 PM	Main Vac valve opened
1/28/2013	1:23:32 PM	Helium MFC set to  0.000000
1/28/2013	1:23:32 PM	H2 MFC set to  0.000000
1/28/2013	1:23:32 PM	BCl3 MFC set to  0.000000
1/28/2013	1:23:32 PM	PH3 MFC set to  0.000000
1/28/2013	1:23:32 PM	SiCl4 MFC set to  0.000000
1/28/2013	1:23:32 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	1:23:32 PM	Tube furnace set to 150
1/28/2013	1:24:02 PM	H2 valve closed
1/28/2013	1:24:02 PM	BCl3 valve closed
1/28/2013	1:24:02 PM	PH3 valve closed
1/28/2013	1:24:02 PM	SiCl4 pre valve closed
1/28/2013	1:24:02 PM	SiCl4 post valve closed
1/28/2013	1:24:02 PM	Bypass valve closed
1/28/2013	1:24:02 PM	Bubbler valve closed
1/28/2013	1:24:02 PM	Helium valve opened
1/28/2013	1:24:02 PM	Main Vac valve opened
1/28/2013	1:24:02 PM	Helium MFC set to  20.000000
1/28/2013	1:24:02 PM	H2 MFC set to  0.000000
1/28/2013	1:24:02 PM	BCl3 MFC set to  0.000000
1/28/2013	1:24:02 PM	PH3 MFC set to  0.000000
1/28/2013	1:24:02 PM	SiCl4 MFC set to  0.000000
1/28/2013	1:24:02 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	1:24:02 PM	Tube furnace set to 150
1/28/2013	1:24:32 PM	Helium valve closed
1/28/2013	1:24:32 PM	H2 valve closed
1/28/2013	1:24:32 PM	BCl3 valve closed
1/28/2013	1:24:32 PM	PH3 valve closed
1/28/2013	1:24:32 PM	SiCl4 pre valve closed
1/28/2013	1:24:32 PM	SiCl4 post valve closed
1/28/2013	1:24:32 PM	Bypass valve closed
1/28/2013	1:24:32 PM	Bubbler valve closed
1/28/2013	1:24:32 PM	Main Vac valve opened
1/28/2013	1:24:32 PM	Helium MFC set to  0.000000
1/28/2013	1:24:32 PM	H2 MFC set to  0.000000
1/28/2013	1:24:32 PM	BCl3 MFC set to  0.000000
1/28/2013	1:24:32 PM	PH3 MFC set to  0.000000
1/28/2013	1:24:32 PM	SiCl4 MFC set to  0.000000
1/28/2013	1:24:32 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	1:24:33 PM	Tube furnace set to 150
1/28/2013	1:25:03 PM	H2 valve closed
1/28/2013	1:25:03 PM	BCl3 valve closed
1/28/2013	1:25:03 PM	PH3 valve closed
1/28/2013	1:25:03 PM	SiCl4 pre valve closed
1/28/2013	1:25:03 PM	SiCl4 post valve closed
1/28/2013	1:25:03 PM	Bypass valve closed
1/28/2013	1:25:03 PM	Bubbler valve closed
1/28/2013	1:25:03 PM	Helium valve opened
1/28/2013	1:25:03 PM	Main Vac valve opened
1/28/2013	1:25:03 PM	Helium MFC set to  20.000000
1/28/2013	1:25:03 PM	H2 MFC set to  0.000000
1/28/2013	1:25:03 PM	BCl3 MFC set to  0.000000
1/28/2013	1:25:03 PM	PH3 MFC set to  0.000000
1/28/2013	1:25:03 PM	SiCl4 MFC set to  0.000000
1/28/2013	1:25:03 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	1:25:03 PM	Tube furnace set to 150
1/28/2013	1:25:33 PM	Helium valve closed
1/28/2013	1:25:33 PM	H2 valve closed
1/28/2013	1:25:33 PM	BCl3 valve closed
1/28/2013	1:25:33 PM	PH3 valve closed
1/28/2013	1:25:33 PM	SiCl4 pre valve closed
1/28/2013	1:25:33 PM	SiCl4 post valve closed
1/28/2013	1:25:33 PM	Bypass valve closed
1/28/2013	1:25:33 PM	Bubbler valve closed
1/28/2013	1:25:33 PM	Main Vac valve opened
1/28/2013	1:25:33 PM	Helium MFC set to  0.000000
1/28/2013	1:25:33 PM	H2 MFC set to  0.000000
1/28/2013	1:25:33 PM	BCl3 MFC set to  0.000000
1/28/2013	1:25:33 PM	PH3 MFC set to  0.000000
1/28/2013	1:25:33 PM	SiCl4 MFC set to  0.000000
1/28/2013	1:25:33 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	1:25:33 PM	Tube furnace set to 150
1/28/2013	1:26:03 PM	H2 valve closed
1/28/2013	1:26:03 PM	BCl3 valve closed
1/28/2013	1:26:03 PM	PH3 valve closed
1/28/2013	1:26:03 PM	SiCl4 pre valve closed
1/28/2013	1:26:03 PM	SiCl4 post valve closed
1/28/2013	1:26:03 PM	Bypass valve closed
1/28/2013	1:26:03 PM	Bubbler valve closed
1/28/2013	1:26:03 PM	Helium valve opened
1/28/2013	1:26:03 PM	Main Vac valve opened
1/28/2013	1:26:03 PM	Helium MFC set to  20.000000
1/28/2013	1:26:03 PM	H2 MFC set to  0.000000
1/28/2013	1:26:03 PM	BCl3 MFC set to  0.000000
1/28/2013	1:26:03 PM	PH3 MFC set to  0.000000
1/28/2013	1:26:03 PM	SiCl4 MFC set to  0.000000
1/28/2013	1:26:03 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	1:26:03 PM	Tube furnace set to 150
1/28/2013	1:28:03 PM	Helium valve closed
1/28/2013	1:28:03 PM	H2 valve closed
1/28/2013	1:28:03 PM	BCl3 valve closed
1/28/2013	1:28:03 PM	PH3 valve closed
1/28/2013	1:28:03 PM	SiCl4 pre valve closed
1/28/2013	1:28:03 PM	SiCl4 post valve closed
1/28/2013	1:28:03 PM	Bypass valve closed
1/28/2013	1:28:03 PM	Bubbler valve closed
1/28/2013	1:28:03 PM	Main Vac valve opened
1/28/2013	1:28:03 PM	Helium MFC set to  0.000000
1/28/2013	1:28:03 PM	H2 MFC set to  0.000000
1/28/2013	1:28:04 PM	BCl3 MFC set to  0.000000
1/28/2013	1:28:04 PM	PH3 MFC set to  0.000000
1/28/2013	1:28:04 PM	SiCl4 MFC set to  0.000000
1/28/2013	1:28:04 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	1:28:04 PM	Tube furnace set to 150
1/28/2013	1:28:34 PM	H2 valve closed
1/28/2013	1:28:34 PM	BCl3 valve closed
1/28/2013	1:28:34 PM	PH3 valve closed
1/28/2013	1:28:34 PM	SiCl4 pre valve closed
1/28/2013	1:28:34 PM	SiCl4 post valve closed
1/28/2013	1:28:34 PM	Bypass valve closed
1/28/2013	1:28:34 PM	Bubbler valve closed
1/28/2013	1:28:34 PM	Helium valve opened
1/28/2013	1:28:34 PM	Main Vac valve opened
1/28/2013	1:28:34 PM	Helium MFC set to  20.000000
1/28/2013	1:28:34 PM	H2 MFC set to  0.000000
1/28/2013	1:28:34 PM	BCl3 MFC set to  0.000000
1/28/2013	1:28:34 PM	PH3 MFC set to  0.000000
1/28/2013	1:28:34 PM	SiCl4 MFC set to  0.000000
1/28/2013	1:28:34 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	1:28:34 PM	Tube furnace set to 150
1/28/2013	1:29:04 PM	Helium valve closed
1/28/2013	1:29:04 PM	H2 valve closed
1/28/2013	1:29:04 PM	BCl3 valve closed
1/28/2013	1:29:04 PM	PH3 valve closed
1/28/2013	1:29:04 PM	SiCl4 pre valve closed
1/28/2013	1:29:04 PM	SiCl4 post valve closed
1/28/2013	1:29:04 PM	Bypass valve closed
1/28/2013	1:29:04 PM	Bubbler valve closed
1/28/2013	1:29:04 PM	Main Vac valve opened
1/28/2013	1:29:04 PM	Helium MFC set to  0.000000
1/28/2013	1:29:04 PM	H2 MFC set to  0.000000
1/28/2013	1:29:04 PM	BCl3 MFC set to  0.000000
1/28/2013	1:29:04 PM	PH3 MFC set to  0.000000
1/28/2013	1:29:04 PM	SiCl4 MFC set to  0.000000
1/28/2013	1:29:04 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	1:29:04 PM	Tube furnace set to 150
1/28/2013	1:29:34 PM	H2 valve closed
1/28/2013	1:29:34 PM	BCl3 valve closed
1/28/2013	1:29:34 PM	PH3 valve closed
1/28/2013	1:29:34 PM	SiCl4 pre valve closed
1/28/2013	1:29:34 PM	SiCl4 post valve closed
1/28/2013	1:29:34 PM	Bypass valve closed
1/28/2013	1:29:34 PM	Bubbler valve closed
1/28/2013	1:29:34 PM	Helium valve opened
1/28/2013	1:29:34 PM	Main Vac valve opened
1/28/2013	1:29:34 PM	Helium MFC set to  20.000000
1/28/2013	1:29:34 PM	H2 MFC set to  0.000000
1/28/2013	1:29:34 PM	BCl3 MFC set to  0.000000
1/28/2013	1:29:34 PM	PH3 MFC set to  0.000000
1/28/2013	1:29:34 PM	SiCl4 MFC set to  0.000000
1/28/2013	1:29:34 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	1:29:34 PM	Tube furnace set to 150
1/28/2013	1:30:04 PM	Helium valve closed
1/28/2013	1:30:04 PM	H2 valve closed
1/28/2013	1:30:04 PM	BCl3 valve closed
1/28/2013	1:30:04 PM	PH3 valve closed
1/28/2013	1:30:04 PM	SiCl4 pre valve closed
1/28/2013	1:30:04 PM	SiCl4 post valve closed
1/28/2013	1:30:04 PM	Bypass valve closed
1/28/2013	1:30:04 PM	Bubbler valve closed
1/28/2013	1:30:05 PM	Main Vac valve opened
1/28/2013	1:30:05 PM	Helium MFC set to  0.000000
1/28/2013	1:30:05 PM	H2 MFC set to  0.000000
1/28/2013	1:30:05 PM	BCl3 MFC set to  0.000000
1/28/2013	1:30:05 PM	PH3 MFC set to  0.000000
1/28/2013	1:30:05 PM	SiCl4 MFC set to  0.000000
1/28/2013	1:30:05 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	1:30:05 PM	Tube furnace set to 150
1/28/2013	1:30:35 PM	H2 valve closed
1/28/2013	1:30:35 PM	BCl3 valve closed
1/28/2013	1:30:35 PM	PH3 valve closed
1/28/2013	1:30:35 PM	SiCl4 pre valve closed
1/28/2013	1:30:35 PM	SiCl4 post valve closed
1/28/2013	1:30:35 PM	Bypass valve closed
1/28/2013	1:30:35 PM	Bubbler valve closed
1/28/2013	1:30:35 PM	Helium valve opened
1/28/2013	1:30:35 PM	Main Vac valve opened
1/28/2013	1:30:35 PM	Helium MFC set to  20.000000
1/28/2013	1:30:35 PM	H2 MFC set to  0.000000
1/28/2013	1:30:35 PM	BCl3 MFC set to  0.000000
1/28/2013	1:30:35 PM	PH3 MFC set to  0.000000
1/28/2013	1:30:35 PM	SiCl4 MFC set to  0.000000
1/28/2013	1:30:35 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	1:30:35 PM	Tube furnace set to 150
1/28/2013	1:32:35 PM	Helium valve closed
1/28/2013	1:32:35 PM	H2 valve closed
1/28/2013	1:32:35 PM	BCl3 valve closed
1/28/2013	1:32:35 PM	PH3 valve closed
1/28/2013	1:32:35 PM	SiCl4 pre valve closed
1/28/2013	1:32:35 PM	SiCl4 post valve closed
1/28/2013	1:32:35 PM	Bypass valve closed
1/28/2013	1:32:35 PM	Bubbler valve closed
1/28/2013	1:32:35 PM	Main Vac valve opened
1/28/2013	1:32:35 PM	Helium MFC set to  0.000000
1/28/2013	1:32:35 PM	H2 MFC set to  0.000000
1/28/2013	1:32:35 PM	BCl3 MFC set to  0.000000
1/28/2013	1:32:35 PM	PH3 MFC set to  0.000000
1/28/2013	1:32:35 PM	SiCl4 MFC set to  0.000000
1/28/2013	1:32:35 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	1:32:35 PM	Tube furnace set to 150
1/28/2013	1:33:05 PM	H2 valve closed
1/28/2013	1:33:05 PM	BCl3 valve closed
1/28/2013	1:33:05 PM	PH3 valve closed
1/28/2013	1:33:05 PM	SiCl4 pre valve closed
1/28/2013	1:33:05 PM	SiCl4 post valve closed
1/28/2013	1:33:05 PM	Bypass valve closed
1/28/2013	1:33:05 PM	Bubbler valve closed
1/28/2013	1:33:05 PM	Helium valve opened
1/28/2013	1:33:05 PM	Main Vac valve opened
1/28/2013	1:33:05 PM	Helium MFC set to  20.000000
1/28/2013	1:33:05 PM	H2 MFC set to  0.000000
1/28/2013	1:33:05 PM	BCl3 MFC set to  0.000000
1/28/2013	1:33:05 PM	PH3 MFC set to  0.000000
1/28/2013	1:33:05 PM	SiCl4 MFC set to  0.000000
1/28/2013	1:33:05 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	1:33:05 PM	Tube furnace set to 150
1/28/2013	1:33:35 PM	Helium valve closed
1/28/2013	1:33:35 PM	H2 valve closed
1/28/2013	1:33:35 PM	BCl3 valve closed
1/28/2013	1:33:35 PM	PH3 valve closed
1/28/2013	1:33:35 PM	SiCl4 pre valve closed
1/28/2013	1:33:35 PM	SiCl4 post valve closed
1/28/2013	1:33:36 PM	Bypass valve closed
1/28/2013	1:33:36 PM	Bubbler valve closed
1/28/2013	1:33:36 PM	Main Vac valve opened
1/28/2013	1:33:36 PM	Helium MFC set to  0.000000
1/28/2013	1:33:36 PM	H2 MFC set to  0.000000
1/28/2013	1:33:36 PM	BCl3 MFC set to  0.000000
1/28/2013	1:33:36 PM	PH3 MFC set to  0.000000
1/28/2013	1:33:36 PM	SiCl4 MFC set to  0.000000
1/28/2013	1:33:36 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	1:33:36 PM	Tube furnace set to 150
1/28/2013	1:34:06 PM	H2 valve closed
1/28/2013	1:34:06 PM	BCl3 valve closed
1/28/2013	1:34:06 PM	PH3 valve closed
1/28/2013	1:34:06 PM	SiCl4 pre valve closed
1/28/2013	1:34:06 PM	SiCl4 post valve closed
1/28/2013	1:34:06 PM	Bypass valve closed
1/28/2013	1:34:06 PM	Bubbler valve closed
1/28/2013	1:34:06 PM	Helium valve opened
1/28/2013	1:34:06 PM	Main Vac valve opened
1/28/2013	1:34:06 PM	Helium MFC set to  20.000000
1/28/2013	1:34:06 PM	H2 MFC set to  0.000000
1/28/2013	1:34:06 PM	BCl3 MFC set to  0.000000
1/28/2013	1:34:06 PM	PH3 MFC set to  0.000000
1/28/2013	1:34:06 PM	SiCl4 MFC set to  0.000000
1/28/2013	1:34:06 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	1:34:06 PM	Tube furnace set to 150
1/28/2013	1:36:06 PM	Helium valve closed
1/28/2013	1:36:06 PM	H2 valve closed
1/28/2013	1:36:06 PM	BCl3 valve closed
1/28/2013	1:36:06 PM	PH3 valve closed
1/28/2013	1:36:06 PM	SiCl4 pre valve closed
1/28/2013	1:36:06 PM	SiCl4 post valve closed
1/28/2013	1:36:06 PM	Bypass valve closed
1/28/2013	1:36:06 PM	Bubbler valve closed
1/28/2013	1:36:06 PM	Main Vac valve opened
1/28/2013	1:36:06 PM	Helium MFC set to  0.000000
1/28/2013	1:36:06 PM	H2 MFC set to  0.000000
1/28/2013	1:36:06 PM	BCl3 MFC set to  0.000000
1/28/2013	1:36:06 PM	PH3 MFC set to  0.000000
1/28/2013	1:36:06 PM	SiCl4 MFC set to  0.000000
1/28/2013	1:36:06 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	1:36:06 PM	Tube furnace set to 150
1/28/2013	1:36:36 PM	H2 valve closed
1/28/2013	1:36:36 PM	BCl3 valve closed
1/28/2013	1:36:36 PM	PH3 valve closed
1/28/2013	1:36:36 PM	SiCl4 pre valve closed
1/28/2013	1:36:36 PM	SiCl4 post valve closed
1/28/2013	1:36:36 PM	Bypass valve closed
1/28/2013	1:36:36 PM	Bubbler valve closed
1/28/2013	1:36:36 PM	Helium valve opened
1/28/2013	1:36:36 PM	Main Vac valve opened
1/28/2013	1:36:36 PM	Helium MFC set to  20.000000
1/28/2013	1:36:36 PM	H2 MFC set to  0.000000
1/28/2013	1:36:36 PM	BCl3 MFC set to  0.000000
1/28/2013	1:36:36 PM	PH3 MFC set to  0.000000
1/28/2013	1:36:36 PM	SiCl4 MFC set to  0.000000
1/28/2013	1:36:36 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	1:36:36 PM	Tube furnace set to 150
1/28/2013	1:37:06 PM	Helium valve closed
1/28/2013	1:37:06 PM	H2 valve closed
1/28/2013	1:37:06 PM	BCl3 valve closed
1/28/2013	1:37:07 PM	PH3 valve closed
1/28/2013	1:37:07 PM	SiCl4 pre valve closed
1/28/2013	1:37:07 PM	SiCl4 post valve closed
1/28/2013	1:37:07 PM	Bypass valve closed
1/28/2013	1:37:07 PM	Bubbler valve closed
1/28/2013	1:37:07 PM	Main Vac valve opened
1/28/2013	1:37:07 PM	Helium MFC set to  0.000000
1/28/2013	1:37:07 PM	H2 MFC set to  0.000000
1/28/2013	1:37:07 PM	BCl3 MFC set to  0.000000
1/28/2013	1:37:07 PM	PH3 MFC set to  0.000000
1/28/2013	1:37:07 PM	SiCl4 MFC set to  0.000000
1/28/2013	1:37:07 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	1:37:07 PM	Tube furnace set to 150
1/28/2013	1:37:37 PM	H2 valve closed
1/28/2013	1:37:37 PM	BCl3 valve closed
1/28/2013	1:37:37 PM	PH3 valve closed
1/28/2013	1:37:37 PM	SiCl4 pre valve closed
1/28/2013	1:37:37 PM	SiCl4 post valve closed
1/28/2013	1:37:37 PM	Bypass valve closed
1/28/2013	1:37:37 PM	Bubbler valve closed
1/28/2013	1:37:37 PM	Helium valve opened
1/28/2013	1:37:37 PM	Main Vac valve opened
1/28/2013	1:37:37 PM	Helium MFC set to  20.000000
1/28/2013	1:37:37 PM	H2 MFC set to  0.000000
1/28/2013	1:37:37 PM	BCl3 MFC set to  0.000000
1/28/2013	1:37:37 PM	PH3 MFC set to  0.000000
1/28/2013	1:37:37 PM	SiCl4 MFC set to  0.000000
1/28/2013	1:37:37 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	1:37:37 PM	Tube furnace set to 150
1/28/2013	1:39:37 PM	Helium valve closed
1/28/2013	1:39:37 PM	H2 valve closed
1/28/2013	1:39:37 PM	BCl3 valve closed
1/28/2013	1:39:37 PM	PH3 valve closed
1/28/2013	1:39:37 PM	SiCl4 pre valve closed
1/28/2013	1:39:37 PM	SiCl4 post valve closed
1/28/2013	1:39:37 PM	Bypass valve closed
1/28/2013	1:39:37 PM	Bubbler valve closed
1/28/2013	1:39:37 PM	Main Vac valve opened
1/28/2013	1:39:37 PM	Helium MFC set to  0.000000
1/28/2013	1:39:37 PM	H2 MFC set to  0.000000
1/28/2013	1:39:37 PM	BCl3 MFC set to  0.000000
1/28/2013	1:39:37 PM	PH3 MFC set to  0.000000
1/28/2013	1:39:37 PM	SiCl4 MFC set to  0.000000
1/28/2013	1:39:37 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	1:39:37 PM	Tube furnace set to 150
1/28/2013	1:39:38 PM	Run finished at 1:39 PM
1/28/2013	1:43:00 PM	Recipe started at 1:42 PM
1/28/2013	1:43:00 PM	Helium valve closed
1/28/2013	1:43:00 PM	BCl3 valve closed
1/28/2013	1:43:00 PM	PH3 valve closed
1/28/2013	1:43:00 PM	SiCl4 pre valve closed
1/28/2013	1:43:00 PM	SiCl4 post valve closed
1/28/2013	1:43:00 PM	Bypass valve closed
1/28/2013	1:43:00 PM	Bubbler valve closed
1/28/2013	1:43:00 PM	H2 valve opened
1/28/2013	1:43:00 PM	Main Vac valve opened
1/28/2013	1:43:00 PM	Helium MFC set to  0.000000
1/28/2013	1:43:00 PM	H2 MFC set to  0.000000
1/28/2013	1:43:00 PM	BCl3 MFC set to  0.000000
1/28/2013	1:43:00 PM	PH3 MFC set to  0.000000
1/28/2013	1:43:00 PM	SiCl4 MFC set to  0.000000
1/28/2013	1:43:00 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	1:43:00 PM	Tube furnace set to 150
1/28/2013	1:43:30 PM	H2 valve closed
1/28/2013	1:43:30 PM	BCl3 valve closed
1/28/2013	1:43:30 PM	PH3 valve closed
1/28/2013	1:43:30 PM	SiCl4 pre valve closed
1/28/2013	1:43:30 PM	SiCl4 post valve closed
1/28/2013	1:43:30 PM	Bypass valve closed
1/28/2013	1:43:30 PM	Bubbler valve closed
1/28/2013	1:43:30 PM	Helium valve opened
1/28/2013	1:43:30 PM	Main Vac valve opened
1/28/2013	1:43:30 PM	Helium MFC set to  20.000000
1/28/2013	1:43:30 PM	H2 MFC set to  0.000000
1/28/2013	1:43:30 PM	BCl3 MFC set to  0.000000
1/28/2013	1:43:30 PM	PH3 MFC set to  0.000000
1/28/2013	1:43:30 PM	SiCl4 MFC set to  0.000000
1/28/2013	1:43:30 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	1:43:30 PM	Tube furnace set to 150
1/28/2013	1:44:00 PM	Helium valve closed
1/28/2013	1:44:00 PM	H2 valve closed
1/28/2013	1:44:00 PM	BCl3 valve closed
1/28/2013	1:44:00 PM	PH3 valve closed
1/28/2013	1:44:00 PM	SiCl4 pre valve closed
1/28/2013	1:44:00 PM	SiCl4 post valve closed
1/28/2013	1:44:00 PM	Bypass valve closed
1/28/2013	1:44:00 PM	Bubbler valve closed
1/28/2013	1:44:00 PM	Main Vac valve opened
1/28/2013	1:44:00 PM	Helium MFC set to  0.000000
1/28/2013	1:44:00 PM	H2 MFC set to  0.000000
1/28/2013	1:44:00 PM	BCl3 MFC set to  0.000000
1/28/2013	1:44:00 PM	PH3 MFC set to  0.000000
1/28/2013	1:44:00 PM	SiCl4 MFC set to  0.000000
1/28/2013	1:44:00 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	1:44:00 PM	Tube furnace set to 150
1/28/2013	1:44:30 PM	H2 valve closed
1/28/2013	1:44:30 PM	BCl3 valve closed
1/28/2013	1:44:30 PM	PH3 valve closed
1/28/2013	1:44:30 PM	SiCl4 pre valve closed
1/28/2013	1:44:30 PM	SiCl4 post valve closed
1/28/2013	1:44:30 PM	Bypass valve closed
1/28/2013	1:44:30 PM	Bubbler valve closed
1/28/2013	1:44:30 PM	Helium valve opened
1/28/2013	1:44:30 PM	Main Vac valve opened
1/28/2013	1:44:30 PM	Helium MFC set to  20.000000
1/28/2013	1:44:30 PM	H2 MFC set to  0.000000
1/28/2013	1:44:30 PM	BCl3 MFC set to  0.000000
1/28/2013	1:44:30 PM	PH3 MFC set to  0.000000
1/28/2013	1:44:30 PM	SiCl4 MFC set to  0.000000
1/28/2013	1:44:30 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	1:44:31 PM	Tube furnace set to 150
1/28/2013	1:45:01 PM	Helium valve closed
1/28/2013	1:45:01 PM	H2 valve closed
1/28/2013	1:45:01 PM	BCl3 valve closed
1/28/2013	1:45:01 PM	PH3 valve closed
1/28/2013	1:45:01 PM	SiCl4 pre valve closed
1/28/2013	1:45:01 PM	SiCl4 post valve closed
1/28/2013	1:45:01 PM	Bypass valve closed
1/28/2013	1:45:01 PM	Bubbler valve closed
1/28/2013	1:45:01 PM	Main Vac valve opened
1/28/2013	1:45:01 PM	Helium MFC set to  0.000000
1/28/2013	1:45:01 PM	H2 MFC set to  0.000000
1/28/2013	1:45:01 PM	BCl3 MFC set to  0.000000
1/28/2013	1:45:01 PM	PH3 MFC set to  0.000000
1/28/2013	1:45:01 PM	SiCl4 MFC set to  0.000000
1/28/2013	1:45:01 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	1:45:01 PM	Tube furnace set to 150
1/28/2013	1:45:31 PM	H2 valve closed
1/28/2013	1:45:31 PM	BCl3 valve closed
1/28/2013	1:45:31 PM	PH3 valve closed
1/28/2013	1:45:31 PM	SiCl4 pre valve closed
1/28/2013	1:45:31 PM	SiCl4 post valve closed
1/28/2013	1:45:31 PM	Bypass valve closed
1/28/2013	1:45:31 PM	Bubbler valve closed
1/28/2013	1:45:31 PM	Helium valve opened
1/28/2013	1:45:31 PM	Main Vac valve opened
1/28/2013	1:45:31 PM	Helium MFC set to  20.000000
1/28/2013	1:45:31 PM	H2 MFC set to  0.000000
1/28/2013	1:45:31 PM	BCl3 MFC set to  0.000000
1/28/2013	1:45:31 PM	PH3 MFC set to  0.000000
1/28/2013	1:45:31 PM	SiCl4 MFC set to  0.000000
1/28/2013	1:45:31 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	1:45:31 PM	Tube furnace set to 150
1/28/2013	1:45:47 PM	Helium valve closed
1/28/2013	1:45:47 PM	H2 valve closed
1/28/2013	1:45:47 PM	BCl3 valve closed
1/28/2013	1:45:47 PM	PH3 valve closed
1/28/2013	1:45:47 PM	SiCl4 pre valve closed
1/28/2013	1:45:47 PM	SiCl4 post valve closed
1/28/2013	1:45:47 PM	Bypass valve closed
1/28/2013	1:45:47 PM	Bubbler valve closed
1/28/2013	1:45:47 PM	Main Vac valve opened
1/28/2013	1:45:47 PM	Helium MFC set to  0.000000
1/28/2013	1:45:47 PM	H2 MFC set to  0.000000
1/28/2013	1:45:47 PM	BCl3 MFC set to  0.000000
1/28/2013	1:45:47 PM	PH3 MFC set to  0.000000
1/28/2013	1:45:47 PM	SiCl4 MFC set to  0.000000
1/28/2013	1:45:47 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	1:45:47 PM	Tube furnace set to 150
1/28/2013	1:46:07 PM	Run aborted at 1:46 PM
1/28/2013	1:46:07 PM	Helium valve closed
1/28/2013	1:46:07 PM	H2 valve closed
1/28/2013	1:46:07 PM	BCl3 valve closed
1/28/2013	1:46:07 PM	PH3 valve closed
1/28/2013	1:46:07 PM	SiCl4 pre valve closed
1/28/2013	1:46:07 PM	SiCl4 post valve closed
1/28/2013	1:46:07 PM	Bypass valve closed
1/28/2013	1:46:07 PM	Main Vac valve closed
1/28/2013	1:46:07 PM	Bubbler valve closed
1/28/2013	1:46:07 PM	Helium MFC set to  0.000000
1/28/2013	1:46:07 PM	H2 MFC set to  0.000000
1/28/2013	1:46:07 PM	BCl3 MFC set to  0.000000
1/28/2013	1:46:07 PM	PH3 MFC set to  0.000000
1/28/2013	1:46:07 PM	SiCl4 MFC set to  0.000000
1/28/2013	1:46:07 PM	Tube furnace set to 0
1/28/2013	1:46:12 PM	Main Vac valve opened
1/28/2013	1:47:03 PM	Recipe started at 1:47 PM
1/28/2013	1:47:03 PM	Helium valve closed
1/28/2013	1:47:03 PM	H2 valve closed
1/28/2013	1:47:03 PM	BCl3 valve closed
1/28/2013	1:47:03 PM	PH3 valve closed
1/28/2013	1:47:03 PM	SiCl4 pre valve closed
1/28/2013	1:47:03 PM	SiCl4 post valve closed
1/28/2013	1:47:03 PM	Main Vac valve closed
1/28/2013	1:47:03 PM	Bypass valve closed
1/28/2013	1:47:03 PM	Bubbler valve closed
1/28/2013	1:47:03 PM	Helium MFC set to  0.000000
1/28/2013	1:47:03 PM	H2 MFC set to  0.000000
1/28/2013	1:47:03 PM	BCl3 MFC set to  0.000000
1/28/2013	1:47:03 PM	PH3 MFC set to  0.000000
1/28/2013	1:47:03 PM	SiCl4 MFC set to  0.000000
1/28/2013	1:47:03 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	1:47:03 PM	Tube furnace set to 0
1/28/2013	1:47:06 PM	Helium valve closed
1/28/2013	1:47:06 PM	BCl3 valve closed
1/28/2013	1:47:06 PM	PH3 valve closed
1/28/2013	1:47:06 PM	SiCl4 pre valve closed
1/28/2013	1:47:06 PM	SiCl4 post valve closed
1/28/2013	1:47:06 PM	Main Vac valve closed
1/28/2013	1:47:06 PM	Bypass valve closed
1/28/2013	1:47:06 PM	Bubbler valve closed
1/28/2013	1:47:06 PM	H2 valve opened
1/28/2013	1:47:06 PM	Helium MFC set to  0.000000
1/28/2013	1:47:06 PM	H2 MFC set to  500.000000
1/28/2013	1:47:06 PM	BCl3 MFC set to  0.000000
1/28/2013	1:47:06 PM	PH3 MFC set to  0.000000
1/28/2013	1:47:06 PM	SiCl4 MFC set to  0.000000
1/28/2013	1:47:06 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	1:47:06 PM	Tube furnace set to 0
1/28/2013	1:48:16 PM	Helium valve closed
1/28/2013	1:48:16 PM	BCl3 valve closed
1/28/2013	1:48:16 PM	PH3 valve closed
1/28/2013	1:48:16 PM	SiCl4 pre valve closed
1/28/2013	1:48:16 PM	SiCl4 post valve closed
1/28/2013	1:48:16 PM	Main Vac valve closed
1/28/2013	1:48:16 PM	Bypass valve closed
1/28/2013	1:48:16 PM	H2 valve opened
1/28/2013	1:48:16 PM	Bubbler valve opened
1/28/2013	1:48:16 PM	Helium MFC set to  0.000000
1/28/2013	1:48:16 PM	H2 MFC set to  500.000000
1/28/2013	1:48:16 PM	BCl3 MFC set to  0.000000
1/28/2013	1:48:16 PM	PH3 MFC set to  0.000000
1/28/2013	1:48:16 PM	SiCl4 MFC set to  0.000000
1/28/2013	1:48:16 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	1:48:16 PM	Tube furnace set to 0
1/28/2013	1:48:17 PM	Helium valve closed
1/28/2013	1:48:17 PM	BCl3 valve closed
1/28/2013	1:48:17 PM	PH3 valve closed
1/28/2013	1:48:17 PM	SiCl4 pre valve closed
1/28/2013	1:48:17 PM	SiCl4 post valve closed
1/28/2013	1:48:17 PM	Main Vac valve closed
1/28/2013	1:48:17 PM	Bypass valve closed
1/28/2013	1:48:17 PM	H2 valve opened
1/28/2013	1:48:17 PM	Bubbler valve opened
1/28/2013	1:48:17 PM	Helium MFC set to  0.000000
1/28/2013	1:48:17 PM	H2 MFC set to  500.000000
1/28/2013	1:48:17 PM	BCl3 MFC set to  0.000000
1/28/2013	1:48:17 PM	PH3 MFC set to  0.000000
1/28/2013	1:48:17 PM	SiCl4 MFC set to  0.000000
1/28/2013	1:48:17 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	1:48:18 PM	Tube furnace set to 1000
1/28/2013	2:08:17 PM	Helium valve closed
1/28/2013	2:08:17 PM	BCl3 valve closed
1/28/2013	2:08:17 PM	PH3 valve closed
1/28/2013	2:08:17 PM	Main Vac valve closed
1/28/2013	2:08:18 PM	Bypass valve closed
1/28/2013	2:08:18 PM	H2 valve opened
1/28/2013	2:08:18 PM	SiCl4 pre valve opened
1/28/2013	2:08:18 PM	SiCl4 post valve opened
1/28/2013	2:08:18 PM	Bubbler valve opened
1/28/2013	2:08:18 PM	Helium MFC set to  0.000000
1/28/2013	2:08:18 PM	H2 MFC set to  500.000000
1/28/2013	2:08:18 PM	BCl3 MFC set to  0.000000
1/28/2013	2:08:18 PM	PH3 MFC set to  0.000000
1/28/2013	2:08:18 PM	SiCl4 MFC set to  50.000000
1/28/2013	2:08:18 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	2:08:18 PM	Tube furnace set to 1000
1/28/2013	2:23:18 PM	Helium valve closed
1/28/2013	2:23:18 PM	BCl3 valve closed
1/28/2013	2:23:18 PM	PH3 valve closed
1/28/2013	2:23:18 PM	SiCl4 pre valve closed
1/28/2013	2:23:18 PM	SiCl4 post valve closed
1/28/2013	2:23:18 PM	Main Vac valve closed
1/28/2013	2:23:18 PM	Bypass valve closed
1/28/2013	2:23:18 PM	H2 valve opened
1/28/2013	2:23:18 PM	Bubbler valve opened
1/28/2013	2:23:18 PM	Helium MFC set to  0.000000
1/28/2013	2:23:18 PM	H2 MFC set to  500.000000
1/28/2013	2:23:18 PM	BCl3 MFC set to  0.000000
1/28/2013	2:23:18 PM	PH3 MFC set to  0.000000
1/28/2013	2:23:18 PM	SiCl4 MFC set to  0.000000
1/28/2013	2:23:18 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	2:23:18 PM	Tube furnace set to 750
1/28/2013	2:28:18 PM	H2 valve closed
1/28/2013	2:28:18 PM	BCl3 valve closed
1/28/2013	2:28:18 PM	PH3 valve closed
1/28/2013	2:28:18 PM	SiCl4 pre valve closed
1/28/2013	2:28:18 PM	SiCl4 post valve closed
1/28/2013	2:28:18 PM	Main Vac valve closed
1/28/2013	2:28:18 PM	Bypass valve closed
1/28/2013	2:28:18 PM	Helium valve opened
1/28/2013	2:28:18 PM	Bubbler valve opened
1/28/2013	2:28:18 PM	Helium MFC set to  500.000000
1/28/2013	2:28:18 PM	H2 MFC set to  0.000000
1/28/2013	2:28:18 PM	BCl3 MFC set to  0.000000
1/28/2013	2:28:18 PM	PH3 MFC set to  0.000000
1/28/2013	2:28:18 PM	SiCl4 MFC set to  0.000000
1/28/2013	2:28:18 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	2:28:18 PM	Tube furnace set to 0
1/28/2013	2:31:39 PM	Run aborted at 2:31 PM
1/28/2013	2:31:39 PM	Helium valve closed
1/28/2013	2:31:39 PM	H2 valve closed
1/28/2013	2:31:39 PM	BCl3 valve closed
1/28/2013	2:31:39 PM	PH3 valve closed
1/28/2013	2:31:39 PM	SiCl4 pre valve closed
1/28/2013	2:31:39 PM	SiCl4 post valve closed
1/28/2013	2:31:39 PM	Bypass valve closed
1/28/2013	2:31:39 PM	Main Vac valve closed
1/28/2013	2:31:39 PM	Bubbler valve closed
1/28/2013	2:31:39 PM	Helium MFC set to  0.000000
1/28/2013	2:31:39 PM	H2 MFC set to  0.000000
1/28/2013	2:31:39 PM	BCl3 MFC set to  0.000000
1/28/2013	2:31:39 PM	PH3 MFC set to  0.000000
1/28/2013	2:31:39 PM	SiCl4 MFC set to  0.000000
1/28/2013	2:31:39 PM	Tube furnace set to 0
1/28/2013	2:31:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/28/2013	2:31:41 PM	Recipe started at 2:31 PM
1/28/2013	2:31:41 PM	Helium valve closed
1/28/2013	2:31:41 PM	H2 valve closed
1/28/2013	2:31:41 PM	BCl3 valve closed
1/28/2013	2:31:41 PM	PH3 valve closed
1/28/2013	2:31:41 PM	SiCl4 pre valve closed
1/28/2013	2:31:41 PM	SiCl4 post valve closed
1/28/2013	2:31:41 PM	Main Vac valve closed
1/28/2013	2:31:41 PM	Bypass valve closed
1/28/2013	2:31:41 PM	Bubbler valve closed
1/28/2013	2:31:41 PM	Helium MFC set to  0.000000
1/28/2013	2:31:41 PM	H2 MFC set to  0.000000
1/28/2013	2:31:41 PM	BCl3 MFC set to  0.000000
1/28/2013	2:31:41 PM	PH3 MFC set to  0.000000
1/28/2013	2:31:41 PM	SiCl4 MFC set to  0.000000
1/28/2013	2:31:41 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	2:31:42 PM	Tube furnace set to 0
1/28/2013	2:31:45 PM	H2 valve closed
1/28/2013	2:31:45 PM	BCl3 valve closed
1/28/2013	2:31:45 PM	PH3 valve closed
1/28/2013	2:31:45 PM	SiCl4 pre valve closed
1/28/2013	2:31:45 PM	SiCl4 post valve closed
1/28/2013	2:31:45 PM	Main Vac valve closed
1/28/2013	2:31:45 PM	Bypass valve closed
1/28/2013	2:31:45 PM	Bubbler valve closed
1/28/2013	2:31:45 PM	Helium valve opened
1/28/2013	2:31:45 PM	Helium MFC set to  500.000000
1/28/2013	2:31:45 PM	H2 MFC set to  0.000000
1/28/2013	2:31:45 PM	BCl3 MFC set to  0.000000
1/28/2013	2:31:45 PM	PH3 MFC set to  0.000000
1/28/2013	2:31:45 PM	SiCl4 MFC set to  0.000000
1/28/2013	2:31:45 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	2:31:45 PM	Tube furnace set to 0
1/28/2013	2:31:45 PM	Helium valve closed
1/28/2013	2:31:45 PM	H2 valve closed
1/28/2013	2:31:45 PM	BCl3 valve closed
1/28/2013	2:31:45 PM	PH3 valve closed
1/28/2013	2:31:45 PM	SiCl4 pre valve closed
1/28/2013	2:31:45 PM	SiCl4 post valve closed
1/28/2013	2:31:45 PM	Main Vac valve closed
1/28/2013	2:31:45 PM	Bypass valve closed
1/28/2013	2:31:45 PM	Bubbler valve closed
1/28/2013	2:31:45 PM	Helium MFC set to  0.000000
1/28/2013	2:31:45 PM	H2 MFC set to  0.000000
1/28/2013	2:31:45 PM	BCl3 MFC set to  0.000000
1/28/2013	2:31:45 PM	PH3 MFC set to  0.000000
1/28/2013	2:31:45 PM	SiCl4 MFC set to  0.000000
1/28/2013	2:31:45 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	2:31:45 PM	Tube furnace set to 0
1/28/2013	2:31:46 PM	Run finished at 2:31 PM
1/28/2013	2:31:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/28/2013	2:34:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/28/2013	2:34:09 PM	Recipe started at 2:34 PM
1/28/2013	2:34:09 PM	Helium valve closed
1/28/2013	2:34:09 PM	H2 valve closed
1/28/2013	2:34:09 PM	BCl3 valve closed
1/28/2013	2:34:09 PM	PH3 valve closed
1/28/2013	2:34:09 PM	SiCl4 pre valve closed
1/28/2013	2:34:09 PM	SiCl4 post valve closed
1/28/2013	2:34:09 PM	Main Vac valve closed
1/28/2013	2:34:09 PM	Bubbler valve closed
1/28/2013	2:34:09 PM	Bypass valve opened
1/28/2013	2:34:09 PM	Helium MFC set to  0.000000
1/28/2013	2:34:09 PM	H2 MFC set to  0.000000
1/28/2013	2:34:09 PM	BCl3 MFC set to  0.000000
1/28/2013	2:34:09 PM	PH3 MFC set to  0.000000
1/28/2013	2:34:09 PM	SiCl4 MFC set to  0.000000
1/28/2013	2:34:09 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	2:34:09 PM	Tube furnace set to 0
1/28/2013	2:35:10 PM	Helium valve closed
1/28/2013	2:35:10 PM	H2 valve closed
1/28/2013	2:35:10 PM	BCl3 valve closed
1/28/2013	2:35:10 PM	PH3 valve closed
1/28/2013	2:35:10 PM	SiCl4 pre valve closed
1/28/2013	2:35:10 PM	SiCl4 post valve closed
1/28/2013	2:35:10 PM	Main Vac valve closed
1/28/2013	2:35:10 PM	Bubbler valve closed
1/28/2013	2:35:10 PM	Bypass valve opened
1/28/2013	2:35:10 PM	Helium MFC set to  0.000000
1/28/2013	2:35:10 PM	H2 MFC set to  0.000000
1/28/2013	2:35:10 PM	BCl3 MFC set to  0.000000
1/28/2013	2:35:10 PM	PH3 MFC set to  0.000000
1/28/2013	2:35:10 PM	SiCl4 MFC set to  0.000000
1/28/2013	2:35:10 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	2:35:10 PM	Tube furnace set to 0
1/28/2013	2:36:10 PM	Helium valve closed
1/28/2013	2:36:10 PM	H2 valve closed
1/28/2013	2:36:10 PM	BCl3 valve closed
1/28/2013	2:36:10 PM	PH3 valve closed
1/28/2013	2:36:10 PM	SiCl4 pre valve closed
1/28/2013	2:36:10 PM	SiCl4 post valve closed
1/28/2013	2:36:10 PM	Bypass valve closed
1/28/2013	2:36:10 PM	Bubbler valve closed
1/28/2013	2:36:10 PM	Main Vac valve opened
1/28/2013	2:36:10 PM	Helium MFC set to  0.000000
1/28/2013	2:36:10 PM	H2 MFC set to  0.000000
1/28/2013	2:36:10 PM	BCl3 MFC set to  0.000000
1/28/2013	2:36:10 PM	PH3 MFC set to  0.000000
1/28/2013	2:36:10 PM	SiCl4 MFC set to  0.000000
1/28/2013	2:36:10 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	2:36:10 PM	Tube furnace set to 0
1/28/2013	2:36:11 PM	Run finished at 2:36 PM
1/28/2013	2:36:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/28/2013	2:36:23 PM	Recipe started at 2:36 PM
1/28/2013	2:36:23 PM	Helium valve closed
1/28/2013	2:36:23 PM	BCl3 valve closed
1/28/2013	2:36:23 PM	PH3 valve closed
1/28/2013	2:36:23 PM	SiCl4 pre valve closed
1/28/2013	2:36:23 PM	SiCl4 post valve closed
1/28/2013	2:36:23 PM	Bypass valve closed
1/28/2013	2:36:23 PM	Bubbler valve closed
1/28/2013	2:36:23 PM	H2 valve opened
1/28/2013	2:36:23 PM	Main Vac valve opened
1/28/2013	2:36:23 PM	Helium MFC set to  0.000000
1/28/2013	2:36:23 PM	H2 MFC set to  0.000000
1/28/2013	2:36:23 PM	BCl3 MFC set to  0.000000
1/28/2013	2:36:23 PM	PH3 MFC set to  0.000000
1/28/2013	2:36:23 PM	SiCl4 MFC set to  0.000000
1/28/2013	2:36:23 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	2:36:23 PM	Tube furnace set to 150
1/28/2013	2:36:53 PM	H2 valve closed
1/28/2013	2:36:53 PM	BCl3 valve closed
1/28/2013	2:36:53 PM	PH3 valve closed
1/28/2013	2:36:53 PM	SiCl4 pre valve closed
1/28/2013	2:36:53 PM	SiCl4 post valve closed
1/28/2013	2:36:53 PM	Bypass valve closed
1/28/2013	2:36:53 PM	Bubbler valve closed
1/28/2013	2:36:53 PM	Helium valve opened
1/28/2013	2:36:53 PM	Main Vac valve opened
1/28/2013	2:36:53 PM	Helium MFC set to  20.000000
1/28/2013	2:36:53 PM	H2 MFC set to  0.000000
1/28/2013	2:36:53 PM	BCl3 MFC set to  0.000000
1/28/2013	2:36:53 PM	PH3 MFC set to  0.000000
1/28/2013	2:36:53 PM	SiCl4 MFC set to  0.000000
1/28/2013	2:36:53 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	2:36:54 PM	Tube furnace set to 150
1/28/2013	2:37:24 PM	Helium valve closed
1/28/2013	2:37:24 PM	H2 valve closed
1/28/2013	2:37:24 PM	BCl3 valve closed
1/28/2013	2:37:24 PM	PH3 valve closed
1/28/2013	2:37:24 PM	SiCl4 pre valve closed
1/28/2013	2:37:24 PM	SiCl4 post valve closed
1/28/2013	2:37:24 PM	Bypass valve closed
1/28/2013	2:37:24 PM	Bubbler valve closed
1/28/2013	2:37:24 PM	Main Vac valve opened
1/28/2013	2:37:24 PM	Helium MFC set to  0.000000
1/28/2013	2:37:24 PM	H2 MFC set to  0.000000
1/28/2013	2:37:24 PM	BCl3 MFC set to  0.000000
1/28/2013	2:37:24 PM	PH3 MFC set to  0.000000
1/28/2013	2:37:24 PM	SiCl4 MFC set to  0.000000
1/28/2013	2:37:24 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	2:37:24 PM	Tube furnace set to 150
1/28/2013	2:37:54 PM	H2 valve closed
1/28/2013	2:37:54 PM	BCl3 valve closed
1/28/2013	2:37:54 PM	PH3 valve closed
1/28/2013	2:37:54 PM	SiCl4 pre valve closed
1/28/2013	2:37:54 PM	SiCl4 post valve closed
1/28/2013	2:37:54 PM	Bypass valve closed
1/28/2013	2:37:54 PM	Bubbler valve closed
1/28/2013	2:37:54 PM	Helium valve opened
1/28/2013	2:37:54 PM	Main Vac valve opened
1/28/2013	2:37:54 PM	Helium MFC set to  20.000000
1/28/2013	2:37:54 PM	H2 MFC set to  0.000000
1/28/2013	2:37:54 PM	BCl3 MFC set to  0.000000
1/28/2013	2:37:54 PM	PH3 MFC set to  0.000000
1/28/2013	2:37:54 PM	SiCl4 MFC set to  0.000000
1/28/2013	2:37:54 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	2:37:54 PM	Tube furnace set to 150
1/28/2013	2:38:24 PM	Helium valve closed
1/28/2013	2:38:24 PM	H2 valve closed
1/28/2013	2:38:24 PM	BCl3 valve closed
1/28/2013	2:38:24 PM	PH3 valve closed
1/28/2013	2:38:24 PM	SiCl4 pre valve closed
1/28/2013	2:38:24 PM	SiCl4 post valve closed
1/28/2013	2:38:24 PM	Bypass valve closed
1/28/2013	2:38:24 PM	Bubbler valve closed
1/28/2013	2:38:24 PM	Main Vac valve opened
1/28/2013	2:38:24 PM	Helium MFC set to  0.000000
1/28/2013	2:38:24 PM	H2 MFC set to  0.000000
1/28/2013	2:38:24 PM	BCl3 MFC set to  0.000000
1/28/2013	2:38:24 PM	PH3 MFC set to  0.000000
1/28/2013	2:38:24 PM	SiCl4 MFC set to  0.000000
1/28/2013	2:38:24 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	2:38:24 PM	Tube furnace set to 150
1/28/2013	2:38:54 PM	H2 valve closed
1/28/2013	2:38:54 PM	BCl3 valve closed
1/28/2013	2:38:54 PM	PH3 valve closed
1/28/2013	2:38:54 PM	SiCl4 pre valve closed
1/28/2013	2:38:54 PM	SiCl4 post valve closed
1/28/2013	2:38:54 PM	Bypass valve closed
1/28/2013	2:38:54 PM	Bubbler valve closed
1/28/2013	2:38:54 PM	Helium valve opened
1/28/2013	2:38:54 PM	Main Vac valve opened
1/28/2013	2:38:54 PM	Helium MFC set to  20.000000
1/28/2013	2:38:54 PM	H2 MFC set to  0.000000
1/28/2013	2:38:54 PM	BCl3 MFC set to  0.000000
1/28/2013	2:38:54 PM	PH3 MFC set to  0.000000
1/28/2013	2:38:54 PM	SiCl4 MFC set to  0.000000
1/28/2013	2:38:54 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	2:38:55 PM	Tube furnace set to 150
1/28/2013	2:40:55 PM	Helium valve closed
1/28/2013	2:40:55 PM	H2 valve closed
1/28/2013	2:40:55 PM	BCl3 valve closed
1/28/2013	2:40:55 PM	PH3 valve closed
1/28/2013	2:40:55 PM	SiCl4 pre valve closed
1/28/2013	2:40:55 PM	SiCl4 post valve closed
1/28/2013	2:40:55 PM	Bypass valve closed
1/28/2013	2:40:55 PM	Bubbler valve closed
1/28/2013	2:40:55 PM	Main Vac valve opened
1/28/2013	2:40:55 PM	Helium MFC set to  0.000000
1/28/2013	2:40:55 PM	H2 MFC set to  0.000000
1/28/2013	2:40:55 PM	BCl3 MFC set to  0.000000
1/28/2013	2:40:55 PM	PH3 MFC set to  0.000000
1/28/2013	2:40:55 PM	SiCl4 MFC set to  0.000000
1/28/2013	2:40:55 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	2:40:55 PM	Tube furnace set to 150
1/28/2013	2:41:25 PM	H2 valve closed
1/28/2013	2:41:25 PM	BCl3 valve closed
1/28/2013	2:41:25 PM	PH3 valve closed
1/28/2013	2:41:25 PM	SiCl4 pre valve closed
1/28/2013	2:41:25 PM	SiCl4 post valve closed
1/28/2013	2:41:25 PM	Bypass valve closed
1/28/2013	2:41:25 PM	Bubbler valve closed
1/28/2013	2:41:25 PM	Helium valve opened
1/28/2013	2:41:25 PM	Main Vac valve opened
1/28/2013	2:41:25 PM	Helium MFC set to  20.000000
1/28/2013	2:41:25 PM	H2 MFC set to  0.000000
1/28/2013	2:41:25 PM	BCl3 MFC set to  0.000000
1/28/2013	2:41:25 PM	PH3 MFC set to  0.000000
1/28/2013	2:41:25 PM	SiCl4 MFC set to  0.000000
1/28/2013	2:41:25 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	2:41:25 PM	Tube furnace set to 150
1/28/2013	2:41:55 PM	Helium valve closed
1/28/2013	2:41:55 PM	H2 valve closed
1/28/2013	2:41:55 PM	BCl3 valve closed
1/28/2013	2:41:55 PM	PH3 valve closed
1/28/2013	2:41:55 PM	SiCl4 pre valve closed
1/28/2013	2:41:55 PM	SiCl4 post valve closed
1/28/2013	2:41:55 PM	Bypass valve closed
1/28/2013	2:41:55 PM	Bubbler valve closed
1/28/2013	2:41:55 PM	Main Vac valve opened
1/28/2013	2:41:55 PM	Helium MFC set to  0.000000
1/28/2013	2:41:55 PM	H2 MFC set to  0.000000
1/28/2013	2:41:55 PM	BCl3 MFC set to  0.000000
1/28/2013	2:41:55 PM	PH3 MFC set to  0.000000
1/28/2013	2:41:55 PM	SiCl4 MFC set to  0.000000
1/28/2013	2:41:55 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	2:41:55 PM	Tube furnace set to 150
1/28/2013	2:42:25 PM	H2 valve closed
1/28/2013	2:42:25 PM	BCl3 valve closed
1/28/2013	2:42:25 PM	PH3 valve closed
1/28/2013	2:42:25 PM	SiCl4 pre valve closed
1/28/2013	2:42:25 PM	SiCl4 post valve closed
1/28/2013	2:42:25 PM	Bypass valve closed
1/28/2013	2:42:25 PM	Bubbler valve closed
1/28/2013	2:42:25 PM	Helium valve opened
1/28/2013	2:42:25 PM	Main Vac valve opened
1/28/2013	2:42:25 PM	Helium MFC set to  20.000000
1/28/2013	2:42:25 PM	H2 MFC set to  0.000000
1/28/2013	2:42:25 PM	BCl3 MFC set to  0.000000
1/28/2013	2:42:25 PM	PH3 MFC set to  0.000000
1/28/2013	2:42:25 PM	SiCl4 MFC set to  0.000000
1/28/2013	2:42:25 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	2:42:26 PM	Tube furnace set to 150
1/28/2013	2:42:56 PM	Helium valve closed
1/28/2013	2:42:56 PM	H2 valve closed
1/28/2013	2:42:56 PM	BCl3 valve closed
1/28/2013	2:42:56 PM	PH3 valve closed
1/28/2013	2:42:56 PM	SiCl4 pre valve closed
1/28/2013	2:42:56 PM	SiCl4 post valve closed
1/28/2013	2:42:56 PM	Bypass valve closed
1/28/2013	2:42:56 PM	Bubbler valve closed
1/28/2013	2:42:56 PM	Main Vac valve opened
1/28/2013	2:42:56 PM	Helium MFC set to  0.000000
1/28/2013	2:42:56 PM	H2 MFC set to  0.000000
1/28/2013	2:42:56 PM	BCl3 MFC set to  0.000000
1/28/2013	2:42:56 PM	PH3 MFC set to  0.000000
1/28/2013	2:42:56 PM	SiCl4 MFC set to  0.000000
1/28/2013	2:42:56 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	2:42:56 PM	Tube furnace set to 150
1/28/2013	2:43:26 PM	H2 valve closed
1/28/2013	2:43:26 PM	BCl3 valve closed
1/28/2013	2:43:26 PM	PH3 valve closed
1/28/2013	2:43:26 PM	SiCl4 pre valve closed
1/28/2013	2:43:26 PM	SiCl4 post valve closed
1/28/2013	2:43:26 PM	Bypass valve closed
1/28/2013	2:43:26 PM	Bubbler valve closed
1/28/2013	2:43:26 PM	Helium valve opened
1/28/2013	2:43:26 PM	Main Vac valve opened
1/28/2013	2:43:26 PM	Helium MFC set to  20.000000
1/28/2013	2:43:26 PM	H2 MFC set to  0.000000
1/28/2013	2:43:26 PM	BCl3 MFC set to  0.000000
1/28/2013	2:43:26 PM	PH3 MFC set to  0.000000
1/28/2013	2:43:26 PM	SiCl4 MFC set to  0.000000
1/28/2013	2:43:26 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	2:43:26 PM	Tube furnace set to 150
1/28/2013	2:45:26 PM	Helium valve closed
1/28/2013	2:45:26 PM	H2 valve closed
1/28/2013	2:45:26 PM	BCl3 valve closed
1/28/2013	2:45:26 PM	PH3 valve closed
1/28/2013	2:45:26 PM	SiCl4 pre valve closed
1/28/2013	2:45:26 PM	SiCl4 post valve closed
1/28/2013	2:45:26 PM	Bypass valve closed
1/28/2013	2:45:26 PM	Bubbler valve closed
1/28/2013	2:45:26 PM	Main Vac valve opened
1/28/2013	2:45:26 PM	Helium MFC set to  0.000000
1/28/2013	2:45:26 PM	H2 MFC set to  0.000000
1/28/2013	2:45:26 PM	BCl3 MFC set to  0.000000
1/28/2013	2:45:26 PM	PH3 MFC set to  0.000000
1/28/2013	2:45:26 PM	SiCl4 MFC set to  0.000000
1/28/2013	2:45:26 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	2:45:26 PM	Tube furnace set to 150
1/28/2013	2:45:56 PM	H2 valve closed
1/28/2013	2:45:56 PM	BCl3 valve closed
1/28/2013	2:45:56 PM	PH3 valve closed
1/28/2013	2:45:56 PM	SiCl4 pre valve closed
1/28/2013	2:45:56 PM	SiCl4 post valve closed
1/28/2013	2:45:56 PM	Bypass valve closed
1/28/2013	2:45:56 PM	Bubbler valve closed
1/28/2013	2:45:56 PM	Helium valve opened
1/28/2013	2:45:56 PM	Main Vac valve opened
1/28/2013	2:45:56 PM	Helium MFC set to  20.000000
1/28/2013	2:45:56 PM	H2 MFC set to  0.000000
1/28/2013	2:45:56 PM	BCl3 MFC set to  0.000000
1/28/2013	2:45:56 PM	PH3 MFC set to  0.000000
1/28/2013	2:45:56 PM	SiCl4 MFC set to  0.000000
1/28/2013	2:45:56 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	2:45:57 PM	Tube furnace set to 150
1/28/2013	2:46:27 PM	Helium valve closed
1/28/2013	2:46:27 PM	H2 valve closed
1/28/2013	2:46:27 PM	BCl3 valve closed
1/28/2013	2:46:27 PM	PH3 valve closed
1/28/2013	2:46:27 PM	SiCl4 pre valve closed
1/28/2013	2:46:27 PM	SiCl4 post valve closed
1/28/2013	2:46:27 PM	Bypass valve closed
1/28/2013	2:46:27 PM	Bubbler valve closed
1/28/2013	2:46:27 PM	Main Vac valve opened
1/28/2013	2:46:27 PM	Helium MFC set to  0.000000
1/28/2013	2:46:27 PM	H2 MFC set to  0.000000
1/28/2013	2:46:27 PM	BCl3 MFC set to  0.000000
1/28/2013	2:46:27 PM	PH3 MFC set to  0.000000
1/28/2013	2:46:27 PM	SiCl4 MFC set to  0.000000
1/28/2013	2:46:27 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	2:46:27 PM	Tube furnace set to 150
1/28/2013	2:46:57 PM	H2 valve closed
1/28/2013	2:46:57 PM	BCl3 valve closed
1/28/2013	2:46:57 PM	PH3 valve closed
1/28/2013	2:46:57 PM	SiCl4 pre valve closed
1/28/2013	2:46:57 PM	SiCl4 post valve closed
1/28/2013	2:46:57 PM	Bypass valve closed
1/28/2013	2:46:57 PM	Bubbler valve closed
1/28/2013	2:46:57 PM	Helium valve opened
1/28/2013	2:46:57 PM	Main Vac valve opened
1/28/2013	2:46:57 PM	Helium MFC set to  20.000000
1/28/2013	2:46:57 PM	H2 MFC set to  0.000000
1/28/2013	2:46:57 PM	BCl3 MFC set to  0.000000
1/28/2013	2:46:57 PM	PH3 MFC set to  0.000000
1/28/2013	2:46:57 PM	SiCl4 MFC set to  0.000000
1/28/2013	2:46:57 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	2:46:57 PM	Tube furnace set to 150
1/28/2013	2:48:57 PM	Helium valve closed
1/28/2013	2:48:57 PM	H2 valve closed
1/28/2013	2:48:57 PM	BCl3 valve closed
1/28/2013	2:48:57 PM	PH3 valve closed
1/28/2013	2:48:57 PM	SiCl4 pre valve closed
1/28/2013	2:48:57 PM	SiCl4 post valve closed
1/28/2013	2:48:57 PM	Bypass valve closed
1/28/2013	2:48:57 PM	Bubbler valve closed
1/28/2013	2:48:57 PM	Main Vac valve opened
1/28/2013	2:48:57 PM	Helium MFC set to  0.000000
1/28/2013	2:48:57 PM	H2 MFC set to  0.000000
1/28/2013	2:48:57 PM	BCl3 MFC set to  0.000000
1/28/2013	2:48:57 PM	PH3 MFC set to  0.000000
1/28/2013	2:48:57 PM	SiCl4 MFC set to  0.000000
1/28/2013	2:48:57 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	2:48:57 PM	Tube furnace set to 150
1/28/2013	2:49:27 PM	H2 valve closed
1/28/2013	2:49:27 PM	BCl3 valve closed
1/28/2013	2:49:27 PM	PH3 valve closed
1/28/2013	2:49:27 PM	SiCl4 pre valve closed
1/28/2013	2:49:27 PM	SiCl4 post valve closed
1/28/2013	2:49:27 PM	Bypass valve closed
1/28/2013	2:49:27 PM	Bubbler valve closed
1/28/2013	2:49:27 PM	Helium valve opened
1/28/2013	2:49:27 PM	Main Vac valve opened
1/28/2013	2:49:27 PM	Helium MFC set to  20.000000
1/28/2013	2:49:27 PM	H2 MFC set to  0.000000
1/28/2013	2:49:27 PM	BCl3 MFC set to  0.000000
1/28/2013	2:49:27 PM	PH3 MFC set to  0.000000
1/28/2013	2:49:28 PM	SiCl4 MFC set to  0.000000
1/28/2013	2:49:28 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	2:49:28 PM	Tube furnace set to 150
1/28/2013	2:49:58 PM	Helium valve closed
1/28/2013	2:49:58 PM	H2 valve closed
1/28/2013	2:49:58 PM	BCl3 valve closed
1/28/2013	2:49:58 PM	PH3 valve closed
1/28/2013	2:49:58 PM	SiCl4 pre valve closed
1/28/2013	2:49:58 PM	SiCl4 post valve closed
1/28/2013	2:49:58 PM	Bypass valve closed
1/28/2013	2:49:58 PM	Bubbler valve closed
1/28/2013	2:49:58 PM	Main Vac valve opened
1/28/2013	2:49:58 PM	Helium MFC set to  0.000000
1/28/2013	2:49:58 PM	H2 MFC set to  0.000000
1/28/2013	2:49:58 PM	BCl3 MFC set to  0.000000
1/28/2013	2:49:58 PM	PH3 MFC set to  0.000000
1/28/2013	2:49:58 PM	SiCl4 MFC set to  0.000000
1/28/2013	2:49:58 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	2:49:58 PM	Tube furnace set to 150
1/28/2013	2:50:28 PM	H2 valve closed
1/28/2013	2:50:28 PM	BCl3 valve closed
1/28/2013	2:50:28 PM	PH3 valve closed
1/28/2013	2:50:28 PM	SiCl4 pre valve closed
1/28/2013	2:50:28 PM	SiCl4 post valve closed
1/28/2013	2:50:28 PM	Bypass valve closed
1/28/2013	2:50:28 PM	Bubbler valve closed
1/28/2013	2:50:28 PM	Helium valve opened
1/28/2013	2:50:28 PM	Main Vac valve opened
1/28/2013	2:50:28 PM	Helium MFC set to  20.000000
1/28/2013	2:50:28 PM	H2 MFC set to  0.000000
1/28/2013	2:50:28 PM	BCl3 MFC set to  0.000000
1/28/2013	2:50:28 PM	PH3 MFC set to  0.000000
1/28/2013	2:50:28 PM	SiCl4 MFC set to  0.000000
1/28/2013	2:50:28 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	2:50:28 PM	Tube furnace set to 150
1/28/2013	2:52:28 PM	Helium valve closed
1/28/2013	2:52:28 PM	H2 valve closed
1/28/2013	2:52:28 PM	BCl3 valve closed
1/28/2013	2:52:28 PM	PH3 valve closed
1/28/2013	2:52:28 PM	SiCl4 pre valve closed
1/28/2013	2:52:28 PM	SiCl4 post valve closed
1/28/2013	2:52:28 PM	Bypass valve closed
1/28/2013	2:52:28 PM	Bubbler valve closed
1/28/2013	2:52:28 PM	Main Vac valve opened
1/28/2013	2:52:28 PM	Helium MFC set to  0.000000
1/28/2013	2:52:28 PM	H2 MFC set to  0.000000
1/28/2013	2:52:28 PM	BCl3 MFC set to  0.000000
1/28/2013	2:52:28 PM	PH3 MFC set to  0.000000
1/28/2013	2:52:28 PM	SiCl4 MFC set to  0.000000
1/28/2013	2:52:28 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	2:52:28 PM	Tube furnace set to 150
1/28/2013	2:52:29 PM	Run finished at 2:52 PM
1/28/2013	2:52:59 PM	Main Vac valve closed
1/28/2013	2:53:05 PM	Main Vac valve opened
1/28/2013	2:53:15 PM	Main Vac valve closed
1/28/2013	2:53:19 PM	Main Vac valve opened
1/28/2013	2:53:29 PM	Recipe started at 2:53 PM
1/28/2013	2:53:29 PM	Helium valve closed
1/28/2013	2:53:29 PM	BCl3 valve closed
1/28/2013	2:53:29 PM	PH3 valve closed
1/28/2013	2:53:29 PM	SiCl4 pre valve closed
1/28/2013	2:53:29 PM	SiCl4 post valve closed
1/28/2013	2:53:29 PM	Bypass valve closed
1/28/2013	2:53:29 PM	Bubbler valve closed
1/28/2013	2:53:29 PM	H2 valve opened
1/28/2013	2:53:29 PM	Main Vac valve opened
1/28/2013	2:53:29 PM	Helium MFC set to  0.000000
1/28/2013	2:53:29 PM	H2 MFC set to  0.000000
1/28/2013	2:53:29 PM	BCl3 MFC set to  0.000000
1/28/2013	2:53:29 PM	PH3 MFC set to  0.000000
1/28/2013	2:53:29 PM	SiCl4 MFC set to  0.000000
1/28/2013	2:53:29 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	2:53:29 PM	Tube furnace set to 150
1/28/2013	2:53:59 PM	H2 valve closed
1/28/2013	2:53:59 PM	BCl3 valve closed
1/28/2013	2:53:59 PM	PH3 valve closed
1/28/2013	2:53:59 PM	SiCl4 pre valve closed
1/28/2013	2:53:59 PM	SiCl4 post valve closed
1/28/2013	2:53:59 PM	Bypass valve closed
1/28/2013	2:53:59 PM	Bubbler valve closed
1/28/2013	2:53:59 PM	Helium valve opened
1/28/2013	2:53:59 PM	Main Vac valve opened
1/28/2013	2:53:59 PM	Helium MFC set to  20.000000
1/28/2013	2:53:59 PM	H2 MFC set to  0.000000
1/28/2013	2:53:59 PM	BCl3 MFC set to  0.000000
1/28/2013	2:53:59 PM	PH3 MFC set to  0.000000
1/28/2013	2:53:59 PM	SiCl4 MFC set to  0.000000
1/28/2013	2:53:59 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	2:53:59 PM	Tube furnace set to 150
1/28/2013	2:54:29 PM	Helium valve closed
1/28/2013	2:54:29 PM	H2 valve closed
1/28/2013	2:54:29 PM	BCl3 valve closed
1/28/2013	2:54:29 PM	PH3 valve closed
1/28/2013	2:54:29 PM	SiCl4 pre valve closed
1/28/2013	2:54:30 PM	SiCl4 post valve closed
1/28/2013	2:54:30 PM	Bypass valve closed
1/28/2013	2:54:30 PM	Bubbler valve closed
1/28/2013	2:54:30 PM	Main Vac valve opened
1/28/2013	2:54:30 PM	Helium MFC set to  0.000000
1/28/2013	2:54:30 PM	H2 MFC set to  0.000000
1/28/2013	2:54:30 PM	BCl3 MFC set to  0.000000
1/28/2013	2:54:30 PM	PH3 MFC set to  0.000000
1/28/2013	2:54:30 PM	SiCl4 MFC set to  0.000000
1/28/2013	2:54:30 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	2:54:30 PM	Tube furnace set to 150
1/28/2013	2:55:00 PM	H2 valve closed
1/28/2013	2:55:00 PM	BCl3 valve closed
1/28/2013	2:55:00 PM	PH3 valve closed
1/28/2013	2:55:00 PM	SiCl4 pre valve closed
1/28/2013	2:55:00 PM	SiCl4 post valve closed
1/28/2013	2:55:00 PM	Bypass valve closed
1/28/2013	2:55:00 PM	Bubbler valve closed
1/28/2013	2:55:00 PM	Helium valve opened
1/28/2013	2:55:00 PM	Main Vac valve opened
1/28/2013	2:55:00 PM	Helium MFC set to  20.000000
1/28/2013	2:55:00 PM	H2 MFC set to  0.000000
1/28/2013	2:55:00 PM	BCl3 MFC set to  0.000000
1/28/2013	2:55:00 PM	PH3 MFC set to  0.000000
1/28/2013	2:55:00 PM	SiCl4 MFC set to  0.000000
1/28/2013	2:55:00 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	2:55:00 PM	Tube furnace set to 150
1/28/2013	2:55:30 PM	Helium valve closed
1/28/2013	2:55:30 PM	H2 valve closed
1/28/2013	2:55:30 PM	BCl3 valve closed
1/28/2013	2:55:30 PM	PH3 valve closed
1/28/2013	2:55:30 PM	SiCl4 pre valve closed
1/28/2013	2:55:30 PM	SiCl4 post valve closed
1/28/2013	2:55:30 PM	Bypass valve closed
1/28/2013	2:55:30 PM	Bubbler valve closed
1/28/2013	2:55:30 PM	Main Vac valve opened
1/28/2013	2:55:30 PM	Helium MFC set to  0.000000
1/28/2013	2:55:30 PM	H2 MFC set to  0.000000
1/28/2013	2:55:30 PM	BCl3 MFC set to  0.000000
1/28/2013	2:55:30 PM	PH3 MFC set to  0.000000
1/28/2013	2:55:30 PM	SiCl4 MFC set to  0.000000
1/28/2013	2:55:30 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	2:55:30 PM	Tube furnace set to 150
1/28/2013	2:56:00 PM	H2 valve closed
1/28/2013	2:56:00 PM	BCl3 valve closed
1/28/2013	2:56:00 PM	PH3 valve closed
1/28/2013	2:56:00 PM	SiCl4 pre valve closed
1/28/2013	2:56:00 PM	SiCl4 post valve closed
1/28/2013	2:56:00 PM	Bypass valve closed
1/28/2013	2:56:00 PM	Bubbler valve closed
1/28/2013	2:56:00 PM	Helium valve opened
1/28/2013	2:56:00 PM	Main Vac valve opened
1/28/2013	2:56:00 PM	Helium MFC set to  20.000000
1/28/2013	2:56:00 PM	H2 MFC set to  0.000000
1/28/2013	2:56:00 PM	BCl3 MFC set to  0.000000
1/28/2013	2:56:00 PM	PH3 MFC set to  0.000000
1/28/2013	2:56:00 PM	SiCl4 MFC set to  0.000000
1/28/2013	2:56:00 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	2:56:00 PM	Tube furnace set to 150
1/28/2013	2:58:00 PM	Helium valve closed
1/28/2013	2:58:00 PM	H2 valve closed
1/28/2013	2:58:00 PM	BCl3 valve closed
1/28/2013	2:58:00 PM	PH3 valve closed
1/28/2013	2:58:01 PM	SiCl4 pre valve closed
1/28/2013	2:58:01 PM	SiCl4 post valve closed
1/28/2013	2:58:01 PM	Bypass valve closed
1/28/2013	2:58:01 PM	Bubbler valve closed
1/28/2013	2:58:01 PM	Main Vac valve opened
1/28/2013	2:58:01 PM	Helium MFC set to  0.000000
1/28/2013	2:58:01 PM	H2 MFC set to  0.000000
1/28/2013	2:58:01 PM	BCl3 MFC set to  0.000000
1/28/2013	2:58:01 PM	PH3 MFC set to  0.000000
1/28/2013	2:58:01 PM	SiCl4 MFC set to  0.000000
1/28/2013	2:58:01 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	2:58:01 PM	Tube furnace set to 150
1/28/2013	2:58:31 PM	H2 valve closed
1/28/2013	2:58:31 PM	BCl3 valve closed
1/28/2013	2:58:31 PM	PH3 valve closed
1/28/2013	2:58:31 PM	SiCl4 pre valve closed
1/28/2013	2:58:31 PM	SiCl4 post valve closed
1/28/2013	2:58:31 PM	Bypass valve closed
1/28/2013	2:58:31 PM	Bubbler valve closed
1/28/2013	2:58:31 PM	Helium valve opened
1/28/2013	2:58:31 PM	Main Vac valve opened
1/28/2013	2:58:31 PM	Helium MFC set to  20.000000
1/28/2013	2:58:31 PM	H2 MFC set to  0.000000
1/28/2013	2:58:31 PM	BCl3 MFC set to  0.000000
1/28/2013	2:58:31 PM	PH3 MFC set to  0.000000
1/28/2013	2:58:31 PM	SiCl4 MFC set to  0.000000
1/28/2013	2:58:31 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	2:58:31 PM	Tube furnace set to 150
1/28/2013	2:59:01 PM	Helium valve closed
1/28/2013	2:59:01 PM	H2 valve closed
1/28/2013	2:59:01 PM	BCl3 valve closed
1/28/2013	2:59:01 PM	PH3 valve closed
1/28/2013	2:59:01 PM	SiCl4 pre valve closed
1/28/2013	2:59:01 PM	SiCl4 post valve closed
1/28/2013	2:59:01 PM	Bypass valve closed
1/28/2013	2:59:01 PM	Bubbler valve closed
1/28/2013	2:59:01 PM	Main Vac valve opened
1/28/2013	2:59:01 PM	Helium MFC set to  0.000000
1/28/2013	2:59:01 PM	H2 MFC set to  0.000000
1/28/2013	2:59:01 PM	BCl3 MFC set to  0.000000
1/28/2013	2:59:01 PM	PH3 MFC set to  0.000000
1/28/2013	2:59:01 PM	SiCl4 MFC set to  0.000000
1/28/2013	2:59:01 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	2:59:01 PM	Tube furnace set to 150
1/28/2013	2:59:31 PM	H2 valve closed
1/28/2013	2:59:31 PM	BCl3 valve closed
1/28/2013	2:59:31 PM	PH3 valve closed
1/28/2013	2:59:31 PM	SiCl4 pre valve closed
1/28/2013	2:59:31 PM	SiCl4 post valve closed
1/28/2013	2:59:31 PM	Bypass valve closed
1/28/2013	2:59:31 PM	Bubbler valve closed
1/28/2013	2:59:31 PM	Helium valve opened
1/28/2013	2:59:31 PM	Main Vac valve opened
1/28/2013	2:59:31 PM	Helium MFC set to  20.000000
1/28/2013	2:59:31 PM	H2 MFC set to  0.000000
1/28/2013	2:59:31 PM	BCl3 MFC set to  0.000000
1/28/2013	2:59:31 PM	PH3 MFC set to  0.000000
1/28/2013	2:59:31 PM	SiCl4 MFC set to  0.000000
1/28/2013	2:59:31 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	2:59:31 PM	Tube furnace set to 150
1/28/2013	3:00:01 PM	Helium valve closed
1/28/2013	3:00:02 PM	H2 valve closed
1/28/2013	3:00:02 PM	BCl3 valve closed
1/28/2013	3:00:02 PM	PH3 valve closed
1/28/2013	3:00:02 PM	SiCl4 pre valve closed
1/28/2013	3:00:02 PM	SiCl4 post valve closed
1/28/2013	3:00:02 PM	Bypass valve closed
1/28/2013	3:00:02 PM	Bubbler valve closed
1/28/2013	3:00:02 PM	Main Vac valve opened
1/28/2013	3:00:02 PM	Helium MFC set to  0.000000
1/28/2013	3:00:02 PM	H2 MFC set to  0.000000
1/28/2013	3:00:02 PM	BCl3 MFC set to  0.000000
1/28/2013	3:00:02 PM	PH3 MFC set to  0.000000
1/28/2013	3:00:02 PM	SiCl4 MFC set to  0.000000
1/28/2013	3:00:02 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	3:00:02 PM	Tube furnace set to 150
1/28/2013	3:00:32 PM	H2 valve closed
1/28/2013	3:00:32 PM	BCl3 valve closed
1/28/2013	3:00:32 PM	PH3 valve closed
1/28/2013	3:00:32 PM	SiCl4 pre valve closed
1/28/2013	3:00:32 PM	SiCl4 post valve closed
1/28/2013	3:00:32 PM	Bypass valve closed
1/28/2013	3:00:32 PM	Bubbler valve closed
1/28/2013	3:00:32 PM	Helium valve opened
1/28/2013	3:00:32 PM	Main Vac valve opened
1/28/2013	3:00:32 PM	Helium MFC set to  20.000000
1/28/2013	3:00:32 PM	H2 MFC set to  0.000000
1/28/2013	3:00:32 PM	BCl3 MFC set to  0.000000
1/28/2013	3:00:32 PM	PH3 MFC set to  0.000000
1/28/2013	3:00:32 PM	SiCl4 MFC set to  0.000000
1/28/2013	3:00:32 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	3:00:32 PM	Tube furnace set to 150
1/28/2013	3:01:02 PM	Helium valve closed
1/28/2013	3:01:02 PM	H2 valve closed
1/28/2013	3:01:02 PM	BCl3 valve closed
1/28/2013	3:01:02 PM	PH3 valve closed
1/28/2013	3:01:02 PM	SiCl4 pre valve closed
1/28/2013	3:01:02 PM	SiCl4 post valve closed
1/28/2013	3:01:02 PM	Bypass valve closed
1/28/2013	3:01:02 PM	Bubbler valve closed
1/28/2013	3:01:02 PM	Main Vac valve opened
1/28/2013	3:01:02 PM	Helium MFC set to  0.000000
1/28/2013	3:01:02 PM	H2 MFC set to  0.000000
1/28/2013	3:01:02 PM	BCl3 MFC set to  0.000000
1/28/2013	3:01:02 PM	PH3 MFC set to  0.000000
1/28/2013	3:01:02 PM	SiCl4 MFC set to  0.000000
1/28/2013	3:01:02 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	3:01:02 PM	Tube furnace set to 150
1/28/2013	3:01:18 PM	Run aborted at 3:01 PM
1/28/2013	3:01:18 PM	Helium valve closed
1/28/2013	3:01:18 PM	H2 valve closed
1/28/2013	3:01:18 PM	BCl3 valve closed
1/28/2013	3:01:18 PM	PH3 valve closed
1/28/2013	3:01:18 PM	SiCl4 pre valve closed
1/28/2013	3:01:18 PM	SiCl4 post valve closed
1/28/2013	3:01:18 PM	Bypass valve closed
1/28/2013	3:01:18 PM	Main Vac valve closed
1/28/2013	3:01:18 PM	Bubbler valve closed
1/28/2013	3:01:18 PM	Helium MFC set to  0.000000
1/28/2013	3:01:18 PM	H2 MFC set to  0.000000
1/28/2013	3:01:18 PM	BCl3 MFC set to  0.000000
1/28/2013	3:01:18 PM	PH3 MFC set to  0.000000
1/28/2013	3:01:18 PM	SiCl4 MFC set to  0.000000
1/28/2013	3:01:18 PM	Tube furnace set to 0
1/28/2013	3:01:23 PM	Main Vac valve opened
1/28/2013	3:01:47 PM	Recipe started at 3:01 PM
1/28/2013	3:01:47 PM	Helium valve closed
1/28/2013	3:01:47 PM	H2 valve closed
1/28/2013	3:01:47 PM	BCl3 valve closed
1/28/2013	3:01:47 PM	PH3 valve closed
1/28/2013	3:01:47 PM	SiCl4 pre valve closed
1/28/2013	3:01:47 PM	SiCl4 post valve closed
1/28/2013	3:01:47 PM	Main Vac valve closed
1/28/2013	3:01:47 PM	Bypass valve closed
1/28/2013	3:01:47 PM	Bubbler valve closed
1/28/2013	3:01:47 PM	Helium MFC set to  0.000000
1/28/2013	3:01:47 PM	H2 MFC set to  0.000000
1/28/2013	3:01:47 PM	BCl3 MFC set to  0.000000
1/28/2013	3:01:47 PM	PH3 MFC set to  0.000000
1/28/2013	3:01:47 PM	SiCl4 MFC set to  0.000000
1/28/2013	3:01:47 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	3:01:47 PM	Tube furnace set to 0
1/28/2013	3:01:50 PM	Helium valve closed
1/28/2013	3:01:50 PM	BCl3 valve closed
1/28/2013	3:01:50 PM	PH3 valve closed
1/28/2013	3:01:50 PM	SiCl4 pre valve closed
1/28/2013	3:01:50 PM	SiCl4 post valve closed
1/28/2013	3:01:50 PM	Main Vac valve closed
1/28/2013	3:01:50 PM	Bypass valve closed
1/28/2013	3:01:50 PM	Bubbler valve closed
1/28/2013	3:01:50 PM	H2 valve opened
1/28/2013	3:01:50 PM	Helium MFC set to  0.000000
1/28/2013	3:01:50 PM	H2 MFC set to  500.000000
1/28/2013	3:01:50 PM	BCl3 MFC set to  0.000000
1/28/2013	3:01:50 PM	PH3 MFC set to  0.000000
1/28/2013	3:01:50 PM	SiCl4 MFC set to  0.000000
1/28/2013	3:01:50 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	3:01:50 PM	Tube furnace set to 0
1/28/2013	3:02:59 PM	Helium valve closed
1/28/2013	3:02:59 PM	BCl3 valve closed
1/28/2013	3:02:59 PM	PH3 valve closed
1/28/2013	3:02:59 PM	SiCl4 pre valve closed
1/28/2013	3:02:59 PM	SiCl4 post valve closed
1/28/2013	3:02:59 PM	Main Vac valve closed
1/28/2013	3:02:59 PM	Bypass valve closed
1/28/2013	3:02:59 PM	H2 valve opened
1/28/2013	3:02:59 PM	Bubbler valve opened
1/28/2013	3:03:00 PM	Helium MFC set to  0.000000
1/28/2013	3:03:00 PM	H2 MFC set to  500.000000
1/28/2013	3:03:00 PM	BCl3 MFC set to  0.000000
1/28/2013	3:03:00 PM	PH3 MFC set to  0.000000
1/28/2013	3:03:00 PM	SiCl4 MFC set to  0.000000
1/28/2013	3:03:00 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	3:03:00 PM	Tube furnace set to 0
1/28/2013	3:03:01 PM	Helium valve closed
1/28/2013	3:03:01 PM	BCl3 valve closed
1/28/2013	3:03:01 PM	PH3 valve closed
1/28/2013	3:03:01 PM	SiCl4 pre valve closed
1/28/2013	3:03:01 PM	SiCl4 post valve closed
1/28/2013	3:03:01 PM	Main Vac valve closed
1/28/2013	3:03:01 PM	Bypass valve closed
1/28/2013	3:03:01 PM	H2 valve opened
1/28/2013	3:03:01 PM	Bubbler valve opened
1/28/2013	3:03:01 PM	Helium MFC set to  0.000000
1/28/2013	3:03:01 PM	H2 MFC set to  500.000000
1/28/2013	3:03:01 PM	BCl3 MFC set to  0.000000
1/28/2013	3:03:01 PM	PH3 MFC set to  0.000000
1/28/2013	3:03:01 PM	SiCl4 MFC set to  0.000000
1/28/2013	3:03:01 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	3:03:01 PM	Tube furnace set to 1000
1/28/2013	3:23:01 PM	Helium valve closed
1/28/2013	3:23:01 PM	BCl3 valve closed
1/28/2013	3:23:01 PM	PH3 valve closed
1/28/2013	3:23:01 PM	Main Vac valve closed
1/28/2013	3:23:01 PM	Bypass valve closed
1/28/2013	3:23:01 PM	H2 valve opened
1/28/2013	3:23:01 PM	SiCl4 pre valve opened
1/28/2013	3:23:01 PM	SiCl4 post valve opened
1/28/2013	3:23:01 PM	Bubbler valve opened
1/28/2013	3:23:01 PM	Helium MFC set to  0.000000
1/28/2013	3:23:01 PM	H2 MFC set to  500.000000
1/28/2013	3:23:01 PM	BCl3 MFC set to  0.000000
1/28/2013	3:23:01 PM	PH3 MFC set to  0.000000
1/28/2013	3:23:01 PM	SiCl4 MFC set to  50.000000
1/28/2013	3:23:01 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	3:23:01 PM	Tube furnace set to 1000
1/28/2013	3:38:01 PM	Helium valve closed
1/28/2013	3:38:01 PM	BCl3 valve closed
1/28/2013	3:38:01 PM	PH3 valve closed
1/28/2013	3:38:01 PM	SiCl4 pre valve closed
1/28/2013	3:38:01 PM	SiCl4 post valve closed
1/28/2013	3:38:01 PM	Main Vac valve closed
1/28/2013	3:38:01 PM	Bypass valve closed
1/28/2013	3:38:01 PM	H2 valve opened
1/28/2013	3:38:01 PM	Bubbler valve opened
1/28/2013	3:38:01 PM	Helium MFC set to  0.000000
1/28/2013	3:38:01 PM	H2 MFC set to  500.000000
1/28/2013	3:38:01 PM	BCl3 MFC set to  0.000000
1/28/2013	3:38:01 PM	PH3 MFC set to  0.000000
1/28/2013	3:38:01 PM	SiCl4 MFC set to  0.000000
1/28/2013	3:38:01 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	3:38:01 PM	Tube furnace set to 750
1/28/2013	3:43:01 PM	H2 valve closed
1/28/2013	3:43:01 PM	BCl3 valve closed
1/28/2013	3:43:01 PM	PH3 valve closed
1/28/2013	3:43:01 PM	SiCl4 pre valve closed
1/28/2013	3:43:01 PM	SiCl4 post valve closed
1/28/2013	3:43:01 PM	Main Vac valve closed
1/28/2013	3:43:01 PM	Bypass valve closed
1/28/2013	3:43:01 PM	Helium valve opened
1/28/2013	3:43:01 PM	Bubbler valve opened
1/28/2013	3:43:01 PM	Helium MFC set to  500.000000
1/28/2013	3:43:01 PM	H2 MFC set to  0.000000
1/28/2013	3:43:01 PM	BCl3 MFC set to  0.000000
1/28/2013	3:43:01 PM	PH3 MFC set to  0.000000
1/28/2013	3:43:01 PM	SiCl4 MFC set to  0.000000
1/28/2013	3:43:01 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	3:43:02 PM	Tube furnace set to 0
1/28/2013	3:46:04 PM	Run aborted at 3:46 PM
1/28/2013	3:46:04 PM	Helium valve closed
1/28/2013	3:46:04 PM	H2 valve closed
1/28/2013	3:46:04 PM	BCl3 valve closed
1/28/2013	3:46:04 PM	PH3 valve closed
1/28/2013	3:46:04 PM	SiCl4 pre valve closed
1/28/2013	3:46:04 PM	SiCl4 post valve closed
1/28/2013	3:46:04 PM	Bypass valve closed
1/28/2013	3:46:04 PM	Main Vac valve closed
1/28/2013	3:46:04 PM	Bubbler valve closed
1/28/2013	3:46:04 PM	Helium MFC set to  0.000000
1/28/2013	3:46:04 PM	H2 MFC set to  0.000000
1/28/2013	3:46:04 PM	BCl3 MFC set to  0.000000
1/28/2013	3:46:04 PM	PH3 MFC set to  0.000000
1/28/2013	3:46:04 PM	SiCl4 MFC set to  0.000000
1/28/2013	3:46:04 PM	Tube furnace set to 0
1/28/2013	3:46:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/28/2013	3:46:06 PM	Recipe started at 3:46 PM
1/28/2013	3:46:06 PM	Helium valve closed
1/28/2013	3:46:06 PM	H2 valve closed
1/28/2013	3:46:06 PM	BCl3 valve closed
1/28/2013	3:46:06 PM	PH3 valve closed
1/28/2013	3:46:06 PM	SiCl4 pre valve closed
1/28/2013	3:46:06 PM	SiCl4 post valve closed
1/28/2013	3:46:06 PM	Main Vac valve closed
1/28/2013	3:46:06 PM	Bypass valve closed
1/28/2013	3:46:06 PM	Bubbler valve closed
1/28/2013	3:46:06 PM	Helium MFC set to  0.000000
1/28/2013	3:46:06 PM	H2 MFC set to  0.000000
1/28/2013	3:46:06 PM	BCl3 MFC set to  0.000000
1/28/2013	3:46:06 PM	PH3 MFC set to  0.000000
1/28/2013	3:46:06 PM	SiCl4 MFC set to  0.000000
1/28/2013	3:46:06 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	3:46:06 PM	Tube furnace set to 0
1/28/2013	3:46:09 PM	H2 valve closed
1/28/2013	3:46:09 PM	BCl3 valve closed
1/28/2013	3:46:09 PM	PH3 valve closed
1/28/2013	3:46:09 PM	SiCl4 pre valve closed
1/28/2013	3:46:09 PM	SiCl4 post valve closed
1/28/2013	3:46:09 PM	Main Vac valve closed
1/28/2013	3:46:09 PM	Bypass valve closed
1/28/2013	3:46:09 PM	Bubbler valve closed
1/28/2013	3:46:09 PM	Helium valve opened
1/28/2013	3:46:09 PM	Helium MFC set to  500.000000
1/28/2013	3:46:09 PM	H2 MFC set to  0.000000
1/28/2013	3:46:09 PM	BCl3 MFC set to  0.000000
1/28/2013	3:46:09 PM	PH3 MFC set to  0.000000
1/28/2013	3:46:09 PM	SiCl4 MFC set to  0.000000
1/28/2013	3:46:09 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	3:46:10 PM	Tube furnace set to 0
1/28/2013	3:46:10 PM	Helium valve closed
1/28/2013	3:46:10 PM	H2 valve closed
1/28/2013	3:46:10 PM	BCl3 valve closed
1/28/2013	3:46:10 PM	PH3 valve closed
1/28/2013	3:46:10 PM	SiCl4 pre valve closed
1/28/2013	3:46:10 PM	SiCl4 post valve closed
1/28/2013	3:46:10 PM	Main Vac valve closed
1/28/2013	3:46:10 PM	Bypass valve closed
1/28/2013	3:46:10 PM	Bubbler valve closed
1/28/2013	3:46:10 PM	Helium MFC set to  0.000000
1/28/2013	3:46:10 PM	H2 MFC set to  0.000000
1/28/2013	3:46:10 PM	BCl3 MFC set to  0.000000
1/28/2013	3:46:10 PM	PH3 MFC set to  0.000000
1/28/2013	3:46:10 PM	SiCl4 MFC set to  0.000000
1/28/2013	3:46:10 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	3:46:10 PM	Tube furnace set to 0
1/28/2013	3:46:11 PM	Run finished at 3:46 PM
1/28/2013	3:46:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/28/2013	3:48:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/28/2013	3:48:32 PM	Recipe started at 3:48 PM
1/28/2013	3:48:32 PM	Helium valve closed
1/28/2013	3:48:32 PM	H2 valve closed
1/28/2013	3:48:32 PM	BCl3 valve closed
1/28/2013	3:48:32 PM	PH3 valve closed
1/28/2013	3:48:32 PM	SiCl4 pre valve closed
1/28/2013	3:48:32 PM	SiCl4 post valve closed
1/28/2013	3:48:32 PM	Main Vac valve closed
1/28/2013	3:48:32 PM	Bubbler valve closed
1/28/2013	3:48:32 PM	Bypass valve opened
1/28/2013	3:48:32 PM	Helium MFC set to  0.000000
1/28/2013	3:48:32 PM	H2 MFC set to  0.000000
1/28/2013	3:48:32 PM	BCl3 MFC set to  0.000000
1/28/2013	3:48:32 PM	PH3 MFC set to  0.000000
1/28/2013	3:48:32 PM	SiCl4 MFC set to  0.000000
1/28/2013	3:48:32 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	3:48:32 PM	Tube furnace set to 0
1/28/2013	3:49:33 PM	Helium valve closed
1/28/2013	3:49:33 PM	H2 valve closed
1/28/2013	3:49:33 PM	BCl3 valve closed
1/28/2013	3:49:33 PM	PH3 valve closed
1/28/2013	3:49:33 PM	SiCl4 pre valve closed
1/28/2013	3:49:33 PM	SiCl4 post valve closed
1/28/2013	3:49:33 PM	Main Vac valve closed
1/28/2013	3:49:33 PM	Bubbler valve closed
1/28/2013	3:49:33 PM	Bypass valve opened
1/28/2013	3:49:33 PM	Helium MFC set to  0.000000
1/28/2013	3:49:33 PM	H2 MFC set to  0.000000
1/28/2013	3:49:33 PM	BCl3 MFC set to  0.000000
1/28/2013	3:49:33 PM	PH3 MFC set to  0.000000
1/28/2013	3:49:33 PM	SiCl4 MFC set to  0.000000
1/28/2013	3:49:33 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	3:49:33 PM	Tube furnace set to 0
1/28/2013	3:50:33 PM	Helium valve closed
1/28/2013	3:50:33 PM	H2 valve closed
1/28/2013	3:50:33 PM	BCl3 valve closed
1/28/2013	3:50:33 PM	PH3 valve closed
1/28/2013	3:50:33 PM	SiCl4 pre valve closed
1/28/2013	3:50:33 PM	SiCl4 post valve closed
1/28/2013	3:50:33 PM	Bypass valve closed
1/28/2013	3:50:33 PM	Bubbler valve closed
1/28/2013	3:50:33 PM	Main Vac valve opened
1/28/2013	3:50:33 PM	Helium MFC set to  0.000000
1/28/2013	3:50:33 PM	H2 MFC set to  0.000000
1/28/2013	3:50:33 PM	BCl3 MFC set to  0.000000
1/28/2013	3:50:33 PM	PH3 MFC set to  0.000000
1/28/2013	3:50:33 PM	SiCl4 MFC set to  0.000000
1/28/2013	3:50:33 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	3:50:33 PM	Tube furnace set to 0
1/28/2013	3:50:34 PM	Run finished at 3:50 PM
1/28/2013	3:50:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/28/2013	3:51:31 PM	Recipe started at 3:51 PM
1/28/2013	3:51:31 PM	Helium valve closed
1/28/2013	3:51:31 PM	BCl3 valve closed
1/28/2013	3:51:31 PM	PH3 valve closed
1/28/2013	3:51:31 PM	SiCl4 pre valve closed
1/28/2013	3:51:31 PM	SiCl4 post valve closed
1/28/2013	3:51:31 PM	Bypass valve closed
1/28/2013	3:51:31 PM	Bubbler valve closed
1/28/2013	3:51:31 PM	H2 valve opened
1/28/2013	3:51:31 PM	Main Vac valve opened
1/28/2013	3:51:31 PM	Helium MFC set to  0.000000
1/28/2013	3:51:31 PM	H2 MFC set to  0.000000
1/28/2013	3:51:31 PM	BCl3 MFC set to  0.000000
1/28/2013	3:51:31 PM	PH3 MFC set to  0.000000
1/28/2013	3:51:31 PM	SiCl4 MFC set to  0.000000
1/28/2013	3:51:32 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	3:51:32 PM	Tube furnace set to 150
1/28/2013	3:52:02 PM	H2 valve closed
1/28/2013	3:52:02 PM	BCl3 valve closed
1/28/2013	3:52:02 PM	PH3 valve closed
1/28/2013	3:52:02 PM	SiCl4 pre valve closed
1/28/2013	3:52:02 PM	SiCl4 post valve closed
1/28/2013	3:52:02 PM	Bypass valve closed
1/28/2013	3:52:02 PM	Bubbler valve closed
1/28/2013	3:52:02 PM	Helium valve opened
1/28/2013	3:52:02 PM	Main Vac valve opened
1/28/2013	3:52:02 PM	Helium MFC set to  20.000000
1/28/2013	3:52:02 PM	H2 MFC set to  0.000000
1/28/2013	3:52:02 PM	BCl3 MFC set to  0.000000
1/28/2013	3:52:02 PM	PH3 MFC set to  0.000000
1/28/2013	3:52:02 PM	SiCl4 MFC set to  0.000000
1/28/2013	3:52:02 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	3:52:02 PM	Tube furnace set to 150
1/28/2013	3:52:32 PM	Helium valve closed
1/28/2013	3:52:32 PM	H2 valve closed
1/28/2013	3:52:32 PM	BCl3 valve closed
1/28/2013	3:52:32 PM	PH3 valve closed
1/28/2013	3:52:32 PM	SiCl4 pre valve closed
1/28/2013	3:52:32 PM	SiCl4 post valve closed
1/28/2013	3:52:32 PM	Bypass valve closed
1/28/2013	3:52:32 PM	Bubbler valve closed
1/28/2013	3:52:32 PM	Main Vac valve opened
1/28/2013	3:52:32 PM	Helium MFC set to  0.000000
1/28/2013	3:52:32 PM	H2 MFC set to  0.000000
1/28/2013	3:52:32 PM	BCl3 MFC set to  0.000000
1/28/2013	3:52:32 PM	PH3 MFC set to  0.000000
1/28/2013	3:52:32 PM	SiCl4 MFC set to  0.000000
1/28/2013	3:52:32 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	3:52:32 PM	Tube furnace set to 150
1/28/2013	3:53:02 PM	H2 valve closed
1/28/2013	3:53:02 PM	BCl3 valve closed
1/28/2013	3:53:02 PM	PH3 valve closed
1/28/2013	3:53:02 PM	SiCl4 pre valve closed
1/28/2013	3:53:02 PM	SiCl4 post valve closed
1/28/2013	3:53:02 PM	Bypass valve closed
1/28/2013	3:53:02 PM	Bubbler valve closed
1/28/2013	3:53:02 PM	Helium valve opened
1/28/2013	3:53:02 PM	Main Vac valve opened
1/28/2013	3:53:02 PM	Helium MFC set to  20.000000
1/28/2013	3:53:02 PM	H2 MFC set to  0.000000
1/28/2013	3:53:02 PM	BCl3 MFC set to  0.000000
1/28/2013	3:53:02 PM	PH3 MFC set to  0.000000
1/28/2013	3:53:02 PM	SiCl4 MFC set to  0.000000
1/28/2013	3:53:02 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	3:53:02 PM	Tube furnace set to 150
1/28/2013	3:53:32 PM	Helium valve closed
1/28/2013	3:53:32 PM	H2 valve closed
1/28/2013	3:53:32 PM	BCl3 valve closed
1/28/2013	3:53:32 PM	PH3 valve closed
1/28/2013	3:53:32 PM	SiCl4 pre valve closed
1/28/2013	3:53:32 PM	SiCl4 post valve closed
1/28/2013	3:53:32 PM	Bypass valve closed
1/28/2013	3:53:32 PM	Bubbler valve closed
1/28/2013	3:53:32 PM	Main Vac valve opened
1/28/2013	3:53:32 PM	Helium MFC set to  0.000000
1/28/2013	3:53:32 PM	H2 MFC set to  0.000000
1/28/2013	3:53:32 PM	BCl3 MFC set to  0.000000
1/28/2013	3:53:33 PM	PH3 MFC set to  0.000000
1/28/2013	3:53:33 PM	SiCl4 MFC set to  0.000000
1/28/2013	3:53:33 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	3:53:33 PM	Tube furnace set to 150
1/28/2013	3:54:03 PM	H2 valve closed
1/28/2013	3:54:03 PM	BCl3 valve closed
1/28/2013	3:54:03 PM	PH3 valve closed
1/28/2013	3:54:03 PM	SiCl4 pre valve closed
1/28/2013	3:54:03 PM	SiCl4 post valve closed
1/28/2013	3:54:03 PM	Bypass valve closed
1/28/2013	3:54:03 PM	Bubbler valve closed
1/28/2013	3:54:03 PM	Helium valve opened
1/28/2013	3:54:03 PM	Main Vac valve opened
1/28/2013	3:54:03 PM	Helium MFC set to  20.000000
1/28/2013	3:54:03 PM	H2 MFC set to  0.000000
1/28/2013	3:54:03 PM	BCl3 MFC set to  0.000000
1/28/2013	3:54:03 PM	PH3 MFC set to  0.000000
1/28/2013	3:54:03 PM	SiCl4 MFC set to  0.000000
1/28/2013	3:54:03 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	3:54:03 PM	Tube furnace set to 150
1/28/2013	3:56:03 PM	Helium valve closed
1/28/2013	3:56:03 PM	H2 valve closed
1/28/2013	3:56:03 PM	BCl3 valve closed
1/28/2013	3:56:03 PM	PH3 valve closed
1/28/2013	3:56:03 PM	SiCl4 pre valve closed
1/28/2013	3:56:03 PM	SiCl4 post valve closed
1/28/2013	3:56:03 PM	Bypass valve closed
1/28/2013	3:56:03 PM	Bubbler valve closed
1/28/2013	3:56:03 PM	Main Vac valve opened
1/28/2013	3:56:03 PM	Helium MFC set to  0.000000
1/28/2013	3:56:03 PM	H2 MFC set to  0.000000
1/28/2013	3:56:03 PM	BCl3 MFC set to  0.000000
1/28/2013	3:56:03 PM	PH3 MFC set to  0.000000
1/28/2013	3:56:03 PM	SiCl4 MFC set to  0.000000
1/28/2013	3:56:03 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	3:56:03 PM	Tube furnace set to 150
1/28/2013	3:56:33 PM	H2 valve closed
1/28/2013	3:56:33 PM	BCl3 valve closed
1/28/2013	3:56:33 PM	PH3 valve closed
1/28/2013	3:56:33 PM	SiCl4 pre valve closed
1/28/2013	3:56:33 PM	SiCl4 post valve closed
1/28/2013	3:56:33 PM	Bypass valve closed
1/28/2013	3:56:33 PM	Bubbler valve closed
1/28/2013	3:56:33 PM	Helium valve opened
1/28/2013	3:56:33 PM	Main Vac valve opened
1/28/2013	3:56:33 PM	Helium MFC set to  20.000000
1/28/2013	3:56:33 PM	H2 MFC set to  0.000000
1/28/2013	3:56:33 PM	BCl3 MFC set to  0.000000
1/28/2013	3:56:33 PM	PH3 MFC set to  0.000000
1/28/2013	3:56:33 PM	SiCl4 MFC set to  0.000000
1/28/2013	3:56:33 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	3:56:33 PM	Tube furnace set to 150
1/28/2013	3:57:03 PM	Helium valve closed
1/28/2013	3:57:03 PM	H2 valve closed
1/28/2013	3:57:03 PM	BCl3 valve closed
1/28/2013	3:57:03 PM	PH3 valve closed
1/28/2013	3:57:03 PM	SiCl4 pre valve closed
1/28/2013	3:57:03 PM	SiCl4 post valve closed
1/28/2013	3:57:03 PM	Bypass valve closed
1/28/2013	3:57:03 PM	Bubbler valve closed
1/28/2013	3:57:03 PM	Main Vac valve opened
1/28/2013	3:57:04 PM	Helium MFC set to  0.000000
1/28/2013	3:57:04 PM	H2 MFC set to  0.000000
1/28/2013	3:57:04 PM	BCl3 MFC set to  0.000000
1/28/2013	3:57:04 PM	PH3 MFC set to  0.000000
1/28/2013	3:57:04 PM	SiCl4 MFC set to  0.000000
1/28/2013	3:57:04 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	3:57:04 PM	Tube furnace set to 150
1/28/2013	3:57:34 PM	H2 valve closed
1/28/2013	3:57:34 PM	BCl3 valve closed
1/28/2013	3:57:34 PM	PH3 valve closed
1/28/2013	3:57:34 PM	SiCl4 pre valve closed
1/28/2013	3:57:34 PM	SiCl4 post valve closed
1/28/2013	3:57:34 PM	Bypass valve closed
1/28/2013	3:57:34 PM	Bubbler valve closed
1/28/2013	3:57:34 PM	Helium valve opened
1/28/2013	3:57:34 PM	Main Vac valve opened
1/28/2013	3:57:34 PM	Helium MFC set to  20.000000
1/28/2013	3:57:34 PM	H2 MFC set to  0.000000
1/28/2013	3:57:34 PM	BCl3 MFC set to  0.000000
1/28/2013	3:57:34 PM	PH3 MFC set to  0.000000
1/28/2013	3:57:34 PM	SiCl4 MFC set to  0.000000
1/28/2013	3:57:34 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	3:57:34 PM	Tube furnace set to 150
1/28/2013	3:58:04 PM	Helium valve closed
1/28/2013	3:58:04 PM	H2 valve closed
1/28/2013	3:58:04 PM	BCl3 valve closed
1/28/2013	3:58:04 PM	PH3 valve closed
1/28/2013	3:58:04 PM	SiCl4 pre valve closed
1/28/2013	3:58:04 PM	SiCl4 post valve closed
1/28/2013	3:58:04 PM	Bypass valve closed
1/28/2013	3:58:04 PM	Bubbler valve closed
1/28/2013	3:58:04 PM	Main Vac valve opened
1/28/2013	3:58:04 PM	Helium MFC set to  0.000000
1/28/2013	3:58:04 PM	H2 MFC set to  0.000000
1/28/2013	3:58:04 PM	BCl3 MFC set to  0.000000
1/28/2013	3:58:04 PM	PH3 MFC set to  0.000000
1/28/2013	3:58:04 PM	SiCl4 MFC set to  0.000000
1/28/2013	3:58:04 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	3:58:04 PM	Tube furnace set to 150
1/28/2013	3:58:34 PM	H2 valve closed
1/28/2013	3:58:34 PM	BCl3 valve closed
1/28/2013	3:58:34 PM	PH3 valve closed
1/28/2013	3:58:34 PM	SiCl4 pre valve closed
1/28/2013	3:58:34 PM	SiCl4 post valve closed
1/28/2013	3:58:34 PM	Bypass valve closed
1/28/2013	3:58:34 PM	Bubbler valve closed
1/28/2013	3:58:34 PM	Helium valve opened
1/28/2013	3:58:34 PM	Main Vac valve opened
1/28/2013	3:58:34 PM	Helium MFC set to  20.000000
1/28/2013	3:58:34 PM	H2 MFC set to  0.000000
1/28/2013	3:58:34 PM	BCl3 MFC set to  0.000000
1/28/2013	3:58:34 PM	PH3 MFC set to  0.000000
1/28/2013	3:58:34 PM	SiCl4 MFC set to  0.000000
1/28/2013	3:58:34 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	3:58:34 PM	Tube furnace set to 150
1/28/2013	4:00:34 PM	Helium valve closed
1/28/2013	4:00:34 PM	H2 valve closed
1/28/2013	4:00:34 PM	BCl3 valve closed
1/28/2013	4:00:34 PM	PH3 valve closed
1/28/2013	4:00:34 PM	SiCl4 pre valve closed
1/28/2013	4:00:34 PM	SiCl4 post valve closed
1/28/2013	4:00:34 PM	Bypass valve closed
1/28/2013	4:00:35 PM	Bubbler valve closed
1/28/2013	4:00:35 PM	Main Vac valve opened
1/28/2013	4:00:35 PM	Helium MFC set to  0.000000
1/28/2013	4:00:35 PM	H2 MFC set to  0.000000
1/28/2013	4:00:35 PM	BCl3 MFC set to  0.000000
1/28/2013	4:00:35 PM	PH3 MFC set to  0.000000
1/28/2013	4:00:35 PM	SiCl4 MFC set to  0.000000
1/28/2013	4:00:35 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	4:00:35 PM	Tube furnace set to 150
1/28/2013	4:01:05 PM	H2 valve closed
1/28/2013	4:01:05 PM	BCl3 valve closed
1/28/2013	4:01:05 PM	PH3 valve closed
1/28/2013	4:01:05 PM	SiCl4 pre valve closed
1/28/2013	4:01:05 PM	SiCl4 post valve closed
1/28/2013	4:01:05 PM	Bypass valve closed
1/28/2013	4:01:05 PM	Bubbler valve closed
1/28/2013	4:01:05 PM	Helium valve opened
1/28/2013	4:01:05 PM	Main Vac valve opened
1/28/2013	4:01:05 PM	Helium MFC set to  20.000000
1/28/2013	4:01:05 PM	H2 MFC set to  0.000000
1/28/2013	4:01:05 PM	BCl3 MFC set to  0.000000
1/28/2013	4:01:05 PM	PH3 MFC set to  0.000000
1/28/2013	4:01:05 PM	SiCl4 MFC set to  0.000000
1/28/2013	4:01:05 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	4:01:05 PM	Tube furnace set to 150
1/28/2013	4:01:35 PM	Helium valve closed
1/28/2013	4:01:35 PM	H2 valve closed
1/28/2013	4:01:35 PM	BCl3 valve closed
1/28/2013	4:01:35 PM	PH3 valve closed
1/28/2013	4:01:35 PM	SiCl4 pre valve closed
1/28/2013	4:01:35 PM	SiCl4 post valve closed
1/28/2013	4:01:35 PM	Bypass valve closed
1/28/2013	4:01:35 PM	Bubbler valve closed
1/28/2013	4:01:35 PM	Main Vac valve opened
1/28/2013	4:01:35 PM	Helium MFC set to  0.000000
1/28/2013	4:01:35 PM	H2 MFC set to  0.000000
1/28/2013	4:01:35 PM	BCl3 MFC set to  0.000000
1/28/2013	4:01:35 PM	PH3 MFC set to  0.000000
1/28/2013	4:01:35 PM	SiCl4 MFC set to  0.000000
1/28/2013	4:01:35 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	4:01:35 PM	Tube furnace set to 150
1/28/2013	4:02:05 PM	H2 valve closed
1/28/2013	4:02:05 PM	BCl3 valve closed
1/28/2013	4:02:05 PM	PH3 valve closed
1/28/2013	4:02:05 PM	SiCl4 pre valve closed
1/28/2013	4:02:05 PM	SiCl4 post valve closed
1/28/2013	4:02:05 PM	Bypass valve closed
1/28/2013	4:02:05 PM	Bubbler valve closed
1/28/2013	4:02:05 PM	Helium valve opened
1/28/2013	4:02:05 PM	Main Vac valve opened
1/28/2013	4:02:05 PM	Helium MFC set to  20.000000
1/28/2013	4:02:05 PM	H2 MFC set to  0.000000
1/28/2013	4:02:05 PM	BCl3 MFC set to  0.000000
1/28/2013	4:02:05 PM	PH3 MFC set to  0.000000
1/28/2013	4:02:05 PM	SiCl4 MFC set to  0.000000
1/28/2013	4:02:05 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	4:02:05 PM	Tube furnace set to 150
1/28/2013	4:04:05 PM	Helium valve closed
1/28/2013	4:04:05 PM	H2 valve closed
1/28/2013	4:04:05 PM	BCl3 valve closed
1/28/2013	4:04:05 PM	PH3 valve closed
1/28/2013	4:04:06 PM	SiCl4 pre valve closed
1/28/2013	4:04:06 PM	SiCl4 post valve closed
1/28/2013	4:04:06 PM	Bypass valve closed
1/28/2013	4:04:06 PM	Bubbler valve closed
1/28/2013	4:04:06 PM	Main Vac valve opened
1/28/2013	4:04:06 PM	Helium MFC set to  0.000000
1/28/2013	4:04:06 PM	H2 MFC set to  0.000000
1/28/2013	4:04:06 PM	BCl3 MFC set to  0.000000
1/28/2013	4:04:06 PM	PH3 MFC set to  0.000000
1/28/2013	4:04:06 PM	SiCl4 MFC set to  0.000000
1/28/2013	4:04:06 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	4:04:06 PM	Tube furnace set to 150
1/28/2013	4:04:36 PM	H2 valve closed
1/28/2013	4:04:36 PM	BCl3 valve closed
1/28/2013	4:04:36 PM	PH3 valve closed
1/28/2013	4:04:36 PM	SiCl4 pre valve closed
1/28/2013	4:04:36 PM	SiCl4 post valve closed
1/28/2013	4:04:36 PM	Bypass valve closed
1/28/2013	4:04:36 PM	Bubbler valve closed
1/28/2013	4:04:36 PM	Helium valve opened
1/28/2013	4:04:36 PM	Main Vac valve opened
1/28/2013	4:04:36 PM	Helium MFC set to  20.000000
1/28/2013	4:04:36 PM	H2 MFC set to  0.000000
1/28/2013	4:04:36 PM	BCl3 MFC set to  0.000000
1/28/2013	4:04:36 PM	PH3 MFC set to  0.000000
1/28/2013	4:04:36 PM	SiCl4 MFC set to  0.000000
1/28/2013	4:04:36 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	4:04:36 PM	Tube furnace set to 150
1/28/2013	4:05:06 PM	Helium valve closed
1/28/2013	4:05:06 PM	H2 valve closed
1/28/2013	4:05:06 PM	BCl3 valve closed
1/28/2013	4:05:06 PM	PH3 valve closed
1/28/2013	4:05:06 PM	SiCl4 pre valve closed
1/28/2013	4:05:06 PM	SiCl4 post valve closed
1/28/2013	4:05:06 PM	Bypass valve closed
1/28/2013	4:05:06 PM	Bubbler valve closed
1/28/2013	4:05:06 PM	Main Vac valve opened
1/28/2013	4:05:06 PM	Helium MFC set to  0.000000
1/28/2013	4:05:06 PM	H2 MFC set to  0.000000
1/28/2013	4:05:06 PM	BCl3 MFC set to  0.000000
1/28/2013	4:05:06 PM	PH3 MFC set to  0.000000
1/28/2013	4:05:06 PM	SiCl4 MFC set to  0.000000
1/28/2013	4:05:06 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	4:05:06 PM	Tube furnace set to 150
1/28/2013	4:05:36 PM	H2 valve closed
1/28/2013	4:05:36 PM	BCl3 valve closed
1/28/2013	4:05:36 PM	PH3 valve closed
1/28/2013	4:05:36 PM	SiCl4 pre valve closed
1/28/2013	4:05:36 PM	SiCl4 post valve closed
1/28/2013	4:05:36 PM	Bypass valve closed
1/28/2013	4:05:36 PM	Bubbler valve closed
1/28/2013	4:05:36 PM	Helium valve opened
1/28/2013	4:05:36 PM	Main Vac valve opened
1/28/2013	4:05:36 PM	Helium MFC set to  20.000000
1/28/2013	4:05:36 PM	H2 MFC set to  0.000000
1/28/2013	4:05:36 PM	BCl3 MFC set to  0.000000
1/28/2013	4:05:36 PM	PH3 MFC set to  0.000000
1/28/2013	4:05:36 PM	SiCl4 MFC set to  0.000000
1/28/2013	4:05:36 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	4:05:36 PM	Tube furnace set to 150
1/28/2013	4:07:36 PM	Helium valve closed
1/28/2013	4:07:36 PM	H2 valve closed
1/28/2013	4:07:37 PM	BCl3 valve closed
1/28/2013	4:07:37 PM	PH3 valve closed
1/28/2013	4:07:37 PM	SiCl4 pre valve closed
1/28/2013	4:07:37 PM	SiCl4 post valve closed
1/28/2013	4:07:37 PM	Bypass valve closed
1/28/2013	4:07:37 PM	Bubbler valve closed
1/28/2013	4:07:37 PM	Main Vac valve opened
1/28/2013	4:07:37 PM	Helium MFC set to  0.000000
1/28/2013	4:07:37 PM	H2 MFC set to  0.000000
1/28/2013	4:07:37 PM	BCl3 MFC set to  0.000000
1/28/2013	4:07:37 PM	PH3 MFC set to  0.000000
1/28/2013	4:07:37 PM	SiCl4 MFC set to  0.000000
1/28/2013	4:07:37 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	4:07:37 PM	Tube furnace set to 150
1/28/2013	4:07:38 PM	Run finished at 4:07 PM
1/28/2013	4:08:03 PM	Recipe started at 4:07 PM
1/28/2013	4:08:03 PM	Helium valve closed
1/28/2013	4:08:03 PM	BCl3 valve closed
1/28/2013	4:08:03 PM	PH3 valve closed
1/28/2013	4:08:03 PM	SiCl4 pre valve closed
1/28/2013	4:08:03 PM	SiCl4 post valve closed
1/28/2013	4:08:03 PM	Bypass valve closed
1/28/2013	4:08:03 PM	Bubbler valve closed
1/28/2013	4:08:03 PM	H2 valve opened
1/28/2013	4:08:03 PM	Main Vac valve opened
1/28/2013	4:08:03 PM	Helium MFC set to  0.000000
1/28/2013	4:08:03 PM	H2 MFC set to  0.000000
1/28/2013	4:08:03 PM	BCl3 MFC set to  0.000000
1/28/2013	4:08:03 PM	PH3 MFC set to  0.000000
1/28/2013	4:08:03 PM	SiCl4 MFC set to  0.000000
1/28/2013	4:08:03 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	4:08:03 PM	Tube furnace set to 150
1/28/2013	4:08:33 PM	H2 valve closed
1/28/2013	4:08:33 PM	BCl3 valve closed
1/28/2013	4:08:33 PM	PH3 valve closed
1/28/2013	4:08:33 PM	SiCl4 pre valve closed
1/28/2013	4:08:33 PM	SiCl4 post valve closed
1/28/2013	4:08:33 PM	Bypass valve closed
1/28/2013	4:08:33 PM	Bubbler valve closed
1/28/2013	4:08:33 PM	Helium valve opened
1/28/2013	4:08:33 PM	Main Vac valve opened
1/28/2013	4:08:33 PM	Helium MFC set to  20.000000
1/28/2013	4:08:33 PM	H2 MFC set to  0.000000
1/28/2013	4:08:33 PM	BCl3 MFC set to  0.000000
1/28/2013	4:08:33 PM	PH3 MFC set to  0.000000
1/28/2013	4:08:33 PM	SiCl4 MFC set to  0.000000
1/28/2013	4:08:33 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	4:08:33 PM	Tube furnace set to 150
1/28/2013	4:09:03 PM	Helium valve closed
1/28/2013	4:09:03 PM	H2 valve closed
1/28/2013	4:09:03 PM	BCl3 valve closed
1/28/2013	4:09:03 PM	PH3 valve closed
1/28/2013	4:09:03 PM	SiCl4 pre valve closed
1/28/2013	4:09:03 PM	SiCl4 post valve closed
1/28/2013	4:09:03 PM	Bypass valve closed
1/28/2013	4:09:03 PM	Bubbler valve closed
1/28/2013	4:09:03 PM	Main Vac valve opened
1/28/2013	4:09:03 PM	Helium MFC set to  0.000000
1/28/2013	4:09:03 PM	H2 MFC set to  0.000000
1/28/2013	4:09:03 PM	BCl3 MFC set to  0.000000
1/28/2013	4:09:03 PM	PH3 MFC set to  0.000000
1/28/2013	4:09:03 PM	SiCl4 MFC set to  0.000000
1/28/2013	4:09:03 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	4:09:04 PM	Tube furnace set to 150
1/28/2013	4:09:34 PM	H2 valve closed
1/28/2013	4:09:34 PM	BCl3 valve closed
1/28/2013	4:09:34 PM	PH3 valve closed
1/28/2013	4:09:34 PM	SiCl4 pre valve closed
1/28/2013	4:09:34 PM	SiCl4 post valve closed
1/28/2013	4:09:34 PM	Bypass valve closed
1/28/2013	4:09:34 PM	Bubbler valve closed
1/28/2013	4:09:34 PM	Helium valve opened
1/28/2013	4:09:34 PM	Main Vac valve opened
1/28/2013	4:09:34 PM	Helium MFC set to  20.000000
1/28/2013	4:09:34 PM	H2 MFC set to  0.000000
1/28/2013	4:09:34 PM	BCl3 MFC set to  0.000000
1/28/2013	4:09:34 PM	PH3 MFC set to  0.000000
1/28/2013	4:09:34 PM	SiCl4 MFC set to  0.000000
1/28/2013	4:09:34 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	4:09:34 PM	Tube furnace set to 150
1/28/2013	4:10:04 PM	Helium valve closed
1/28/2013	4:10:04 PM	H2 valve closed
1/28/2013	4:10:04 PM	BCl3 valve closed
1/28/2013	4:10:04 PM	PH3 valve closed
1/28/2013	4:10:04 PM	SiCl4 pre valve closed
1/28/2013	4:10:04 PM	SiCl4 post valve closed
1/28/2013	4:10:04 PM	Bypass valve closed
1/28/2013	4:10:04 PM	Bubbler valve closed
1/28/2013	4:10:04 PM	Main Vac valve opened
1/28/2013	4:10:04 PM	Helium MFC set to  0.000000
1/28/2013	4:10:04 PM	H2 MFC set to  0.000000
1/28/2013	4:10:04 PM	BCl3 MFC set to  0.000000
1/28/2013	4:10:04 PM	PH3 MFC set to  0.000000
1/28/2013	4:10:04 PM	SiCl4 MFC set to  0.000000
1/28/2013	4:10:04 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	4:10:04 PM	Tube furnace set to 150
1/28/2013	4:10:34 PM	H2 valve closed
1/28/2013	4:10:34 PM	BCl3 valve closed
1/28/2013	4:10:34 PM	PH3 valve closed
1/28/2013	4:10:34 PM	SiCl4 pre valve closed
1/28/2013	4:10:34 PM	SiCl4 post valve closed
1/28/2013	4:10:34 PM	Bypass valve closed
1/28/2013	4:10:34 PM	Bubbler valve closed
1/28/2013	4:10:34 PM	Helium valve opened
1/28/2013	4:10:34 PM	Main Vac valve opened
1/28/2013	4:10:34 PM	Helium MFC set to  20.000000
1/28/2013	4:10:34 PM	H2 MFC set to  0.000000
1/28/2013	4:10:34 PM	BCl3 MFC set to  0.000000
1/28/2013	4:10:34 PM	PH3 MFC set to  0.000000
1/28/2013	4:10:34 PM	SiCl4 MFC set to  0.000000
1/28/2013	4:10:34 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	4:10:34 PM	Tube furnace set to 150
1/28/2013	4:12:34 PM	Helium valve closed
1/28/2013	4:12:34 PM	H2 valve closed
1/28/2013	4:12:34 PM	BCl3 valve closed
1/28/2013	4:12:34 PM	PH3 valve closed
1/28/2013	4:12:34 PM	SiCl4 pre valve closed
1/28/2013	4:12:34 PM	SiCl4 post valve closed
1/28/2013	4:12:34 PM	Bypass valve closed
1/28/2013	4:12:34 PM	Bubbler valve closed
1/28/2013	4:12:34 PM	Main Vac valve opened
1/28/2013	4:12:34 PM	Helium MFC set to  0.000000
1/28/2013	4:12:34 PM	H2 MFC set to  0.000000
1/28/2013	4:12:34 PM	BCl3 MFC set to  0.000000
1/28/2013	4:12:34 PM	PH3 MFC set to  0.000000
1/28/2013	4:12:34 PM	SiCl4 MFC set to  0.000000
1/28/2013	4:12:34 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	4:12:35 PM	Tube furnace set to 150
1/28/2013	4:13:05 PM	H2 valve closed
1/28/2013	4:13:05 PM	BCl3 valve closed
1/28/2013	4:13:05 PM	PH3 valve closed
1/28/2013	4:13:05 PM	SiCl4 pre valve closed
1/28/2013	4:13:05 PM	SiCl4 post valve closed
1/28/2013	4:13:05 PM	Bypass valve closed
1/28/2013	4:13:05 PM	Bubbler valve closed
1/28/2013	4:13:05 PM	Helium valve opened
1/28/2013	4:13:05 PM	Main Vac valve opened
1/28/2013	4:13:05 PM	Helium MFC set to  20.000000
1/28/2013	4:13:05 PM	H2 MFC set to  0.000000
1/28/2013	4:13:05 PM	BCl3 MFC set to  0.000000
1/28/2013	4:13:05 PM	PH3 MFC set to  0.000000
1/28/2013	4:13:05 PM	SiCl4 MFC set to  0.000000
1/28/2013	4:13:05 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	4:13:05 PM	Tube furnace set to 150
1/28/2013	4:13:35 PM	Helium valve closed
1/28/2013	4:13:35 PM	H2 valve closed
1/28/2013	4:13:35 PM	BCl3 valve closed
1/28/2013	4:13:35 PM	PH3 valve closed
1/28/2013	4:13:35 PM	SiCl4 pre valve closed
1/28/2013	4:13:35 PM	SiCl4 post valve closed
1/28/2013	4:13:35 PM	Bypass valve closed
1/28/2013	4:13:35 PM	Bubbler valve closed
1/28/2013	4:13:35 PM	Main Vac valve opened
1/28/2013	4:13:35 PM	Helium MFC set to  0.000000
1/28/2013	4:13:35 PM	H2 MFC set to  0.000000
1/28/2013	4:13:35 PM	BCl3 MFC set to  0.000000
1/28/2013	4:13:35 PM	PH3 MFC set to  0.000000
1/28/2013	4:13:35 PM	SiCl4 MFC set to  0.000000
1/28/2013	4:13:35 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	4:13:35 PM	Tube furnace set to 150
1/28/2013	4:14:05 PM	H2 valve closed
1/28/2013	4:14:05 PM	BCl3 valve closed
1/28/2013	4:14:05 PM	PH3 valve closed
1/28/2013	4:14:05 PM	SiCl4 pre valve closed
1/28/2013	4:14:05 PM	SiCl4 post valve closed
1/28/2013	4:14:05 PM	Bypass valve closed
1/28/2013	4:14:05 PM	Bubbler valve closed
1/28/2013	4:14:05 PM	Helium valve opened
1/28/2013	4:14:05 PM	Main Vac valve opened
1/28/2013	4:14:05 PM	Helium MFC set to  20.000000
1/28/2013	4:14:05 PM	H2 MFC set to  0.000000
1/28/2013	4:14:05 PM	BCl3 MFC set to  0.000000
1/28/2013	4:14:05 PM	PH3 MFC set to  0.000000
1/28/2013	4:14:05 PM	SiCl4 MFC set to  0.000000
1/28/2013	4:14:05 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	4:14:05 PM	Tube furnace set to 150
1/28/2013	4:14:35 PM	Helium valve closed
1/28/2013	4:14:35 PM	H2 valve closed
1/28/2013	4:14:35 PM	BCl3 valve closed
1/28/2013	4:14:35 PM	PH3 valve closed
1/28/2013	4:14:35 PM	SiCl4 pre valve closed
1/28/2013	4:14:35 PM	SiCl4 post valve closed
1/28/2013	4:14:35 PM	Bypass valve closed
1/28/2013	4:14:35 PM	Bubbler valve closed
1/28/2013	4:14:35 PM	Main Vac valve opened
1/28/2013	4:14:35 PM	Helium MFC set to  0.000000
1/28/2013	4:14:35 PM	H2 MFC set to  0.000000
1/28/2013	4:14:35 PM	BCl3 MFC set to  0.000000
1/28/2013	4:14:35 PM	PH3 MFC set to  0.000000
1/28/2013	4:14:35 PM	SiCl4 MFC set to  0.000000
1/28/2013	4:14:35 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	4:14:36 PM	Tube furnace set to 150
1/28/2013	4:15:06 PM	H2 valve closed
1/28/2013	4:15:06 PM	BCl3 valve closed
1/28/2013	4:15:06 PM	PH3 valve closed
1/28/2013	4:15:06 PM	SiCl4 pre valve closed
1/28/2013	4:15:06 PM	SiCl4 post valve closed
1/28/2013	4:15:06 PM	Bypass valve closed
1/28/2013	4:15:06 PM	Bubbler valve closed
1/28/2013	4:15:06 PM	Helium valve opened
1/28/2013	4:15:06 PM	Main Vac valve opened
1/28/2013	4:15:06 PM	Helium MFC set to  20.000000
1/28/2013	4:15:06 PM	H2 MFC set to  0.000000
1/28/2013	4:15:06 PM	BCl3 MFC set to  0.000000
1/28/2013	4:15:06 PM	PH3 MFC set to  0.000000
1/28/2013	4:15:06 PM	SiCl4 MFC set to  0.000000
1/28/2013	4:15:06 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	4:15:06 PM	Tube furnace set to 150
1/28/2013	4:17:06 PM	Helium valve closed
1/28/2013	4:17:06 PM	H2 valve closed
1/28/2013	4:17:06 PM	BCl3 valve closed
1/28/2013	4:17:06 PM	PH3 valve closed
1/28/2013	4:17:06 PM	SiCl4 pre valve closed
1/28/2013	4:17:06 PM	SiCl4 post valve closed
1/28/2013	4:17:06 PM	Bypass valve closed
1/28/2013	4:17:06 PM	Bubbler valve closed
1/28/2013	4:17:06 PM	Main Vac valve opened
1/28/2013	4:17:06 PM	Helium MFC set to  0.000000
1/28/2013	4:17:06 PM	H2 MFC set to  0.000000
1/28/2013	4:17:06 PM	BCl3 MFC set to  0.000000
1/28/2013	4:17:06 PM	PH3 MFC set to  0.000000
1/28/2013	4:17:06 PM	SiCl4 MFC set to  0.000000
1/28/2013	4:17:06 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	4:17:06 PM	Tube furnace set to 150
1/28/2013	4:17:36 PM	H2 valve closed
1/28/2013	4:17:36 PM	BCl3 valve closed
1/28/2013	4:17:36 PM	PH3 valve closed
1/28/2013	4:17:36 PM	SiCl4 pre valve closed
1/28/2013	4:17:36 PM	SiCl4 post valve closed
1/28/2013	4:17:36 PM	Bypass valve closed
1/28/2013	4:17:36 PM	Bubbler valve closed
1/28/2013	4:17:36 PM	Helium valve opened
1/28/2013	4:17:36 PM	Main Vac valve opened
1/28/2013	4:17:36 PM	Helium MFC set to  20.000000
1/28/2013	4:17:36 PM	H2 MFC set to  0.000000
1/28/2013	4:17:36 PM	BCl3 MFC set to  0.000000
1/28/2013	4:17:36 PM	PH3 MFC set to  0.000000
1/28/2013	4:17:36 PM	SiCl4 MFC set to  0.000000
1/28/2013	4:17:36 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	4:17:36 PM	Tube furnace set to 150
1/28/2013	4:18:06 PM	Helium valve closed
1/28/2013	4:18:06 PM	H2 valve closed
1/28/2013	4:18:06 PM	BCl3 valve closed
1/28/2013	4:18:06 PM	PH3 valve closed
1/28/2013	4:18:06 PM	SiCl4 pre valve closed
1/28/2013	4:18:06 PM	SiCl4 post valve closed
1/28/2013	4:18:06 PM	Bypass valve closed
1/28/2013	4:18:06 PM	Bubbler valve closed
1/28/2013	4:18:06 PM	Main Vac valve opened
1/28/2013	4:18:06 PM	Helium MFC set to  0.000000
1/28/2013	4:18:06 PM	H2 MFC set to  0.000000
1/28/2013	4:18:06 PM	BCl3 MFC set to  0.000000
1/28/2013	4:18:06 PM	PH3 MFC set to  0.000000
1/28/2013	4:18:06 PM	SiCl4 MFC set to  0.000000
1/28/2013	4:18:06 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	4:18:07 PM	Tube furnace set to 150
1/28/2013	4:18:37 PM	H2 valve closed
1/28/2013	4:18:37 PM	BCl3 valve closed
1/28/2013	4:18:37 PM	PH3 valve closed
1/28/2013	4:18:37 PM	SiCl4 pre valve closed
1/28/2013	4:18:37 PM	SiCl4 post valve closed
1/28/2013	4:18:37 PM	Bypass valve closed
1/28/2013	4:18:37 PM	Bubbler valve closed
1/28/2013	4:18:37 PM	Helium valve opened
1/28/2013	4:18:37 PM	Main Vac valve opened
1/28/2013	4:18:37 PM	Helium MFC set to  20.000000
1/28/2013	4:18:37 PM	H2 MFC set to  0.000000
1/28/2013	4:18:37 PM	BCl3 MFC set to  0.000000
1/28/2013	4:18:37 PM	PH3 MFC set to  0.000000
1/28/2013	4:18:37 PM	SiCl4 MFC set to  0.000000
1/28/2013	4:18:37 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	4:18:37 PM	Tube furnace set to 150
1/28/2013	4:20:37 PM	Helium valve closed
1/28/2013	4:20:37 PM	H2 valve closed
1/28/2013	4:20:37 PM	BCl3 valve closed
1/28/2013	4:20:37 PM	PH3 valve closed
1/28/2013	4:20:37 PM	SiCl4 pre valve closed
1/28/2013	4:20:37 PM	SiCl4 post valve closed
1/28/2013	4:20:37 PM	Bypass valve closed
1/28/2013	4:20:37 PM	Bubbler valve closed
1/28/2013	4:20:37 PM	Main Vac valve opened
1/28/2013	4:20:37 PM	Helium MFC set to  0.000000
1/28/2013	4:20:37 PM	H2 MFC set to  0.000000
1/28/2013	4:20:37 PM	BCl3 MFC set to  0.000000
1/28/2013	4:20:37 PM	PH3 MFC set to  0.000000
1/28/2013	4:20:37 PM	SiCl4 MFC set to  0.000000
1/28/2013	4:20:37 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	4:20:37 PM	Tube furnace set to 150
1/28/2013	4:21:07 PM	H2 valve closed
1/28/2013	4:21:07 PM	BCl3 valve closed
1/28/2013	4:21:07 PM	PH3 valve closed
1/28/2013	4:21:07 PM	SiCl4 pre valve closed
1/28/2013	4:21:07 PM	SiCl4 post valve closed
1/28/2013	4:21:07 PM	Bypass valve closed
1/28/2013	4:21:07 PM	Bubbler valve closed
1/28/2013	4:21:07 PM	Helium valve opened
1/28/2013	4:21:07 PM	Main Vac valve opened
1/28/2013	4:21:07 PM	Helium MFC set to  20.000000
1/28/2013	4:21:07 PM	H2 MFC set to  0.000000
1/28/2013	4:21:07 PM	BCl3 MFC set to  0.000000
1/28/2013	4:21:07 PM	PH3 MFC set to  0.000000
1/28/2013	4:21:07 PM	SiCl4 MFC set to  0.000000
1/28/2013	4:21:07 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	4:21:07 PM	Tube furnace set to 150
1/28/2013	4:21:37 PM	Helium valve closed
1/28/2013	4:21:37 PM	H2 valve closed
1/28/2013	4:21:37 PM	BCl3 valve closed
1/28/2013	4:21:37 PM	PH3 valve closed
1/28/2013	4:21:37 PM	SiCl4 pre valve closed
1/28/2013	4:21:37 PM	SiCl4 post valve closed
1/28/2013	4:21:37 PM	Bypass valve closed
1/28/2013	4:21:37 PM	Bubbler valve closed
1/28/2013	4:21:37 PM	Main Vac valve opened
1/28/2013	4:21:37 PM	Helium MFC set to  0.000000
1/28/2013	4:21:37 PM	H2 MFC set to  0.000000
1/28/2013	4:21:37 PM	BCl3 MFC set to  0.000000
1/28/2013	4:21:37 PM	PH3 MFC set to  0.000000
1/28/2013	4:21:37 PM	SiCl4 MFC set to  0.000000
1/28/2013	4:21:37 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	4:21:38 PM	Tube furnace set to 150
1/28/2013	4:22:08 PM	H2 valve closed
1/28/2013	4:22:08 PM	BCl3 valve closed
1/28/2013	4:22:08 PM	PH3 valve closed
1/28/2013	4:22:08 PM	SiCl4 pre valve closed
1/28/2013	4:22:08 PM	SiCl4 post valve closed
1/28/2013	4:22:08 PM	Bypass valve closed
1/28/2013	4:22:08 PM	Bubbler valve closed
1/28/2013	4:22:08 PM	Helium valve opened
1/28/2013	4:22:08 PM	Main Vac valve opened
1/28/2013	4:22:08 PM	Helium MFC set to  20.000000
1/28/2013	4:22:08 PM	H2 MFC set to  0.000000
1/28/2013	4:22:08 PM	BCl3 MFC set to  0.000000
1/28/2013	4:22:08 PM	PH3 MFC set to  0.000000
1/28/2013	4:22:08 PM	SiCl4 MFC set to  0.000000
1/28/2013	4:22:08 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	4:22:08 PM	Tube furnace set to 150
1/28/2013	4:24:08 PM	Helium valve closed
1/28/2013	4:24:08 PM	H2 valve closed
1/28/2013	4:24:08 PM	BCl3 valve closed
1/28/2013	4:24:08 PM	PH3 valve closed
1/28/2013	4:24:08 PM	SiCl4 pre valve closed
1/28/2013	4:24:08 PM	SiCl4 post valve closed
1/28/2013	4:24:08 PM	Bypass valve closed
1/28/2013	4:24:08 PM	Bubbler valve closed
1/28/2013	4:24:08 PM	Main Vac valve opened
1/28/2013	4:24:08 PM	Helium MFC set to  0.000000
1/28/2013	4:24:08 PM	H2 MFC set to  0.000000
1/28/2013	4:24:08 PM	BCl3 MFC set to  0.000000
1/28/2013	4:24:08 PM	PH3 MFC set to  0.000000
1/28/2013	4:24:08 PM	SiCl4 MFC set to  0.000000
1/28/2013	4:24:08 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	4:24:08 PM	Tube furnace set to 150
1/28/2013	4:24:09 PM	Run finished at 4:24 PM
1/28/2013	4:24:48 PM	Recipe started at 4:24 PM
1/28/2013	4:24:48 PM	Helium valve closed
1/28/2013	4:24:48 PM	BCl3 valve closed
1/28/2013	4:24:48 PM	PH3 valve closed
1/28/2013	4:24:48 PM	SiCl4 pre valve closed
1/28/2013	4:24:48 PM	SiCl4 post valve closed
1/28/2013	4:24:48 PM	Bypass valve closed
1/28/2013	4:24:48 PM	Bubbler valve closed
1/28/2013	4:24:48 PM	H2 valve opened
1/28/2013	4:24:48 PM	Main Vac valve opened
1/28/2013	4:24:48 PM	Helium MFC set to  0.000000
1/28/2013	4:24:48 PM	H2 MFC set to  0.000000
1/28/2013	4:24:48 PM	BCl3 MFC set to  0.000000
1/28/2013	4:24:48 PM	PH3 MFC set to  0.000000
1/28/2013	4:24:48 PM	SiCl4 MFC set to  0.000000
1/28/2013	4:24:48 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	4:24:48 PM	Tube furnace set to 150
1/28/2013	4:25:18 PM	H2 valve closed
1/28/2013	4:25:18 PM	BCl3 valve closed
1/28/2013	4:25:18 PM	PH3 valve closed
1/28/2013	4:25:18 PM	SiCl4 pre valve closed
1/28/2013	4:25:18 PM	SiCl4 post valve closed
1/28/2013	4:25:18 PM	Bypass valve closed
1/28/2013	4:25:18 PM	Bubbler valve closed
1/28/2013	4:25:18 PM	Helium valve opened
1/28/2013	4:25:18 PM	Main Vac valve opened
1/28/2013	4:25:18 PM	Helium MFC set to  20.000000
1/28/2013	4:25:18 PM	H2 MFC set to  0.000000
1/28/2013	4:25:18 PM	BCl3 MFC set to  0.000000
1/28/2013	4:25:18 PM	PH3 MFC set to  0.000000
1/28/2013	4:25:18 PM	SiCl4 MFC set to  0.000000
1/28/2013	4:25:18 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	4:25:18 PM	Tube furnace set to 150
1/28/2013	4:25:48 PM	Helium valve closed
1/28/2013	4:25:48 PM	H2 valve closed
1/28/2013	4:25:48 PM	BCl3 valve closed
1/28/2013	4:25:48 PM	PH3 valve closed
1/28/2013	4:25:48 PM	SiCl4 pre valve closed
1/28/2013	4:25:48 PM	SiCl4 post valve closed
1/28/2013	4:25:48 PM	Bypass valve closed
1/28/2013	4:25:48 PM	Bubbler valve closed
1/28/2013	4:25:48 PM	Main Vac valve opened
1/28/2013	4:25:48 PM	Helium MFC set to  0.000000
1/28/2013	4:25:48 PM	H2 MFC set to  0.000000
1/28/2013	4:25:48 PM	BCl3 MFC set to  0.000000
1/28/2013	4:25:48 PM	PH3 MFC set to  0.000000
1/28/2013	4:25:48 PM	SiCl4 MFC set to  0.000000
1/28/2013	4:25:48 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	4:25:48 PM	Tube furnace set to 150
1/28/2013	4:26:18 PM	H2 valve closed
1/28/2013	4:26:18 PM	BCl3 valve closed
1/28/2013	4:26:18 PM	PH3 valve closed
1/28/2013	4:26:18 PM	SiCl4 pre valve closed
1/28/2013	4:26:18 PM	SiCl4 post valve closed
1/28/2013	4:26:18 PM	Bypass valve closed
1/28/2013	4:26:18 PM	Bubbler valve closed
1/28/2013	4:26:18 PM	Helium valve opened
1/28/2013	4:26:18 PM	Main Vac valve opened
1/28/2013	4:26:18 PM	Helium MFC set to  20.000000
1/28/2013	4:26:18 PM	H2 MFC set to  0.000000
1/28/2013	4:26:19 PM	BCl3 MFC set to  0.000000
1/28/2013	4:26:19 PM	PH3 MFC set to  0.000000
1/28/2013	4:26:19 PM	SiCl4 MFC set to  0.000000
1/28/2013	4:26:19 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	4:26:19 PM	Tube furnace set to 150
1/28/2013	4:26:49 PM	Helium valve closed
1/28/2013	4:26:49 PM	H2 valve closed
1/28/2013	4:26:49 PM	BCl3 valve closed
1/28/2013	4:26:49 PM	PH3 valve closed
1/28/2013	4:26:49 PM	SiCl4 pre valve closed
1/28/2013	4:26:49 PM	SiCl4 post valve closed
1/28/2013	4:26:49 PM	Bypass valve closed
1/28/2013	4:26:49 PM	Bubbler valve closed
1/28/2013	4:26:49 PM	Main Vac valve opened
1/28/2013	4:26:49 PM	Helium MFC set to  0.000000
1/28/2013	4:26:49 PM	H2 MFC set to  0.000000
1/28/2013	4:26:49 PM	BCl3 MFC set to  0.000000
1/28/2013	4:26:49 PM	PH3 MFC set to  0.000000
1/28/2013	4:26:49 PM	SiCl4 MFC set to  0.000000
1/28/2013	4:26:49 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	4:26:49 PM	Tube furnace set to 150
1/28/2013	4:27:19 PM	H2 valve closed
1/28/2013	4:27:19 PM	BCl3 valve closed
1/28/2013	4:27:19 PM	PH3 valve closed
1/28/2013	4:27:19 PM	SiCl4 pre valve closed
1/28/2013	4:27:19 PM	SiCl4 post valve closed
1/28/2013	4:27:19 PM	Bypass valve closed
1/28/2013	4:27:19 PM	Bubbler valve closed
1/28/2013	4:27:19 PM	Helium valve opened
1/28/2013	4:27:19 PM	Main Vac valve opened
1/28/2013	4:27:19 PM	Helium MFC set to  20.000000
1/28/2013	4:27:19 PM	H2 MFC set to  0.000000
1/28/2013	4:27:19 PM	BCl3 MFC set to  0.000000
1/28/2013	4:27:19 PM	PH3 MFC set to  0.000000
1/28/2013	4:27:19 PM	SiCl4 MFC set to  0.000000
1/28/2013	4:27:19 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	4:27:19 PM	Tube furnace set to 150
1/28/2013	4:29:19 PM	Helium valve closed
1/28/2013	4:29:19 PM	H2 valve closed
1/28/2013	4:29:19 PM	BCl3 valve closed
1/28/2013	4:29:19 PM	PH3 valve closed
1/28/2013	4:29:19 PM	SiCl4 pre valve closed
1/28/2013	4:29:19 PM	SiCl4 post valve closed
1/28/2013	4:29:19 PM	Bypass valve closed
1/28/2013	4:29:19 PM	Bubbler valve closed
1/28/2013	4:29:19 PM	Main Vac valve opened
1/28/2013	4:29:19 PM	Helium MFC set to  0.000000
1/28/2013	4:29:19 PM	H2 MFC set to  0.000000
1/28/2013	4:29:19 PM	BCl3 MFC set to  0.000000
1/28/2013	4:29:19 PM	PH3 MFC set to  0.000000
1/28/2013	4:29:19 PM	SiCl4 MFC set to  0.000000
1/28/2013	4:29:19 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	4:29:19 PM	Tube furnace set to 150
1/28/2013	4:29:49 PM	H2 valve closed
1/28/2013	4:29:49 PM	BCl3 valve closed
1/28/2013	4:29:49 PM	PH3 valve closed
1/28/2013	4:29:49 PM	SiCl4 pre valve closed
1/28/2013	4:29:49 PM	SiCl4 post valve closed
1/28/2013	4:29:49 PM	Bypass valve closed
1/28/2013	4:29:49 PM	Bubbler valve closed
1/28/2013	4:29:49 PM	Helium valve opened
1/28/2013	4:29:50 PM	Main Vac valve opened
1/28/2013	4:29:50 PM	Helium MFC set to  20.000000
1/28/2013	4:29:50 PM	H2 MFC set to  0.000000
1/28/2013	4:29:50 PM	BCl3 MFC set to  0.000000
1/28/2013	4:29:50 PM	PH3 MFC set to  0.000000
1/28/2013	4:29:50 PM	SiCl4 MFC set to  0.000000
1/28/2013	4:29:50 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	4:29:50 PM	Tube furnace set to 150
1/28/2013	4:30:20 PM	Helium valve closed
1/28/2013	4:30:20 PM	H2 valve closed
1/28/2013	4:30:20 PM	BCl3 valve closed
1/28/2013	4:30:20 PM	PH3 valve closed
1/28/2013	4:30:20 PM	SiCl4 pre valve closed
1/28/2013	4:30:20 PM	SiCl4 post valve closed
1/28/2013	4:30:20 PM	Bypass valve closed
1/28/2013	4:30:20 PM	Bubbler valve closed
1/28/2013	4:30:20 PM	Main Vac valve opened
1/28/2013	4:30:20 PM	Helium MFC set to  0.000000
1/28/2013	4:30:20 PM	H2 MFC set to  0.000000
1/28/2013	4:30:20 PM	BCl3 MFC set to  0.000000
1/28/2013	4:30:20 PM	PH3 MFC set to  0.000000
1/28/2013	4:30:20 PM	SiCl4 MFC set to  0.000000
1/28/2013	4:30:20 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	4:30:20 PM	Tube furnace set to 150
1/28/2013	4:30:50 PM	H2 valve closed
1/28/2013	4:30:50 PM	BCl3 valve closed
1/28/2013	4:30:50 PM	PH3 valve closed
1/28/2013	4:30:50 PM	SiCl4 pre valve closed
1/28/2013	4:30:50 PM	SiCl4 post valve closed
1/28/2013	4:30:50 PM	Bypass valve closed
1/28/2013	4:30:50 PM	Bubbler valve closed
1/28/2013	4:30:50 PM	Helium valve opened
1/28/2013	4:30:50 PM	Main Vac valve opened
1/28/2013	4:30:50 PM	Helium MFC set to  20.000000
1/28/2013	4:30:50 PM	H2 MFC set to  0.000000
1/28/2013	4:30:50 PM	BCl3 MFC set to  0.000000
1/28/2013	4:30:50 PM	PH3 MFC set to  0.000000
1/28/2013	4:30:50 PM	SiCl4 MFC set to  0.000000
1/28/2013	4:30:50 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	4:30:50 PM	Tube furnace set to 150
1/28/2013	4:31:20 PM	Helium valve closed
1/28/2013	4:31:20 PM	H2 valve closed
1/28/2013	4:31:20 PM	BCl3 valve closed
1/28/2013	4:31:20 PM	PH3 valve closed
1/28/2013	4:31:20 PM	SiCl4 pre valve closed
1/28/2013	4:31:20 PM	SiCl4 post valve closed
1/28/2013	4:31:20 PM	Bypass valve closed
1/28/2013	4:31:20 PM	Bubbler valve closed
1/28/2013	4:31:20 PM	Main Vac valve opened
1/28/2013	4:31:20 PM	Helium MFC set to  0.000000
1/28/2013	4:31:20 PM	H2 MFC set to  0.000000
1/28/2013	4:31:20 PM	BCl3 MFC set to  0.000000
1/28/2013	4:31:20 PM	PH3 MFC set to  0.000000
1/28/2013	4:31:20 PM	SiCl4 MFC set to  0.000000
1/28/2013	4:31:20 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	4:31:20 PM	Tube furnace set to 150
1/28/2013	4:31:50 PM	H2 valve closed
1/28/2013	4:31:50 PM	BCl3 valve closed
1/28/2013	4:31:50 PM	PH3 valve closed
1/28/2013	4:31:50 PM	SiCl4 pre valve closed
1/28/2013	4:31:50 PM	SiCl4 post valve closed
1/28/2013	4:31:50 PM	Bypass valve closed
1/28/2013	4:31:51 PM	Bubbler valve closed
1/28/2013	4:31:51 PM	Helium valve opened
1/28/2013	4:31:51 PM	Main Vac valve opened
1/28/2013	4:31:51 PM	Helium MFC set to  20.000000
1/28/2013	4:31:51 PM	H2 MFC set to  0.000000
1/28/2013	4:31:51 PM	BCl3 MFC set to  0.000000
1/28/2013	4:31:51 PM	PH3 MFC set to  0.000000
1/28/2013	4:31:51 PM	SiCl4 MFC set to  0.000000
1/28/2013	4:31:51 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	4:31:51 PM	Tube furnace set to 150
1/28/2013	4:33:51 PM	Helium valve closed
1/28/2013	4:33:51 PM	H2 valve closed
1/28/2013	4:33:51 PM	BCl3 valve closed
1/28/2013	4:33:51 PM	PH3 valve closed
1/28/2013	4:33:51 PM	SiCl4 pre valve closed
1/28/2013	4:33:51 PM	SiCl4 post valve closed
1/28/2013	4:33:51 PM	Bypass valve closed
1/28/2013	4:33:51 PM	Bubbler valve closed
1/28/2013	4:33:51 PM	Main Vac valve opened
1/28/2013	4:33:51 PM	Helium MFC set to  0.000000
1/28/2013	4:33:51 PM	H2 MFC set to  0.000000
1/28/2013	4:33:51 PM	BCl3 MFC set to  0.000000
1/28/2013	4:33:51 PM	PH3 MFC set to  0.000000
1/28/2013	4:33:51 PM	SiCl4 MFC set to  0.000000
1/28/2013	4:33:51 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	4:33:51 PM	Tube furnace set to 150
1/28/2013	4:34:09 PM	Run aborted at 4:34 PM
1/28/2013	4:34:09 PM	Helium valve closed
1/28/2013	4:34:09 PM	H2 valve closed
1/28/2013	4:34:09 PM	BCl3 valve closed
1/28/2013	4:34:09 PM	PH3 valve closed
1/28/2013	4:34:09 PM	SiCl4 pre valve closed
1/28/2013	4:34:09 PM	SiCl4 post valve closed
1/28/2013	4:34:09 PM	Bypass valve closed
1/28/2013	4:34:09 PM	Main Vac valve closed
1/28/2013	4:34:09 PM	Bubbler valve closed
1/28/2013	4:34:09 PM	Helium MFC set to  0.000000
1/28/2013	4:34:09 PM	H2 MFC set to  0.000000
1/28/2013	4:34:09 PM	BCl3 MFC set to  0.000000
1/28/2013	4:34:09 PM	PH3 MFC set to  0.000000
1/28/2013	4:34:09 PM	SiCl4 MFC set to  0.000000
1/28/2013	4:34:09 PM	Tube furnace set to 0
1/28/2013	4:34:16 PM	Main Vac valve opened
1/28/2013	4:34:54 PM	Recipe started at 4:34 PM
1/28/2013	4:34:54 PM	Helium valve closed
1/28/2013	4:34:54 PM	H2 valve closed
1/28/2013	4:34:54 PM	BCl3 valve closed
1/28/2013	4:34:54 PM	PH3 valve closed
1/28/2013	4:34:54 PM	SiCl4 pre valve closed
1/28/2013	4:34:54 PM	SiCl4 post valve closed
1/28/2013	4:34:54 PM	Main Vac valve closed
1/28/2013	4:34:54 PM	Bypass valve closed
1/28/2013	4:34:54 PM	Bubbler valve closed
1/28/2013	4:34:54 PM	Helium MFC set to  0.000000
1/28/2013	4:34:54 PM	H2 MFC set to  0.000000
1/28/2013	4:34:54 PM	BCl3 MFC set to  0.000000
1/28/2013	4:34:54 PM	PH3 MFC set to  0.000000
1/28/2013	4:34:54 PM	SiCl4 MFC set to  0.000000
1/28/2013	4:34:54 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	4:34:54 PM	Tube furnace set to 0
1/28/2013	4:34:57 PM	Helium valve closed
1/28/2013	4:34:57 PM	BCl3 valve closed
1/28/2013	4:34:57 PM	PH3 valve closed
1/28/2013	4:34:57 PM	SiCl4 pre valve closed
1/28/2013	4:34:57 PM	SiCl4 post valve closed
1/28/2013	4:34:57 PM	Main Vac valve closed
1/28/2013	4:34:57 PM	Bypass valve closed
1/28/2013	4:34:57 PM	Bubbler valve closed
1/28/2013	4:34:57 PM	H2 valve opened
1/28/2013	4:34:57 PM	Helium MFC set to  0.000000
1/28/2013	4:34:57 PM	H2 MFC set to  500.000000
1/28/2013	4:34:57 PM	BCl3 MFC set to  0.000000
1/28/2013	4:34:57 PM	PH3 MFC set to  0.000000
1/28/2013	4:34:57 PM	SiCl4 MFC set to  0.000000
1/28/2013	4:34:57 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	4:34:58 PM	Tube furnace set to 0
1/28/2013	4:36:08 PM	Helium valve closed
1/28/2013	4:36:08 PM	BCl3 valve closed
1/28/2013	4:36:08 PM	PH3 valve closed
1/28/2013	4:36:08 PM	SiCl4 pre valve closed
1/28/2013	4:36:08 PM	SiCl4 post valve closed
1/28/2013	4:36:08 PM	Main Vac valve closed
1/28/2013	4:36:08 PM	Bypass valve closed
1/28/2013	4:36:08 PM	H2 valve opened
1/28/2013	4:36:08 PM	Bubbler valve opened
1/28/2013	4:36:08 PM	Helium MFC set to  0.000000
1/28/2013	4:36:08 PM	H2 MFC set to  500.000000
1/28/2013	4:36:08 PM	BCl3 MFC set to  0.000000
1/28/2013	4:36:08 PM	PH3 MFC set to  0.000000
1/28/2013	4:36:08 PM	SiCl4 MFC set to  0.000000
1/28/2013	4:36:08 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	4:36:08 PM	Tube furnace set to 0
1/28/2013	4:36:09 PM	Helium valve closed
1/28/2013	4:36:09 PM	BCl3 valve closed
1/28/2013	4:36:09 PM	PH3 valve closed
1/28/2013	4:36:09 PM	SiCl4 pre valve closed
1/28/2013	4:36:09 PM	SiCl4 post valve closed
1/28/2013	4:36:09 PM	Main Vac valve closed
1/28/2013	4:36:09 PM	Bypass valve closed
1/28/2013	4:36:09 PM	H2 valve opened
1/28/2013	4:36:09 PM	Bubbler valve opened
1/28/2013	4:36:09 PM	Helium MFC set to  0.000000
1/28/2013	4:36:09 PM	H2 MFC set to  500.000000
1/28/2013	4:36:09 PM	BCl3 MFC set to  0.000000
1/28/2013	4:36:09 PM	PH3 MFC set to  0.000000
1/28/2013	4:36:09 PM	SiCl4 MFC set to  0.000000
1/28/2013	4:36:09 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	4:36:09 PM	Tube furnace set to 1000
1/28/2013	4:56:09 PM	Helium valve closed
1/28/2013	4:56:09 PM	BCl3 valve closed
1/28/2013	4:56:09 PM	PH3 valve closed
1/28/2013	4:56:09 PM	Main Vac valve closed
1/28/2013	4:56:09 PM	Bypass valve closed
1/28/2013	4:56:09 PM	H2 valve opened
1/28/2013	4:56:09 PM	SiCl4 pre valve opened
1/28/2013	4:56:09 PM	SiCl4 post valve opened
1/28/2013	4:56:09 PM	Bubbler valve opened
1/28/2013	4:56:09 PM	Helium MFC set to  0.000000
1/28/2013	4:56:09 PM	H2 MFC set to  500.000000
1/28/2013	4:56:09 PM	BCl3 MFC set to  0.000000
1/28/2013	4:56:09 PM	PH3 MFC set to  0.000000
1/28/2013	4:56:09 PM	SiCl4 MFC set to  50.000000
1/28/2013	4:56:09 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	4:56:09 PM	Tube furnace set to 1000
1/28/2013	5:11:09 PM	Helium valve closed
1/28/2013	5:11:09 PM	BCl3 valve closed
1/28/2013	5:11:09 PM	PH3 valve closed
1/28/2013	5:11:09 PM	SiCl4 pre valve closed
1/28/2013	5:11:09 PM	SiCl4 post valve closed
1/28/2013	5:11:09 PM	Main Vac valve closed
1/28/2013	5:11:09 PM	Bypass valve closed
1/28/2013	5:11:09 PM	H2 valve opened
1/28/2013	5:11:09 PM	Bubbler valve opened
1/28/2013	5:11:09 PM	Helium MFC set to  0.000000
1/28/2013	5:11:09 PM	H2 MFC set to  500.000000
1/28/2013	5:11:09 PM	BCl3 MFC set to  0.000000
1/28/2013	5:11:09 PM	PH3 MFC set to  0.000000
1/28/2013	5:11:09 PM	SiCl4 MFC set to  0.000000
1/28/2013	5:11:09 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	5:11:10 PM	Tube furnace set to 750
1/28/2013	5:16:10 PM	H2 valve closed
1/28/2013	5:16:10 PM	BCl3 valve closed
1/28/2013	5:16:10 PM	PH3 valve closed
1/28/2013	5:16:10 PM	SiCl4 pre valve closed
1/28/2013	5:16:10 PM	SiCl4 post valve closed
1/28/2013	5:16:10 PM	Main Vac valve closed
1/28/2013	5:16:10 PM	Bypass valve closed
1/28/2013	5:16:10 PM	Helium valve opened
1/28/2013	5:16:10 PM	Bubbler valve opened
1/28/2013	5:16:10 PM	Helium MFC set to  500.000000
1/28/2013	5:16:10 PM	H2 MFC set to  0.000000
1/28/2013	5:16:10 PM	BCl3 MFC set to  0.000000
1/28/2013	5:16:10 PM	PH3 MFC set to  0.000000
1/28/2013	5:16:10 PM	SiCl4 MFC set to  0.000000
1/28/2013	5:16:10 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	5:16:10 PM	Tube furnace set to 0
1/28/2013	5:36:10 PM	Helium valve closed
1/28/2013	5:36:10 PM	H2 valve closed
1/28/2013	5:36:10 PM	BCl3 valve closed
1/28/2013	5:36:10 PM	PH3 valve closed
1/28/2013	5:36:10 PM	SiCl4 pre valve closed
1/28/2013	5:36:10 PM	SiCl4 post valve closed
1/28/2013	5:36:10 PM	Main Vac valve closed
1/28/2013	5:36:10 PM	Bypass valve closed
1/28/2013	5:36:10 PM	Bubbler valve closed
1/28/2013	5:36:10 PM	Helium MFC set to  0.000000
1/28/2013	5:36:10 PM	H2 MFC set to  0.000000
1/28/2013	5:36:10 PM	BCl3 MFC set to  0.000000
1/28/2013	5:36:10 PM	PH3 MFC set to  0.000000
1/28/2013	5:36:10 PM	SiCl4 MFC set to  0.000000
1/28/2013	5:36:10 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	5:36:10 PM	Tube furnace set to 0
1/28/2013	5:36:11 PM	Run finished at 5:36 PM
1/28/2013	6:31:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/28/2013	6:31:34 PM	Recipe started at 6:31 PM
1/28/2013	6:31:34 PM	Helium valve closed
1/28/2013	6:31:34 PM	H2 valve closed
1/28/2013	6:31:34 PM	BCl3 valve closed
1/28/2013	6:31:34 PM	PH3 valve closed
1/28/2013	6:31:34 PM	SiCl4 pre valve closed
1/28/2013	6:31:34 PM	SiCl4 post valve closed
1/28/2013	6:31:34 PM	Main Vac valve closed
1/28/2013	6:31:34 PM	Bypass valve closed
1/28/2013	6:31:34 PM	Bubbler valve closed
1/28/2013	6:31:34 PM	Helium MFC set to  0.000000
1/28/2013	6:31:34 PM	H2 MFC set to  0.000000
1/28/2013	6:31:34 PM	BCl3 MFC set to  0.000000
1/28/2013	6:31:34 PM	PH3 MFC set to  0.000000
1/28/2013	6:31:34 PM	SiCl4 MFC set to  0.000000
1/28/2013	6:31:34 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	6:31:34 PM	Tube furnace set to 0
1/28/2013	6:31:37 PM	H2 valve closed
1/28/2013	6:31:37 PM	BCl3 valve closed
1/28/2013	6:31:37 PM	PH3 valve closed
1/28/2013	6:31:37 PM	SiCl4 pre valve closed
1/28/2013	6:31:37 PM	SiCl4 post valve closed
1/28/2013	6:31:37 PM	Main Vac valve closed
1/28/2013	6:31:37 PM	Bypass valve closed
1/28/2013	6:31:37 PM	Bubbler valve closed
1/28/2013	6:31:37 PM	Helium valve opened
1/28/2013	6:31:37 PM	Helium MFC set to  500.000000
1/28/2013	6:31:37 PM	H2 MFC set to  0.000000
1/28/2013	6:31:37 PM	BCl3 MFC set to  0.000000
1/28/2013	6:31:37 PM	PH3 MFC set to  0.000000
1/28/2013	6:31:37 PM	SiCl4 MFC set to  0.000000
1/28/2013	6:31:37 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	6:31:37 PM	Tube furnace set to 0
1/28/2013	6:31:39 PM	Helium valve closed
1/28/2013	6:31:39 PM	H2 valve closed
1/28/2013	6:31:39 PM	BCl3 valve closed
1/28/2013	6:31:39 PM	PH3 valve closed
1/28/2013	6:31:39 PM	SiCl4 pre valve closed
1/28/2013	6:31:39 PM	SiCl4 post valve closed
1/28/2013	6:31:39 PM	Main Vac valve closed
1/28/2013	6:31:39 PM	Bypass valve closed
1/28/2013	6:31:39 PM	Bubbler valve closed
1/28/2013	6:31:39 PM	Helium MFC set to  0.000000
1/28/2013	6:31:39 PM	H2 MFC set to  0.000000
1/28/2013	6:31:39 PM	BCl3 MFC set to  0.000000
1/28/2013	6:31:39 PM	PH3 MFC set to  0.000000
1/28/2013	6:31:39 PM	SiCl4 MFC set to  0.000000
1/28/2013	6:31:39 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	6:31:39 PM	Tube furnace set to 0
1/28/2013	6:31:40 PM	Run finished at 6:31 PM
1/28/2013	6:31:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/28/2013	6:33:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/28/2013	6:33:30 PM	Recipe started at 6:33 PM
1/28/2013	6:33:30 PM	Helium valve closed
1/28/2013	6:33:30 PM	H2 valve closed
1/28/2013	6:33:30 PM	BCl3 valve closed
1/28/2013	6:33:30 PM	PH3 valve closed
1/28/2013	6:33:30 PM	SiCl4 pre valve closed
1/28/2013	6:33:30 PM	SiCl4 post valve closed
1/28/2013	6:33:30 PM	Main Vac valve closed
1/28/2013	6:33:30 PM	Bubbler valve closed
1/28/2013	6:33:30 PM	Bypass valve opened
1/28/2013	6:33:30 PM	Helium MFC set to  0.000000
1/28/2013	6:33:30 PM	H2 MFC set to  0.000000
1/28/2013	6:33:30 PM	BCl3 MFC set to  0.000000
1/28/2013	6:33:30 PM	PH3 MFC set to  0.000000
1/28/2013	6:33:30 PM	SiCl4 MFC set to  0.000000
1/28/2013	6:33:30 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	6:33:31 PM	Tube furnace set to 0
1/28/2013	6:34:33 PM	Helium valve closed
1/28/2013	6:34:33 PM	H2 valve closed
1/28/2013	6:34:33 PM	BCl3 valve closed
1/28/2013	6:34:33 PM	PH3 valve closed
1/28/2013	6:34:33 PM	SiCl4 pre valve closed
1/28/2013	6:34:33 PM	SiCl4 post valve closed
1/28/2013	6:34:33 PM	Main Vac valve closed
1/28/2013	6:34:33 PM	Bubbler valve closed
1/28/2013	6:34:33 PM	Bypass valve opened
1/28/2013	6:34:33 PM	Helium MFC set to  0.000000
1/28/2013	6:34:33 PM	H2 MFC set to  0.000000
1/28/2013	6:34:33 PM	BCl3 MFC set to  0.000000
1/28/2013	6:34:33 PM	PH3 MFC set to  0.000000
1/28/2013	6:34:33 PM	SiCl4 MFC set to  0.000000
1/28/2013	6:34:33 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	6:34:34 PM	Tube furnace set to 0
1/28/2013	6:35:34 PM	Helium valve closed
1/28/2013	6:35:34 PM	H2 valve closed
1/28/2013	6:35:34 PM	BCl3 valve closed
1/28/2013	6:35:34 PM	PH3 valve closed
1/28/2013	6:35:34 PM	SiCl4 pre valve closed
1/28/2013	6:35:34 PM	SiCl4 post valve closed
1/28/2013	6:35:34 PM	Bypass valve closed
1/28/2013	6:35:34 PM	Bubbler valve closed
1/28/2013	6:35:34 PM	Main Vac valve opened
1/28/2013	6:35:34 PM	Helium MFC set to  0.000000
1/28/2013	6:35:34 PM	H2 MFC set to  0.000000
1/28/2013	6:35:34 PM	BCl3 MFC set to  0.000000
1/28/2013	6:35:34 PM	PH3 MFC set to  0.000000
1/28/2013	6:35:34 PM	SiCl4 MFC set to  0.000000
1/28/2013	6:35:34 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	6:35:34 PM	Tube furnace set to 0
1/28/2013	6:35:35 PM	Run finished at 6:35 PM
1/28/2013	6:35:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/28/2013	6:36:20 PM	Recipe started at 6:36 PM
1/28/2013	6:36:20 PM	Helium valve closed
1/28/2013	6:36:20 PM	BCl3 valve closed
1/28/2013	6:36:20 PM	PH3 valve closed
1/28/2013	6:36:20 PM	SiCl4 pre valve closed
1/28/2013	6:36:20 PM	SiCl4 post valve closed
1/28/2013	6:36:20 PM	Bypass valve closed
1/28/2013	6:36:20 PM	Bubbler valve closed
1/28/2013	6:36:20 PM	H2 valve opened
1/28/2013	6:36:20 PM	Main Vac valve opened
1/28/2013	6:36:20 PM	Helium MFC set to  0.000000
1/28/2013	6:36:20 PM	H2 MFC set to  0.000000
1/28/2013	6:36:20 PM	BCl3 MFC set to  0.000000
1/28/2013	6:36:20 PM	PH3 MFC set to  0.000000
1/28/2013	6:36:20 PM	SiCl4 MFC set to  0.000000
1/28/2013	6:36:20 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	6:36:20 PM	Tube furnace set to 150
1/28/2013	6:36:50 PM	H2 valve closed
1/28/2013	6:36:50 PM	BCl3 valve closed
1/28/2013	6:36:50 PM	PH3 valve closed
1/28/2013	6:36:50 PM	SiCl4 pre valve closed
1/28/2013	6:36:50 PM	SiCl4 post valve closed
1/28/2013	6:36:50 PM	Bypass valve closed
1/28/2013	6:36:50 PM	Bubbler valve closed
1/28/2013	6:36:50 PM	Helium valve opened
1/28/2013	6:36:50 PM	Main Vac valve opened
1/28/2013	6:36:50 PM	Helium MFC set to  20.000000
1/28/2013	6:36:50 PM	H2 MFC set to  0.000000
1/28/2013	6:36:50 PM	BCl3 MFC set to  0.000000
1/28/2013	6:36:50 PM	PH3 MFC set to  0.000000
1/28/2013	6:36:50 PM	SiCl4 MFC set to  0.000000
1/28/2013	6:36:50 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	6:36:50 PM	Tube furnace set to 150
1/28/2013	6:37:20 PM	Helium valve closed
1/28/2013	6:37:20 PM	H2 valve closed
1/28/2013	6:37:20 PM	BCl3 valve closed
1/28/2013	6:37:20 PM	PH3 valve closed
1/28/2013	6:37:20 PM	SiCl4 pre valve closed
1/28/2013	6:37:20 PM	SiCl4 post valve closed
1/28/2013	6:37:20 PM	Bypass valve closed
1/28/2013	6:37:20 PM	Bubbler valve closed
1/28/2013	6:37:20 PM	Main Vac valve opened
1/28/2013	6:37:20 PM	Helium MFC set to  0.000000
1/28/2013	6:37:20 PM	H2 MFC set to  0.000000
1/28/2013	6:37:20 PM	BCl3 MFC set to  0.000000
1/28/2013	6:37:20 PM	PH3 MFC set to  0.000000
1/28/2013	6:37:20 PM	SiCl4 MFC set to  0.000000
1/28/2013	6:37:20 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	6:37:20 PM	Tube furnace set to 150
1/28/2013	6:37:50 PM	H2 valve closed
1/28/2013	6:37:50 PM	BCl3 valve closed
1/28/2013	6:37:50 PM	PH3 valve closed
1/28/2013	6:37:50 PM	SiCl4 pre valve closed
1/28/2013	6:37:50 PM	SiCl4 post valve closed
1/28/2013	6:37:51 PM	Bypass valve closed
1/28/2013	6:37:51 PM	Bubbler valve closed
1/28/2013	6:37:51 PM	Helium valve opened
1/28/2013	6:37:51 PM	Main Vac valve opened
1/28/2013	6:37:51 PM	Helium MFC set to  20.000000
1/28/2013	6:37:51 PM	H2 MFC set to  0.000000
1/28/2013	6:37:51 PM	BCl3 MFC set to  0.000000
1/28/2013	6:37:51 PM	PH3 MFC set to  0.000000
1/28/2013	6:37:51 PM	SiCl4 MFC set to  0.000000
1/28/2013	6:37:51 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	6:37:51 PM	Tube furnace set to 150
1/28/2013	6:38:21 PM	Helium valve closed
1/28/2013	6:38:21 PM	H2 valve closed
1/28/2013	6:38:21 PM	BCl3 valve closed
1/28/2013	6:38:21 PM	PH3 valve closed
1/28/2013	6:38:21 PM	SiCl4 pre valve closed
1/28/2013	6:38:21 PM	SiCl4 post valve closed
1/28/2013	6:38:21 PM	Bypass valve closed
1/28/2013	6:38:21 PM	Bubbler valve closed
1/28/2013	6:38:21 PM	Main Vac valve opened
1/28/2013	6:38:21 PM	Helium MFC set to  0.000000
1/28/2013	6:38:21 PM	H2 MFC set to  0.000000
1/28/2013	6:38:21 PM	BCl3 MFC set to  0.000000
1/28/2013	6:38:21 PM	PH3 MFC set to  0.000000
1/28/2013	6:38:21 PM	SiCl4 MFC set to  0.000000
1/28/2013	6:38:21 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	6:38:21 PM	Tube furnace set to 150
1/28/2013	6:38:51 PM	H2 valve closed
1/28/2013	6:38:51 PM	BCl3 valve closed
1/28/2013	6:38:51 PM	PH3 valve closed
1/28/2013	6:38:51 PM	SiCl4 pre valve closed
1/28/2013	6:38:51 PM	SiCl4 post valve closed
1/28/2013	6:38:51 PM	Bypass valve closed
1/28/2013	6:38:51 PM	Bubbler valve closed
1/28/2013	6:38:51 PM	Helium valve opened
1/28/2013	6:38:51 PM	Main Vac valve opened
1/28/2013	6:38:51 PM	Helium MFC set to  20.000000
1/28/2013	6:38:51 PM	H2 MFC set to  0.000000
1/28/2013	6:38:51 PM	BCl3 MFC set to  0.000000
1/28/2013	6:38:51 PM	PH3 MFC set to  0.000000
1/28/2013	6:38:51 PM	SiCl4 MFC set to  0.000000
1/28/2013	6:38:51 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	6:38:51 PM	Tube furnace set to 150
1/28/2013	6:40:51 PM	Helium valve closed
1/28/2013	6:40:51 PM	H2 valve closed
1/28/2013	6:40:51 PM	BCl3 valve closed
1/28/2013	6:40:51 PM	PH3 valve closed
1/28/2013	6:40:51 PM	SiCl4 pre valve closed
1/28/2013	6:40:51 PM	SiCl4 post valve closed
1/28/2013	6:40:51 PM	Bypass valve closed
1/28/2013	6:40:51 PM	Bubbler valve closed
1/28/2013	6:40:51 PM	Main Vac valve opened
1/28/2013	6:40:51 PM	Helium MFC set to  0.000000
1/28/2013	6:40:51 PM	H2 MFC set to  0.000000
1/28/2013	6:40:51 PM	BCl3 MFC set to  0.000000
1/28/2013	6:40:51 PM	PH3 MFC set to  0.000000
1/28/2013	6:40:51 PM	SiCl4 MFC set to  0.000000
1/28/2013	6:40:51 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	6:40:51 PM	Tube furnace set to 150
1/28/2013	6:41:21 PM	H2 valve closed
1/28/2013	6:41:21 PM	BCl3 valve closed
1/28/2013	6:41:21 PM	PH3 valve closed
1/28/2013	6:41:22 PM	SiCl4 pre valve closed
1/28/2013	6:41:22 PM	SiCl4 post valve closed
1/28/2013	6:41:22 PM	Bypass valve closed
1/28/2013	6:41:22 PM	Bubbler valve closed
1/28/2013	6:41:22 PM	Helium valve opened
1/28/2013	6:41:22 PM	Main Vac valve opened
1/28/2013	6:41:22 PM	Helium MFC set to  20.000000
1/28/2013	6:41:22 PM	H2 MFC set to  0.000000
1/28/2013	6:41:22 PM	BCl3 MFC set to  0.000000
1/28/2013	6:41:22 PM	PH3 MFC set to  0.000000
1/28/2013	6:41:22 PM	SiCl4 MFC set to  0.000000
1/28/2013	6:41:22 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	6:41:22 PM	Tube furnace set to 150
1/28/2013	6:41:52 PM	Helium valve closed
1/28/2013	6:41:52 PM	H2 valve closed
1/28/2013	6:41:52 PM	BCl3 valve closed
1/28/2013	6:41:52 PM	PH3 valve closed
1/28/2013	6:41:52 PM	SiCl4 pre valve closed
1/28/2013	6:41:52 PM	SiCl4 post valve closed
1/28/2013	6:41:52 PM	Bypass valve closed
1/28/2013	6:41:52 PM	Bubbler valve closed
1/28/2013	6:41:52 PM	Main Vac valve opened
1/28/2013	6:41:52 PM	Helium MFC set to  0.000000
1/28/2013	6:41:52 PM	H2 MFC set to  0.000000
1/28/2013	6:41:52 PM	BCl3 MFC set to  0.000000
1/28/2013	6:41:52 PM	PH3 MFC set to  0.000000
1/28/2013	6:41:52 PM	SiCl4 MFC set to  0.000000
1/28/2013	6:41:52 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	6:41:52 PM	Tube furnace set to 150
1/28/2013	6:42:22 PM	H2 valve closed
1/28/2013	6:42:22 PM	BCl3 valve closed
1/28/2013	6:42:22 PM	PH3 valve closed
1/28/2013	6:42:22 PM	SiCl4 pre valve closed
1/28/2013	6:42:22 PM	SiCl4 post valve closed
1/28/2013	6:42:22 PM	Bypass valve closed
1/28/2013	6:42:22 PM	Bubbler valve closed
1/28/2013	6:42:22 PM	Helium valve opened
1/28/2013	6:42:22 PM	Main Vac valve opened
1/28/2013	6:42:22 PM	Helium MFC set to  20.000000
1/28/2013	6:42:22 PM	H2 MFC set to  0.000000
1/28/2013	6:42:22 PM	BCl3 MFC set to  0.000000
1/28/2013	6:42:22 PM	PH3 MFC set to  0.000000
1/28/2013	6:42:22 PM	SiCl4 MFC set to  0.000000
1/28/2013	6:42:22 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	6:42:22 PM	Tube furnace set to 150
1/28/2013	6:42:52 PM	Helium valve closed
1/28/2013	6:42:52 PM	H2 valve closed
1/28/2013	6:42:52 PM	BCl3 valve closed
1/28/2013	6:42:52 PM	PH3 valve closed
1/28/2013	6:42:52 PM	SiCl4 pre valve closed
1/28/2013	6:42:52 PM	SiCl4 post valve closed
1/28/2013	6:42:52 PM	Bypass valve closed
1/28/2013	6:42:52 PM	Bubbler valve closed
1/28/2013	6:42:52 PM	Main Vac valve opened
1/28/2013	6:42:52 PM	Helium MFC set to  0.000000
1/28/2013	6:42:52 PM	H2 MFC set to  0.000000
1/28/2013	6:42:52 PM	BCl3 MFC set to  0.000000
1/28/2013	6:42:52 PM	PH3 MFC set to  0.000000
1/28/2013	6:42:52 PM	SiCl4 MFC set to  0.000000
1/28/2013	6:42:52 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	6:42:52 PM	Tube furnace set to 150
1/28/2013	6:43:23 PM	H2 valve closed
1/28/2013	6:43:23 PM	BCl3 valve closed
1/28/2013	6:43:23 PM	PH3 valve closed
1/28/2013	6:43:23 PM	SiCl4 pre valve closed
1/28/2013	6:43:23 PM	SiCl4 post valve closed
1/28/2013	6:43:23 PM	Bypass valve closed
1/28/2013	6:43:23 PM	Bubbler valve closed
1/28/2013	6:43:23 PM	Helium valve opened
1/28/2013	6:43:23 PM	Main Vac valve opened
1/28/2013	6:43:23 PM	Helium MFC set to  20.000000
1/28/2013	6:43:23 PM	H2 MFC set to  0.000000
1/28/2013	6:43:23 PM	BCl3 MFC set to  0.000000
1/28/2013	6:43:23 PM	PH3 MFC set to  0.000000
1/28/2013	6:43:23 PM	SiCl4 MFC set to  0.000000
1/28/2013	6:43:23 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	6:43:23 PM	Tube furnace set to 150
1/28/2013	6:45:23 PM	Helium valve closed
1/28/2013	6:45:23 PM	H2 valve closed
1/28/2013	6:45:23 PM	BCl3 valve closed
1/28/2013	6:45:23 PM	PH3 valve closed
1/28/2013	6:45:23 PM	SiCl4 pre valve closed
1/28/2013	6:45:23 PM	SiCl4 post valve closed
1/28/2013	6:45:23 PM	Bypass valve closed
1/28/2013	6:45:23 PM	Bubbler valve closed
1/28/2013	6:45:23 PM	Main Vac valve opened
1/28/2013	6:45:23 PM	Helium MFC set to  0.000000
1/28/2013	6:45:23 PM	H2 MFC set to  0.000000
1/28/2013	6:45:23 PM	BCl3 MFC set to  0.000000
1/28/2013	6:45:23 PM	PH3 MFC set to  0.000000
1/28/2013	6:45:23 PM	SiCl4 MFC set to  0.000000
1/28/2013	6:45:23 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	6:45:23 PM	Tube furnace set to 150
1/28/2013	6:45:53 PM	H2 valve closed
1/28/2013	6:45:53 PM	BCl3 valve closed
1/28/2013	6:45:53 PM	PH3 valve closed
1/28/2013	6:45:53 PM	SiCl4 pre valve closed
1/28/2013	6:45:53 PM	SiCl4 post valve closed
1/28/2013	6:45:53 PM	Bypass valve closed
1/28/2013	6:45:53 PM	Bubbler valve closed
1/28/2013	6:45:53 PM	Helium valve opened
1/28/2013	6:45:53 PM	Main Vac valve opened
1/28/2013	6:45:53 PM	Helium MFC set to  20.000000
1/28/2013	6:45:53 PM	H2 MFC set to  0.000000
1/28/2013	6:45:53 PM	BCl3 MFC set to  0.000000
1/28/2013	6:45:53 PM	PH3 MFC set to  0.000000
1/28/2013	6:45:53 PM	SiCl4 MFC set to  0.000000
1/28/2013	6:45:53 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	6:45:53 PM	Tube furnace set to 150
1/28/2013	6:46:23 PM	Helium valve closed
1/28/2013	6:46:23 PM	H2 valve closed
1/28/2013	6:46:23 PM	BCl3 valve closed
1/28/2013	6:46:23 PM	PH3 valve closed
1/28/2013	6:46:23 PM	SiCl4 pre valve closed
1/28/2013	6:46:23 PM	SiCl4 post valve closed
1/28/2013	6:46:23 PM	Bypass valve closed
1/28/2013	6:46:23 PM	Bubbler valve closed
1/28/2013	6:46:23 PM	Main Vac valve opened
1/28/2013	6:46:23 PM	Helium MFC set to  0.000000
1/28/2013	6:46:23 PM	H2 MFC set to  0.000000
1/28/2013	6:46:23 PM	BCl3 MFC set to  0.000000
1/28/2013	6:46:23 PM	PH3 MFC set to  0.000000
1/28/2013	6:46:23 PM	SiCl4 MFC set to  0.000000
1/28/2013	6:46:23 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	6:46:23 PM	Tube furnace set to 150
1/28/2013	6:46:54 PM	H2 valve closed
1/28/2013	6:46:54 PM	BCl3 valve closed
1/28/2013	6:46:54 PM	PH3 valve closed
1/28/2013	6:46:54 PM	SiCl4 pre valve closed
1/28/2013	6:46:54 PM	SiCl4 post valve closed
1/28/2013	6:46:54 PM	Bypass valve closed
1/28/2013	6:46:54 PM	Bubbler valve closed
1/28/2013	6:46:54 PM	Helium valve opened
1/28/2013	6:46:54 PM	Main Vac valve opened
1/28/2013	6:46:54 PM	Helium MFC set to  20.000000
1/28/2013	6:46:54 PM	H2 MFC set to  0.000000
1/28/2013	6:46:54 PM	BCl3 MFC set to  0.000000
1/28/2013	6:46:54 PM	PH3 MFC set to  0.000000
1/28/2013	6:46:54 PM	SiCl4 MFC set to  0.000000
1/28/2013	6:46:54 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	6:46:54 PM	Tube furnace set to 150
1/28/2013	6:48:54 PM	Helium valve closed
1/28/2013	6:48:54 PM	H2 valve closed
1/28/2013	6:48:54 PM	BCl3 valve closed
1/28/2013	6:48:54 PM	PH3 valve closed
1/28/2013	6:48:54 PM	SiCl4 pre valve closed
1/28/2013	6:48:54 PM	SiCl4 post valve closed
1/28/2013	6:48:54 PM	Bypass valve closed
1/28/2013	6:48:54 PM	Bubbler valve closed
1/28/2013	6:48:54 PM	Main Vac valve opened
1/28/2013	6:48:54 PM	Helium MFC set to  0.000000
1/28/2013	6:48:54 PM	H2 MFC set to  0.000000
1/28/2013	6:48:54 PM	BCl3 MFC set to  0.000000
1/28/2013	6:48:54 PM	PH3 MFC set to  0.000000
1/28/2013	6:48:54 PM	SiCl4 MFC set to  0.000000
1/28/2013	6:48:54 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	6:48:54 PM	Tube furnace set to 150
1/28/2013	6:49:24 PM	H2 valve closed
1/28/2013	6:49:24 PM	BCl3 valve closed
1/28/2013	6:49:24 PM	PH3 valve closed
1/28/2013	6:49:24 PM	SiCl4 pre valve closed
1/28/2013	6:49:24 PM	SiCl4 post valve closed
1/28/2013	6:49:24 PM	Bypass valve closed
1/28/2013	6:49:24 PM	Bubbler valve closed
1/28/2013	6:49:24 PM	Helium valve opened
1/28/2013	6:49:24 PM	Main Vac valve opened
1/28/2013	6:49:24 PM	Helium MFC set to  20.000000
1/28/2013	6:49:24 PM	H2 MFC set to  0.000000
1/28/2013	6:49:24 PM	BCl3 MFC set to  0.000000
1/28/2013	6:49:24 PM	PH3 MFC set to  0.000000
1/28/2013	6:49:24 PM	SiCl4 MFC set to  0.000000
1/28/2013	6:49:24 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	6:49:24 PM	Tube furnace set to 150
1/28/2013	6:49:54 PM	Helium valve closed
1/28/2013	6:49:54 PM	H2 valve closed
1/28/2013	6:49:54 PM	BCl3 valve closed
1/28/2013	6:49:54 PM	PH3 valve closed
1/28/2013	6:49:54 PM	SiCl4 pre valve closed
1/28/2013	6:49:54 PM	SiCl4 post valve closed
1/28/2013	6:49:54 PM	Bypass valve closed
1/28/2013	6:49:54 PM	Bubbler valve closed
1/28/2013	6:49:54 PM	Main Vac valve opened
1/28/2013	6:49:54 PM	Helium MFC set to  0.000000
1/28/2013	6:49:54 PM	H2 MFC set to  0.000000
1/28/2013	6:49:54 PM	BCl3 MFC set to  0.000000
1/28/2013	6:49:54 PM	PH3 MFC set to  0.000000
1/28/2013	6:49:54 PM	SiCl4 MFC set to  0.000000
1/28/2013	6:49:54 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	6:49:55 PM	Tube furnace set to 150
1/28/2013	6:50:25 PM	H2 valve closed
1/28/2013	6:50:25 PM	BCl3 valve closed
1/28/2013	6:50:25 PM	PH3 valve closed
1/28/2013	6:50:25 PM	SiCl4 pre valve closed
1/28/2013	6:50:25 PM	SiCl4 post valve closed
1/28/2013	6:50:25 PM	Bypass valve closed
1/28/2013	6:50:25 PM	Bubbler valve closed
1/28/2013	6:50:25 PM	Helium valve opened
1/28/2013	6:50:25 PM	Main Vac valve opened
1/28/2013	6:50:25 PM	Helium MFC set to  20.000000
1/28/2013	6:50:25 PM	H2 MFC set to  0.000000
1/28/2013	6:50:25 PM	BCl3 MFC set to  0.000000
1/28/2013	6:50:25 PM	PH3 MFC set to  0.000000
1/28/2013	6:50:25 PM	SiCl4 MFC set to  0.000000
1/28/2013	6:50:25 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	6:50:25 PM	Tube furnace set to 150
1/28/2013	6:52:25 PM	Helium valve closed
1/28/2013	6:52:25 PM	H2 valve closed
1/28/2013	6:52:25 PM	BCl3 valve closed
1/28/2013	6:52:25 PM	PH3 valve closed
1/28/2013	6:52:25 PM	SiCl4 pre valve closed
1/28/2013	6:52:25 PM	SiCl4 post valve closed
1/28/2013	6:52:25 PM	Bypass valve closed
1/28/2013	6:52:25 PM	Bubbler valve closed
1/28/2013	6:52:25 PM	Main Vac valve opened
1/28/2013	6:52:25 PM	Helium MFC set to  0.000000
1/28/2013	6:52:25 PM	H2 MFC set to  0.000000
1/28/2013	6:52:25 PM	BCl3 MFC set to  0.000000
1/28/2013	6:52:25 PM	PH3 MFC set to  0.000000
1/28/2013	6:52:25 PM	SiCl4 MFC set to  0.000000
1/28/2013	6:52:25 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	6:52:25 PM	Tube furnace set to 150
1/28/2013	6:52:26 PM	Run finished at 6:52 PM
1/28/2013	7:18:36 PM	Recipe started at 7:18 PM
1/28/2013	7:18:36 PM	Helium valve closed
1/28/2013	7:18:36 PM	BCl3 valve closed
1/28/2013	7:18:36 PM	PH3 valve closed
1/28/2013	7:18:36 PM	SiCl4 pre valve closed
1/28/2013	7:18:36 PM	SiCl4 post valve closed
1/28/2013	7:18:36 PM	Bypass valve closed
1/28/2013	7:18:36 PM	Bubbler valve closed
1/28/2013	7:18:36 PM	H2 valve opened
1/28/2013	7:18:36 PM	Main Vac valve opened
1/28/2013	7:18:36 PM	Helium MFC set to  0.000000
1/28/2013	7:18:36 PM	H2 MFC set to  0.000000
1/28/2013	7:18:36 PM	BCl3 MFC set to  0.000000
1/28/2013	7:18:36 PM	PH3 MFC set to  0.000000
1/28/2013	7:18:36 PM	SiCl4 MFC set to  0.000000
1/28/2013	7:18:36 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	7:18:36 PM	Tube furnace set to 150
1/28/2013	7:19:06 PM	H2 valve closed
1/28/2013	7:19:06 PM	BCl3 valve closed
1/28/2013	7:19:06 PM	PH3 valve closed
1/28/2013	7:19:06 PM	SiCl4 pre valve closed
1/28/2013	7:19:06 PM	SiCl4 post valve closed
1/28/2013	7:19:06 PM	Bypass valve closed
1/28/2013	7:19:06 PM	Bubbler valve closed
1/28/2013	7:19:06 PM	Helium valve opened
1/28/2013	7:19:06 PM	Main Vac valve opened
1/28/2013	7:19:06 PM	Helium MFC set to  20.000000
1/28/2013	7:19:06 PM	H2 MFC set to  0.000000
1/28/2013	7:19:06 PM	BCl3 MFC set to  0.000000
1/28/2013	7:19:06 PM	PH3 MFC set to  0.000000
1/28/2013	7:19:06 PM	SiCl4 MFC set to  0.000000
1/28/2013	7:19:06 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	7:19:07 PM	Tube furnace set to 150
1/28/2013	7:19:37 PM	Helium valve closed
1/28/2013	7:19:37 PM	H2 valve closed
1/28/2013	7:19:37 PM	BCl3 valve closed
1/28/2013	7:19:37 PM	PH3 valve closed
1/28/2013	7:19:37 PM	SiCl4 pre valve closed
1/28/2013	7:19:37 PM	SiCl4 post valve closed
1/28/2013	7:19:37 PM	Bypass valve closed
1/28/2013	7:19:37 PM	Bubbler valve closed
1/28/2013	7:19:37 PM	Main Vac valve opened
1/28/2013	7:19:37 PM	Helium MFC set to  0.000000
1/28/2013	7:19:37 PM	H2 MFC set to  0.000000
1/28/2013	7:19:37 PM	BCl3 MFC set to  0.000000
1/28/2013	7:19:37 PM	PH3 MFC set to  0.000000
1/28/2013	7:19:37 PM	SiCl4 MFC set to  0.000000
1/28/2013	7:19:37 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	7:19:37 PM	Tube furnace set to 150
1/28/2013	7:20:07 PM	H2 valve closed
1/28/2013	7:20:07 PM	BCl3 valve closed
1/28/2013	7:20:07 PM	PH3 valve closed
1/28/2013	7:20:07 PM	SiCl4 pre valve closed
1/28/2013	7:20:07 PM	SiCl4 post valve closed
1/28/2013	7:20:07 PM	Bypass valve closed
1/28/2013	7:20:07 PM	Bubbler valve closed
1/28/2013	7:20:07 PM	Helium valve opened
1/28/2013	7:20:07 PM	Main Vac valve opened
1/28/2013	7:20:07 PM	Helium MFC set to  20.000000
1/28/2013	7:20:07 PM	H2 MFC set to  0.000000
1/28/2013	7:20:07 PM	BCl3 MFC set to  0.000000
1/28/2013	7:20:07 PM	PH3 MFC set to  0.000000
1/28/2013	7:20:07 PM	SiCl4 MFC set to  0.000000
1/28/2013	7:20:07 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	7:20:07 PM	Tube furnace set to 150
1/28/2013	7:20:37 PM	Helium valve closed
1/28/2013	7:20:37 PM	H2 valve closed
1/28/2013	7:20:37 PM	BCl3 valve closed
1/28/2013	7:20:37 PM	PH3 valve closed
1/28/2013	7:20:37 PM	SiCl4 pre valve closed
1/28/2013	7:20:37 PM	SiCl4 post valve closed
1/28/2013	7:20:37 PM	Bypass valve closed
1/28/2013	7:20:37 PM	Bubbler valve closed
1/28/2013	7:20:37 PM	Main Vac valve opened
1/28/2013	7:20:37 PM	Helium MFC set to  0.000000
1/28/2013	7:20:37 PM	H2 MFC set to  0.000000
1/28/2013	7:20:37 PM	BCl3 MFC set to  0.000000
1/28/2013	7:20:37 PM	PH3 MFC set to  0.000000
1/28/2013	7:20:37 PM	SiCl4 MFC set to  0.000000
1/28/2013	7:20:37 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	7:20:37 PM	Tube furnace set to 150
1/28/2013	7:21:07 PM	H2 valve closed
1/28/2013	7:21:07 PM	BCl3 valve closed
1/28/2013	7:21:07 PM	PH3 valve closed
1/28/2013	7:21:07 PM	SiCl4 pre valve closed
1/28/2013	7:21:07 PM	SiCl4 post valve closed
1/28/2013	7:21:07 PM	Bypass valve closed
1/28/2013	7:21:07 PM	Bubbler valve closed
1/28/2013	7:21:07 PM	Helium valve opened
1/28/2013	7:21:07 PM	Main Vac valve opened
1/28/2013	7:21:07 PM	Helium MFC set to  20.000000
1/28/2013	7:21:07 PM	H2 MFC set to  0.000000
1/28/2013	7:21:07 PM	BCl3 MFC set to  0.000000
1/28/2013	7:21:07 PM	PH3 MFC set to  0.000000
1/28/2013	7:21:07 PM	SiCl4 MFC set to  0.000000
1/28/2013	7:21:07 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	7:21:08 PM	Tube furnace set to 150
1/28/2013	7:21:38 PM	Helium valve closed
1/28/2013	7:21:38 PM	H2 valve closed
1/28/2013	7:21:38 PM	BCl3 valve closed
1/28/2013	7:21:38 PM	PH3 valve closed
1/28/2013	7:21:38 PM	SiCl4 pre valve closed
1/28/2013	7:21:38 PM	SiCl4 post valve closed
1/28/2013	7:21:38 PM	Bypass valve closed
1/28/2013	7:21:38 PM	Bubbler valve closed
1/28/2013	7:21:38 PM	Main Vac valve opened
1/28/2013	7:21:38 PM	Helium MFC set to  0.000000
1/28/2013	7:21:38 PM	H2 MFC set to  0.000000
1/28/2013	7:21:38 PM	BCl3 MFC set to  0.000000
1/28/2013	7:21:38 PM	PH3 MFC set to  0.000000
1/28/2013	7:21:38 PM	SiCl4 MFC set to  0.000000
1/28/2013	7:21:38 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	7:21:38 PM	Tube furnace set to 150
1/28/2013	7:21:58 PM	Run aborted at 7:21 PM
1/28/2013	7:21:58 PM	Helium valve closed
1/28/2013	7:21:58 PM	H2 valve closed
1/28/2013	7:21:58 PM	BCl3 valve closed
1/28/2013	7:21:58 PM	PH3 valve closed
1/28/2013	7:21:58 PM	SiCl4 pre valve closed
1/28/2013	7:21:58 PM	SiCl4 post valve closed
1/28/2013	7:21:58 PM	Bypass valve closed
1/28/2013	7:21:58 PM	Main Vac valve closed
1/28/2013	7:21:58 PM	Bubbler valve closed
1/28/2013	7:21:58 PM	Helium MFC set to  0.000000
1/28/2013	7:21:58 PM	H2 MFC set to  0.000000
1/28/2013	7:21:58 PM	BCl3 MFC set to  0.000000
1/28/2013	7:21:58 PM	PH3 MFC set to  0.000000
1/28/2013	7:21:58 PM	SiCl4 MFC set to  0.000000
1/28/2013	7:21:58 PM	Tube furnace set to 0
1/28/2013	7:22:03 PM	Main Vac valve opened
1/28/2013	7:22:55 PM	Recipe started at 7:22 PM
1/28/2013	7:22:55 PM	Helium valve closed
1/28/2013	7:22:55 PM	H2 valve closed
1/28/2013	7:22:55 PM	BCl3 valve closed
1/28/2013	7:22:55 PM	PH3 valve closed
1/28/2013	7:22:55 PM	SiCl4 pre valve closed
1/28/2013	7:22:55 PM	SiCl4 post valve closed
1/28/2013	7:22:55 PM	Main Vac valve closed
1/28/2013	7:22:55 PM	Bypass valve closed
1/28/2013	7:22:55 PM	Bubbler valve closed
1/28/2013	7:22:55 PM	Helium MFC set to  0.000000
1/28/2013	7:22:55 PM	H2 MFC set to  0.000000
1/28/2013	7:22:55 PM	BCl3 MFC set to  0.000000
1/28/2013	7:22:55 PM	PH3 MFC set to  0.000000
1/28/2013	7:22:55 PM	SiCl4 MFC set to  0.000000
1/28/2013	7:22:55 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	7:22:55 PM	Tube furnace set to 0
1/28/2013	7:22:58 PM	Helium valve closed
1/28/2013	7:22:58 PM	BCl3 valve closed
1/28/2013	7:22:58 PM	PH3 valve closed
1/28/2013	7:22:58 PM	SiCl4 pre valve closed
1/28/2013	7:22:58 PM	SiCl4 post valve closed
1/28/2013	7:22:58 PM	Main Vac valve closed
1/28/2013	7:22:59 PM	Bypass valve closed
1/28/2013	7:22:59 PM	Bubbler valve closed
1/28/2013	7:22:59 PM	H2 valve opened
1/28/2013	7:22:59 PM	Helium MFC set to  0.000000
1/28/2013	7:22:59 PM	H2 MFC set to  500.000000
1/28/2013	7:22:59 PM	BCl3 MFC set to  0.000000
1/28/2013	7:22:59 PM	PH3 MFC set to  0.000000
1/28/2013	7:22:59 PM	SiCl4 MFC set to  0.000000
1/28/2013	7:22:59 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	7:22:59 PM	Tube furnace set to 0
1/28/2013	7:24:11 PM	Helium valve closed
1/28/2013	7:24:11 PM	BCl3 valve closed
1/28/2013	7:24:11 PM	PH3 valve closed
1/28/2013	7:24:11 PM	SiCl4 pre valve closed
1/28/2013	7:24:11 PM	SiCl4 post valve closed
1/28/2013	7:24:11 PM	Main Vac valve closed
1/28/2013	7:24:11 PM	Bypass valve closed
1/28/2013	7:24:12 PM	H2 valve opened
1/28/2013	7:24:12 PM	Bubbler valve opened
1/28/2013	7:24:12 PM	Helium MFC set to  0.000000
1/28/2013	7:24:12 PM	H2 MFC set to  500.000000
1/28/2013	7:24:12 PM	BCl3 MFC set to  0.000000
1/28/2013	7:24:12 PM	PH3 MFC set to  0.000000
1/28/2013	7:24:12 PM	SiCl4 MFC set to  0.000000
1/28/2013	7:24:12 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	7:24:12 PM	Tube furnace set to 0
1/28/2013	7:24:13 PM	Helium valve closed
1/28/2013	7:24:13 PM	BCl3 valve closed
1/28/2013	7:24:13 PM	PH3 valve closed
1/28/2013	7:24:13 PM	SiCl4 pre valve closed
1/28/2013	7:24:13 PM	SiCl4 post valve closed
1/28/2013	7:24:13 PM	Main Vac valve closed
1/28/2013	7:24:13 PM	Bypass valve closed
1/28/2013	7:24:13 PM	H2 valve opened
1/28/2013	7:24:13 PM	Bubbler valve opened
1/28/2013	7:24:13 PM	Helium MFC set to  0.000000
1/28/2013	7:24:13 PM	H2 MFC set to  500.000000
1/28/2013	7:24:13 PM	BCl3 MFC set to  0.000000
1/28/2013	7:24:13 PM	PH3 MFC set to  0.000000
1/28/2013	7:24:13 PM	SiCl4 MFC set to  0.000000
1/28/2013	7:24:13 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	7:24:13 PM	Tube furnace set to 1000
1/28/2013	7:44:13 PM	Helium valve closed
1/28/2013	7:44:13 PM	BCl3 valve closed
1/28/2013	7:44:13 PM	PH3 valve closed
1/28/2013	7:44:13 PM	Main Vac valve closed
1/28/2013	7:44:13 PM	Bypass valve closed
1/28/2013	7:44:13 PM	H2 valve opened
1/28/2013	7:44:13 PM	SiCl4 pre valve opened
1/28/2013	7:44:13 PM	SiCl4 post valve opened
1/28/2013	7:44:13 PM	Bubbler valve opened
1/28/2013	7:44:13 PM	Helium MFC set to  0.000000
1/28/2013	7:44:13 PM	H2 MFC set to  500.000000
1/28/2013	7:44:13 PM	BCl3 MFC set to  0.000000
1/28/2013	7:44:13 PM	PH3 MFC set to  0.000000
1/28/2013	7:44:13 PM	SiCl4 MFC set to  50.000000
1/28/2013	7:44:13 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	7:44:13 PM	Tube furnace set to 1000
1/28/2013	7:59:13 PM	Helium valve closed
1/28/2013	7:59:13 PM	BCl3 valve closed
1/28/2013	7:59:13 PM	PH3 valve closed
1/28/2013	7:59:13 PM	SiCl4 pre valve closed
1/28/2013	7:59:13 PM	SiCl4 post valve closed
1/28/2013	7:59:13 PM	Main Vac valve closed
1/28/2013	7:59:13 PM	Bypass valve closed
1/28/2013	7:59:13 PM	H2 valve opened
1/28/2013	7:59:13 PM	Bubbler valve opened
1/28/2013	7:59:13 PM	Helium MFC set to  0.000000
1/28/2013	7:59:13 PM	H2 MFC set to  500.000000
1/28/2013	7:59:13 PM	BCl3 MFC set to  0.000000
1/28/2013	7:59:13 PM	PH3 MFC set to  0.000000
1/28/2013	7:59:13 PM	SiCl4 MFC set to  0.000000
1/28/2013	7:59:13 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	7:59:13 PM	Tube furnace set to 750
1/28/2013	7:59:25 PM	H2 valve closed
1/28/2013	7:59:25 PM	BCl3 valve closed
1/28/2013	7:59:25 PM	PH3 valve closed
1/28/2013	7:59:25 PM	SiCl4 pre valve closed
1/28/2013	7:59:25 PM	SiCl4 post valve closed
1/28/2013	7:59:25 PM	Main Vac valve closed
1/28/2013	7:59:25 PM	Bypass valve closed
1/28/2013	7:59:25 PM	Helium valve opened
1/28/2013	7:59:25 PM	Bubbler valve opened
1/28/2013	7:59:25 PM	Helium MFC set to  500.000000
1/28/2013	7:59:25 PM	H2 MFC set to  0.000000
1/28/2013	7:59:25 PM	BCl3 MFC set to  0.000000
1/28/2013	7:59:25 PM	PH3 MFC set to  0.000000
1/28/2013	7:59:25 PM	SiCl4 MFC set to  0.000000
1/28/2013	7:59:25 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	7:59:25 PM	Tube furnace set to 0
1/28/2013	8:01:03 PM	Run aborted at 8:01 PM
1/28/2013	8:01:03 PM	Helium valve closed
1/28/2013	8:01:03 PM	H2 valve closed
1/28/2013	8:01:03 PM	BCl3 valve closed
1/28/2013	8:01:03 PM	PH3 valve closed
1/28/2013	8:01:03 PM	SiCl4 pre valve closed
1/28/2013	8:01:03 PM	SiCl4 post valve closed
1/28/2013	8:01:03 PM	Bypass valve closed
1/28/2013	8:01:03 PM	Main Vac valve closed
1/28/2013	8:01:03 PM	Bubbler valve closed
1/28/2013	8:01:03 PM	Helium MFC set to  0.000000
1/28/2013	8:01:03 PM	H2 MFC set to  0.000000
1/28/2013	8:01:03 PM	BCl3 MFC set to  0.000000
1/28/2013	8:01:03 PM	PH3 MFC set to  0.000000
1/28/2013	8:01:03 PM	SiCl4 MFC set to  0.000000
1/28/2013	8:01:03 PM	Tube furnace set to 0
1/28/2013	8:01:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/28/2013	8:01:05 PM	Recipe started at 8:01 PM
1/28/2013	8:01:05 PM	Helium valve closed
1/28/2013	8:01:05 PM	H2 valve closed
1/28/2013	8:01:05 PM	BCl3 valve closed
1/28/2013	8:01:05 PM	PH3 valve closed
1/28/2013	8:01:05 PM	SiCl4 pre valve closed
1/28/2013	8:01:05 PM	SiCl4 post valve closed
1/28/2013	8:01:05 PM	Main Vac valve closed
1/28/2013	8:01:05 PM	Bypass valve closed
1/28/2013	8:01:05 PM	Bubbler valve closed
1/28/2013	8:01:05 PM	Helium MFC set to  0.000000
1/28/2013	8:01:05 PM	H2 MFC set to  0.000000
1/28/2013	8:01:05 PM	BCl3 MFC set to  0.000000
1/28/2013	8:01:05 PM	PH3 MFC set to  0.000000
1/28/2013	8:01:05 PM	SiCl4 MFC set to  0.000000
1/28/2013	8:01:05 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	8:01:05 PM	Tube furnace set to 0
1/28/2013	8:01:08 PM	H2 valve closed
1/28/2013	8:01:08 PM	BCl3 valve closed
1/28/2013	8:01:08 PM	PH3 valve closed
1/28/2013	8:01:08 PM	SiCl4 pre valve closed
1/28/2013	8:01:08 PM	SiCl4 post valve closed
1/28/2013	8:01:08 PM	Main Vac valve closed
1/28/2013	8:01:08 PM	Bypass valve closed
1/28/2013	8:01:08 PM	Bubbler valve closed
1/28/2013	8:01:08 PM	Helium valve opened
1/28/2013	8:01:08 PM	Helium MFC set to  500.000000
1/28/2013	8:01:08 PM	H2 MFC set to  0.000000
1/28/2013	8:01:08 PM	BCl3 MFC set to  0.000000
1/28/2013	8:01:08 PM	PH3 MFC set to  0.000000
1/28/2013	8:01:08 PM	SiCl4 MFC set to  0.000000
1/28/2013	8:01:08 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	8:01:08 PM	Tube furnace set to 0
1/28/2013	8:01:09 PM	Helium valve closed
1/28/2013	8:01:09 PM	H2 valve closed
1/28/2013	8:01:09 PM	BCl3 valve closed
1/28/2013	8:01:09 PM	PH3 valve closed
1/28/2013	8:01:09 PM	SiCl4 pre valve closed
1/28/2013	8:01:09 PM	SiCl4 post valve closed
1/28/2013	8:01:09 PM	Main Vac valve closed
1/28/2013	8:01:09 PM	Bypass valve closed
1/28/2013	8:01:09 PM	Bubbler valve closed
1/28/2013	8:01:09 PM	Helium MFC set to  0.000000
1/28/2013	8:01:09 PM	H2 MFC set to  0.000000
1/28/2013	8:01:09 PM	BCl3 MFC set to  0.000000
1/28/2013	8:01:09 PM	PH3 MFC set to  0.000000
1/28/2013	8:01:09 PM	SiCl4 MFC set to  0.000000
1/28/2013	8:01:09 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	8:01:09 PM	Tube furnace set to 0
1/28/2013	8:01:10 PM	Run finished at 8:01 PM
1/28/2013	8:01:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/28/2013	8:07:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/28/2013	8:07:28 PM	Recipe started at 8:07 PM
1/28/2013	8:07:28 PM	Helium valve closed
1/28/2013	8:07:28 PM	H2 valve closed
1/28/2013	8:07:28 PM	BCl3 valve closed
1/28/2013	8:07:28 PM	PH3 valve closed
1/28/2013	8:07:28 PM	SiCl4 pre valve closed
1/28/2013	8:07:28 PM	SiCl4 post valve closed
1/28/2013	8:07:28 PM	Main Vac valve closed
1/28/2013	8:07:28 PM	Bubbler valve closed
1/28/2013	8:07:28 PM	Bypass valve opened
1/28/2013	8:07:28 PM	Helium MFC set to  0.000000
1/28/2013	8:07:28 PM	H2 MFC set to  0.000000
1/28/2013	8:07:28 PM	BCl3 MFC set to  0.000000
1/28/2013	8:07:28 PM	PH3 MFC set to  0.000000
1/28/2013	8:07:28 PM	SiCl4 MFC set to  0.000000
1/28/2013	8:07:28 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	8:07:28 PM	Tube furnace set to 0
1/28/2013	8:08:40 PM	Helium valve closed
1/28/2013	8:08:40 PM	H2 valve closed
1/28/2013	8:08:40 PM	BCl3 valve closed
1/28/2013	8:08:40 PM	PH3 valve closed
1/28/2013	8:08:40 PM	SiCl4 pre valve closed
1/28/2013	8:08:40 PM	SiCl4 post valve closed
1/28/2013	8:08:40 PM	Main Vac valve closed
1/28/2013	8:08:41 PM	Bubbler valve closed
1/28/2013	8:08:41 PM	Bypass valve opened
1/28/2013	8:08:41 PM	Helium MFC set to  0.000000
1/28/2013	8:08:41 PM	H2 MFC set to  0.000000
1/28/2013	8:08:41 PM	BCl3 MFC set to  0.000000
1/28/2013	8:08:41 PM	PH3 MFC set to  0.000000
1/28/2013	8:08:41 PM	SiCl4 MFC set to  0.000000
1/28/2013	8:08:41 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	8:08:41 PM	Tube furnace set to 0
1/28/2013	8:09:41 PM	Helium valve closed
1/28/2013	8:09:41 PM	H2 valve closed
1/28/2013	8:09:41 PM	BCl3 valve closed
1/28/2013	8:09:41 PM	PH3 valve closed
1/28/2013	8:09:41 PM	SiCl4 pre valve closed
1/28/2013	8:09:41 PM	SiCl4 post valve closed
1/28/2013	8:09:41 PM	Bypass valve closed
1/28/2013	8:09:41 PM	Bubbler valve closed
1/28/2013	8:09:41 PM	Main Vac valve opened
1/28/2013	8:09:41 PM	Helium MFC set to  0.000000
1/28/2013	8:09:41 PM	H2 MFC set to  0.000000
1/28/2013	8:09:41 PM	BCl3 MFC set to  0.000000
1/28/2013	8:09:41 PM	PH3 MFC set to  0.000000
1/28/2013	8:09:41 PM	SiCl4 MFC set to  0.000000
1/28/2013	8:09:41 PM	Bypass solenoid MFC set to  0.000000
1/28/2013	8:09:41 PM	Tube furnace set to 0
1/28/2013	8:09:42 PM	Run finished at 8:09 PM
1/28/2013	8:09:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
